谷佳宾,李建勇,李刘合,金杰,张海鹏.溅射技术对TiN涂层结构和力学性能的影响[J].表面技术,2023,52(9):160-169, 188.
GU Jia-bin,LI Jian-yong,LI Liu-he,JIN Jie,ZHANG Hai-peng.Effect of Sputtering Technology on Microstructure and Mechanical Properties of TiN Coatings[J].Surface Technology,2023,52(9):160-169, 188 |
| 溅射技术对TiN涂层结构和力学性能的影响 |
| Effect of Sputtering Technology on Microstructure and Mechanical Properties of TiN Coatings |
| 投稿时间：2022-09-02 修订日期：2022-10-28 |
| DOI：10.16490/j.cnki.issn.1001-3660.2023.09.012 |
| 中文关键词: 磁控溅射 Hybrid TiN涂层 微观组织结构 力学性能 高温摩擦磨损性能 |
| 英文关键词:magnetron sputtering Hybrid TiN coating microstructure mechanical properties high temperature wear property |
| 基金项目:中央高校基本科研业务费专项资金(2023JBMC018，2019RC017) |
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| Author | Institution |
| GU Jia-bin | College of Mechanical, Electronic and Control Engineering,Key Laboratory of Vehicle Advanced Manufacturing, Measuring and Control Technology, Ministry of Education, Beijing Jiaotong University, Beijing 100044, China |
| LI Jian-yong | College of Mechanical, Electronic and Control Engineering,Key Laboratory of Vehicle Advanced Manufacturing, Measuring and Control Technology, Ministry of Education, Beijing Jiaotong University, Beijing 100044, China |
| LI Liu-he | College of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China |
| JIN Jie | College of Mechanical, Electronic and Control Engineering,Key Laboratory of Vehicle Advanced Manufacturing, Measuring and Control Technology, Ministry of Education, Beijing Jiaotong University, Beijing 100044, China |
| ZHANG Hai-peng | Luoyang Bearing Research Institute Co., Ltd., Henan Luoyang 471039, China;Henan Key Laboratory of High Performance Bearing Technology, Henan Luoyang 471039, China |
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| 中文摘要: |
| 目的 沉积条件对TiN涂层的组织结构和力学性能有着至关重要的影响，而溅射技术又决定了涂层的沉积条件，探究不同溅射技术对TiN涂层的微观组织结构和性能的影响，提高TiN涂层的力学性能和高温摩擦磨损性能。方法 采用不同的溅射技术(dcMS、HiPMS、Hybrid)在M2高速钢表面沉积TiN涂层，利用扫描电子显微镜(SEM)、X射线衍射仪(XRD)、sin2ψ法、纳米压痕仪、洛氏压痕法、划痕法和CSM球盘式摩擦试验机分别测试了TiN涂层的组织结构特征、沉积速率、残余应力、纳米硬度、膜基结合力和高温摩擦磨损性能。结果 不同溅射技术制备的TiN涂层均为柱状晶结构和TiN (111)择优取向。HiPIMS-TiN涂层具有最高的纳米硬度(29.7 GPa)和最低的膜基结合力(HF2)，而Hybrid-TiN涂层呈现出最小的残余应力、高沉积速率和高膜基结合力，其膜基结合力达到HF1级，临界载荷(Lc2)达到82.5 N。不同溅射技术制备的TiN涂层的摩擦因数均随着温度的升高而降低，在500 ℃时，TiN涂层的摩擦因数约为0.53。TiN涂层的磨损率随着温度的升高而升高，在不同温度下，Hybrid-TiN涂层均呈现出最低的磨损率。结论 溅射技术对TiN涂层的组织结构和力学性能有着重要影响，Hybrid-TiN涂层呈现出最优的综合力学性能和高温摩擦磨损性能。 |
| 英文摘要: |
| The microstructure properties of TiN coating are mainly affected by the deposition conditions, which in turn are affected by the sputtering technology. The proper use of the sputtering technology allows to control the state of ion bombardment during coating growth and tailors the crystal structure, thereby improving the properties of TiN coating. Therefore, TiN coatings were deposited on the M2 high-speed steel by different sputtering technologies (dcMS, HiPMS, and Hybrid) in this work. The effects of different sputtering technologies on the microstructure, mechanical properties, and high temperature wear properties of TiN coatings were investigated. |
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