姚婷婷,王天齐,王伟,汪冰洁,李刚,甘治平.柔性AZO/NiCr/Ag/NiCr/AZO透明导电玻璃结构对性能的影响[J].表面技术,2023,52(12):449-455.
YAO Ting-ting,WANG Tian-qi,WANG Wei,WANG Bing-jie,LI Gang,GAN Zhi-ping.Effect of Flexible AZO/NiCr/Ag/NiCr/AZO Transparent Conductive Glass Structure on Properties[J].Surface Technology,2023,52(12):449-455 |
| 柔性AZO/NiCr/Ag/NiCr/AZO透明导电玻璃结构对性能的影响 |
| Effect of Flexible AZO/NiCr/Ag/NiCr/AZO Transparent Conductive Glass Structure on Properties |
| 投稿时间：2022-10-13 修订日期：2023-02-27 |
| DOI：10.16490/j.cnki.issn.1001-3660.2023.12.039 |
| 中文关键词: 柔性 透明导电玻璃 AZO/NiCr/Ag/NiCr/AZO Ag厚度 透光率 品质因子 |
| 英文关键词:flexible transparent conducting glasses AZO/NiCr/Ag/NiCr/AZO Ag film thickness transmittance Haacke figure of merit |
| 基金项目:安徽省重点研究与开发计划项目(202004b11020020);上海市“科技创新行动计划“启明星项目(22QB1406600) |
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| Author | Institution |
| YAO Ting-ting | CNBM Research Institute for Advanced Glass Materials Group Co., Ltd, State Key Laboratory of Advanced Technology for Float Glass, Anhui Bengbu 233018, China;Silica-Based Materials Laboratory of Anhui Province, Anhui Bengbu 233018, China |
| WANG Tian-qi | CNBM Research Institute for Advanced Glass Materials Group Co., Ltd, State Key Laboratory of Advanced Technology for Float Glass, Anhui Bengbu 233018, China;Silica-Based Materials Laboratory of Anhui Province, Anhui Bengbu 233018, China |
| WANG Wei | China Triumph International Engineering Co., Ltd., Shanghai 200063, China |
| WANG Bing-jie | CNBM Research Institute for Advanced Glass Materials Group Co., Ltd, State Key Laboratory of Advanced Technology for Float Glass, Anhui Bengbu 233018, China |
| LI Gang | CNBM Research Institute for Advanced Glass Materials Group Co., Ltd, State Key Laboratory of Advanced Technology for Float Glass, Anhui Bengbu 233018, China |
| GAN Zhi-ping | Silica-Based Materials Laboratory of Anhui Province, Anhui Bengbu 233018, China |
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| 中文摘要: |
| 目的 室温制备柔性透明导电玻璃并提高其光电性能。方法 采用直流磁控溅射法，以柔性玻璃为基底，在室温下沉积(Aluminum-doped ZnO，AZO)/NiCr/Ag/NiCr/AZO多层结构透明导电玻璃。通过探针轮廓仪测试、X射线衍射仪(X-ray diffraction，XRD)测试、拉曼光谱仪测试、分光光度计测量、四探针测试和霍尔效应测试，分别获得了样品的各层薄膜厚度、X射线衍射图谱、拉曼光谱、透光率、方块电阻和电学性能。经过参数优化，选取Ag膜厚度为3~15 nm的样品，研究Ag膜厚度对玻璃样品的结构特征及光电性能的影响。结果 样品光电性能与Ag层厚度密切相关，随着中间Ag层厚度的增加，样品在380~760 nm波长范围内的平均光透光率先增加后降低，吸收边依次发生了红移，样品的方块电阻则随着Ag层厚度的增加单调减小。Ag膜厚度为12 nm的样品综合光电性能最佳，其平均透光率为82.4%，载流子浓度为8.32×1021 cm‒3，载流子迁移率为8.21 cm2/(V.s)，电阻率为9.15×10‒5 Ω.cm，方块电阻为8.8 Ω/sq，品质因子可达16.4×10–3 Ω–1。结论 说明可以通过透明导电薄膜结合金属薄膜在室温下获得柔性透明导电玻璃，并具有较好的透光性能和导电性。 |
| 英文摘要: |
| In recent years, flexible electronic products, flexible transparent organic solar cells, large size flexible flat panel display, energy-saving infrared reflection film, intelligent color changing window, etc., the demand for flexible transparent conductive glass is increasing. Due to the requirements of high resolution, energy saving, low cost, bending resistance and strong adhesion, flexible transparent conductive glass needs to be obtained at room temperature with high light transmittance, low resistivity and strong adhesion. Therefore, it has become a research hotspot to prepare flexible transparent conductive glass at room temperature and the improve its photoelectric properties. |
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