谭心,徐宏飞,孟可可.纳米金刚石TiV色心的实验制备与性能研究[J].表面技术,2022,51(3):192-198.
TAN Xin,XU Hong-fei,MENG Ke-ke.Experimental Preparation and Performance Research of Nano-Diamond TiV Color Center[J].Surface Technology,2022,51(3):192-198
纳米金刚石TiV色心的实验制备与性能研究
Experimental Preparation and Performance Research of Nano-Diamond TiV Color Center
投稿时间:2021-04-16  修订日期:2021-08-09
DOI:10.16490/j.cnki.issn.1001-3660.2022.03.020
中文关键词:  磁控溅射  化学气相沉积  钛掺杂金刚石  色心  光致发光
英文关键词:magnetron sputtering  chemical vapor deposition  titanium doped diamond  color center  photoluminescence
基金项目:国家自然科学基金(61765012);国家重点研究开发项目(2017YFF0207200、2017YFF0207203);内蒙古自然科学基金(2019MS05008);内蒙古自治区科技创新指导项目(2017CXYD-2、KCBJ2018031)
作者单位
谭心 内蒙古科技大学 机械工程学院,包头 014010 
徐宏飞 内蒙古科技大学 机械工程学院,包头 014010 
孟可可 内蒙古科技大学 机械工程学院,包头 014010 
AuthorInstitution
TAN Xin School of Mechanical Engineering, Inner Mongolia University of Science and Technology, Baotou 014010, China 
XU Hong-fei School of Mechanical Engineering, Inner Mongolia University of Science and Technology, Baotou 014010, China 
MENG Ke-ke School of Mechanical Engineering, Inner Mongolia University of Science and Technology, Baotou 014010, China 
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中文摘要:
      目的 利用磁控溅射辅助微波等离子体化学气相沉积技术制备钛掺杂纳米金刚石薄膜。方法 预先通过磁控溅射在石英玻璃基底上沉积纳米钛颗粒,然后使用微波等离子体化学气相沉积(MPCVD)设备在其表面沉积金刚石薄膜,通过活性氢原子将钛带入含碳生长基团中,从而将钛掺入纳米金刚石薄膜内。使用X射线光电子能谱(XPS)、拉曼光谱(Raman)、原子力显微镜(AFM)和共聚焦显微拉曼光谱仪对钛掺杂纳米金刚石薄膜的化学组成、表面形貌和钛色心光致发光性能进行分析。结果 上述实验方法可以将钛掺杂到金刚石薄膜中,进而影响金刚石薄膜的微观结构和表面形貌。利用XPS对实验中经过MPCVD沉积前后钛元素的键能详细地做了对比分析,预溅射钛的XPS能谱在458 eV和464 eV处出现明显的峰值,符合氧化钛的能谱,而经过MPCVD沉积金刚石薄膜后钛元素的峰值发生了移动,在454 eV和460 eV处,表明钛成键发生了改变;通过Raman检测发现钛的掺入导致G峰的强度增加;AFM表明纳米金刚石薄膜掺钛后表面粗糙度由13.8 nm下降到6.69 nm;通过荧光检测首次观察到了钛掺杂纳米金刚石薄膜在540 nm和760 nm附近的光致发光现象。结论 掺杂钛可细化金刚石晶粒,同时会增加石墨相,并降低其表面粗糙度。光致发光光谱表明钛掺杂金刚石薄膜中存在TiV0色心。这为金刚石过渡金属色心的制备提供了研究基础。
英文摘要:
      The work aims to prepare titanium-doped nano-diamond films by magnetron sputtering assisted microwave plasma chemical vapor deposition technology. Nano titanium particles were deposited on the quartz glass substrate by magnetron sputtering. Then, microwave plasma chemical vapor deposition (MPCVD) device was used to deposit a diamond film on the surface and the titanium was integrated into the carbon-containing growth group through active hydrogen atoms. Thus, titanium was incorporated into the nano-diamond film. X-ray photoelectron spectroscopy (XPS), Raman spectroscopy (Raman), atomic force microscope (AFM) and confocal Raman microscopy were used to analyze the chemical composition, surface morphology and titanium color center photoluminescence properties of the titanium-doped nano-diamond films. The aforementioned experimental method doped titanium into the diamond film, thereby affecting the microstructure and surface morphology of the diamond film. XPS was used to conduct a detailed comparative analysis of the bond energy of titanium before and after MPCVD deposition in the experiment. The XPS energy spectrum of pre-sputtered titanium had obvious peaks at 458 eV and 464 eV, which was consistent with the energy spectrum of titanium oxide, while the peak of the titanium element shifted to 454 eV and 460 eV after the diamond film deposited by MPCVD, indicating that the titanium bonding changed. According to the Raman test, the incorporation of titanium caused the intensity of the G peak to increase. AFM showed that after the nano-diamond film doped with titanium, the surface roughness decreased from 13.8 nm to 6.69 nm. The photoluminescence phenomenon of titanium-doped nano-diamond film near 540 nm and 760 nm was observed for the first time by fluorescence detection. Doping titanium can refine the diamond grains, increase the graphite phase, and reduce the surface roughness. The photoluminescence spectrum indicates the existence of the TiV0 color center in the titanium-doped diamond film. The work provides a research foundation for the preparation of diamond transition metal color centers.
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