顾睿,何淑豪,冯凯,黄帅.网电极沿面介质阻挡放电等离子体润湿性改性及清洗性能研究[J].表面技术,2023,52(12):147-159.
GU Rui,HE Shu-hao,FENG Kai,HUANG Shuai.Wettability Modification and Cleaning Performance of Net Electrode Surface Dielectric Barrier Discharge Plasma[J].Surface Technology,2023,52(12):147-159 |
| 网电极沿面介质阻挡放电等离子体润湿性改性及清洗性能研究 |
| Wettability Modification and Cleaning Performance of Net Electrode Surface Dielectric Barrier Discharge Plasma |
| 投稿时间：2023-08-13 修订日期：2023-10-16 |
| DOI：10.16490/j.cnki.issn.1001-3660.2023.12.013 |
| 中文关键词: 大气压等离子体 表面清洗 沿面介质阻挡放电 静电场仿真 网电极 |
| 英文关键词:atmospheric plasma surface cleaning surface dielectric barrier discharge electrostatic field simulation net electrode |
| 基金项目:国家自然科学基金面上项目(52275420);国家重点研发计划 (2022YFB3403304);湖南省自然科学基金面上项目(2022JJ30136) |
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| Author | Institution |
| GU Rui | College of Mechanical and Vehicle Engineering, Hunan University, Changsha 410082, China |
| HE Shu-hao | College of Mechanical and Vehicle Engineering, Hunan University, Changsha 410082, China |
| FENG Kai | College of Mechanical and Vehicle Engineering, Hunan University, Changsha 410082, China |
| HUANG Shuai | College of Mechanical and Vehicle Engineering, Hunan University, Changsha 410082, China |
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| 中文摘要: |
| 目的 针对大气压等离子体装置存在的等离子体面积小、温度高及均匀性差等问题，研发一种网电极沿面介质阻挡放电装置和等离子体清洗平台。方法 通过静电场仿真和实验，优化装置的结构参数，通过分析放电波形探究装置的放电特性。最终确定网孔的对角线尺寸为6 mm，采用厚度为0.3 mm的云母片作为介质材料。通过清洗平台对涂有润滑油的玻璃表面和铝片表面进行清洗实验，并通过AFM、SEM、EDS对清洗前后的表面形貌和元素组分进行分析，探究等离子体清洗机理。结果 放电装置的电场强度和放电功率与网孔尺寸、介质材料的相对介电常数及放电电压呈正相关，与介质厚度呈负相关，放电装置的放电功率随着频率的增加呈先增大后减小的趋势，样品表面接触角随着电压的增大显著降低，随着放电频率的增加呈先减小后增大的趋势，并在5.29 kHz时达到最大放电功率(79 W)。通过试验得到了玻璃的最优清洗参数，电压峰值为11.52 kV，放电频率为5.29 kHz，处理距离为0.3 mm，处理时长为20 min，样品移动速度为2 mm/s。得到了铝片的最优清洗参数，放电电压峰值为11.60 kV，放电频率为5.29 kHz，处理距离为0.3 mm，处理时长为30 min，样品移动速度为2 mm/s。结论 从润湿性改变、光学显微镜照片、扫描电镜、原子力显微镜及表面元素的角度对样本表面的油污进行检验，经检验发现，样品表面的油污被去除，并显著改善了其润湿性。等离子体清洗以化学反应为主，可在不对表面造成损伤的前提下去除表面有机污染物。 |
| 英文摘要: |
| A net electrode surface dielectric barrier discharge plasma device and a plasma cleaning platform based on the electrode were designed and built to solve the problems of poor uniformity, high temperature, and small plasma area in existing atmospheric plasma cleaning device. The device structure parameters were optimized by electrostatic field simulation and experiments. The final mesh diagonal size was determined to be 6 mm, and mica flakes with a thickness of 0.3 mm were used as the dielectric material. By measuring the discharge waveform, the discharge characteristic of the device was studied. A cleaning platform based on the discharge device was built to carry out the cleaning experiment on the glass and aluminum surface coated with lubricating oil. The mechanism of plasma cleaning was studied by measuring the surface morphology and elemental components before and after cleaning through AFM, SEM and EDS. The electrostatic field and discharge power of the discharge device were positively correlated to the mesh size, the relative permittivity of the dielectric barrier and the discharge voltage, and were inversely correlated to the thickness of the barrier. With increasing frequency, the discharge power firstly increased and then decreased. The contact angle of the sample surface decreased significantly with the increase of voltage, and decreased firstly and then increased with the increase of discharge frequency, and reached a maximum discharge power of 79 W at 5.29 kHz. The optimal cleaning parameters for the glass derived from the experiments were:voltage peak-to-peak value of 11.52 kV, discharge frequency of 5.29 kHz, treatment distance of 0.3 mm, treatment duration of 20 min, and sample movement speed of 2 mm/s. After plasma cleaning, tiny dirt was removed from the glass surface, the maximum height difference on the surface decreased from 0.15 μm to 71 nm, and the carbon content decreased from 4.46% to 1.49%. At the same time, the oxygen content was slightly increased, the tiny dirt on the surface of the aluminium sheet was removed and the maximum height difference of the sample remained basically unchanged, while the carbon content on the surface of the aluminium sheet was reduced and the oxygen content was increased at the same time. This indicated that part of the active oxygen generated by the plasma combined with carbon to form small molecules that were easy to remove, and the other part generated hydrophilic groups to improve the adhesion of the sample surface. No obvious damage was observed on the sample surface after plasma treatment. The optimal cleaning parameters for the aluminium sheet were discharge voltage peak-to-peak of 11.60 kV, discharge frequency of 5.29 kHz, treatment distance of 0.3 mm, treatment duration of 30 min, and sample movement speed of 2 mm/s. The experiment shows that the cleaning platform can effectively clean the lubricating oil on the surface without causing damage and significantly improve its wettability. Plasma cleaning is dominated by chemical reactions and can clean organic contaminants from surface without damaging the surface. |
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