刘艳梅,张蕊,朱强,王重阳,白乌力吉,曹凤婷,范其香,王铁钢.沉积温度对电弧离子镀AlCrSiN涂层的影响[J].表面技术,2023,52(7):149-157.
LIU Yan-mei,ZHANG Rui,ZHU Qiang,WANG Chong-yang,BAI Wu-li-ji,CAO Feng-ting,FAN Qi-xiang,WANG Tie-gang.Effects of Deposition Temperature on AlCrSiN Coatings Prepared by Arc Ion Plating Technique[J].Surface Technology,2023,52(7):149-157 |
| 沉积温度对电弧离子镀AlCrSiN涂层的影响 |
| Effects of Deposition Temperature on AlCrSiN Coatings Prepared by Arc Ion Plating Technique |
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| DOI：10.16490/j.cnki.issn.1001-3660.2023.07.012 |
| 中文关键词: 电弧离子镀 AlCrSiN涂层 沉积温度 摩擦磨损 力学性能 |
| 英文关键词:arc ion plating AlCrSiN coating deposition temperature friction and wear mechanical properties |
| 基金项目:天津市多元投入基金重点项目(22JCZDJC00670);天津市教委科研计划项目(2021ZD005，2022ZD020，2022ZD033);天津市多元投入基金项目(22JCYBJC01600) |
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| Author | Institution |
| LIU Yan-mei | Tianjin Key Laboratory of High Speed Cutting and Precision Processing, Tianjin University of Technology and Education, Tianjin 300222, China |
| ZHANG Rui | Tianjin Key Laboratory of High Speed Cutting and Precision Processing, Tianjin University of Technology and Education, Tianjin 300222, China |
| ZHU Qiang | Tianjin Key Laboratory of High Speed Cutting and Precision Processing, Tianjin University of Technology and Education, Tianjin 300222, China;College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China |
| WANG Chong-yang | Tianjin Key Laboratory of High Speed Cutting and Precision Processing, Tianjin University of Technology and Education, Tianjin 300222, China |
| BAI Wu-li-ji | Tianjin Key Laboratory of High Speed Cutting and Precision Processing, Tianjin University of Technology and Education, Tianjin 300222, China |
| CAO Feng-ting | Tianjin Key Laboratory of High Speed Cutting and Precision Processing, Tianjin University of Technology and Education, Tianjin 300222, China |
| FAN Qi-xiang | Tianjin Key Laboratory of High Speed Cutting and Precision Processing, Tianjin University of Technology and Education, Tianjin 300222, China |
| WANG Tie-gang | Tianjin Key Laboratory of High Speed Cutting and Precision Processing, Tianjin University of Technology and Education, Tianjin 300222, China |
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| 中文摘要: |
| 目的 优化涂层制备工艺，改善AlCrSiN涂层的力学及摩擦性能。方法 采用可调节磁场强度的新型电弧离子镀技术，在不同沉积温度下研制AlCrSiN涂层。利用XRD及SEM分析AlCrSiN涂层的相结构、截面形貌，借助纳米压痕仪、划痕测试仪、高温摩擦磨损试验机以及台阶仪测试AlCrSiN涂层硬度、膜/基结合强度以及摩擦磨损性能。系统分析沉积温度对AlCrSiN涂层的成分分布、微观结构演变、力学性能的影响，并研究沉积温度对AlCrSiN涂层摩擦磨损性能的影响规律及磨损机制。结果 随着沉积温度逐渐升高，涂层吸附原子的活性增强，涂层沉积速率出现先上升、再下降的趋势。随着沉积温度升高，涂层中的Cr2N相逐渐替代CrN相，且hcp-AlN相沿 晶面择优生长。各沉积温度下，AlCrSiN涂层均与单晶硅片基体表面结合良好，且具有良好的致密性。沉积温度的升高，增强了原子的扩散能力，致使晶粒尺寸增大。随着沉积温度升高，涂层的硬度及弹性模量均呈上升趋势，而H/E、H3/E*2均先升高、后降低，涂层膜/基结合强度逐渐增大。当沉积温度为350 ℃时，所制备的AlCrSiN涂层特征值H/E、H3/E*2最高，此时涂层的耐磨性能最佳;当沉积温度升至450 ℃时，涂层的纳米硬度最大，约为25.59 GPa，弹性模量也最大，为501.76 GPa，涂层的结合强度最高，为121.9 N。结论 通过改变沉积温度，调控AlCrSiN涂层的微观结构，制备的AlCrSiN涂层均较为致密，无明显孔洞等缺陷。AlCrSiN涂层结合强度整体上处于较高水平，并表现出较好的耐磨性能。当沉积温度为350 ℃时，涂层摩擦系数最低，H/E和H3/E*2均达到最大值，此时涂层的耐磨损性能最佳。 |
| 英文摘要: |
| AlCrSiN coating deposited by PVD technique is expected to meet the application of tool coating with high temperature resistance and high temperature stability requirements for its outstanding mechanical and anti-oxidative properties. Amorphous SiNx coating can be achieved and nano-composite coating structure can be formed in AlCrSiN coating, which makes the coating have excellent mechanical performance. The formation and distribution of phases in AlCrSiN coating are significantly different due to different preparation processes, which is closely related to the ion energy in the vacuum chamber of the coating preparation equipment during the coating preparation. A series of AlCrSiN coatings were prepared at different deposition temperature by a new arc ion plating technique in this study. The arc ion plating equipment was equipped with an external coil with the function of adjusting the magnetic field strength, so the properties of AlCrSiN coating were optimized by regulating the energy in the vacuum chamber during the coating preparation process. In order to improve mechanical and tribological properties of AlCrSiN coating prepared by new arc ion plating technique, the effect of deposition temperature on the microstructure evolution and mechanical properties of AlCrSiN coating was systematically analyzed, and the effect of deposition temperature on the friction and wear properties and wear mechanism of AlCrSiN coating was also studied. The phase and texture were analyzed by XRD and the cross-sectional morphologies of coating were investigated by SEM to characterize the microstructure development in AlCrSiN coating. The results indicated that with the increase of deposition temperature, the ion kinetic energy in the vacuum chamber increased, and the deposition rate of AlCrSiN coating increased firstly and then decreased. When deposition temperature increased, Cr2N phase in the coating replaced CrN phase gradually, and hcp-AlN grew preferentially along the crystal plane. The AlCrSiN coating deposited at various deposition temperature was well bonded with the surface of monocrystalline silicon substrate and had a compact structure. The increase of deposition temperature enhanced the diffusion ability of atoms, resulting in the increase of grain size of AlCrSiN coating. Hardness, elastic modulus, adhesion and tribological properties of the above coating were evaluated by nano-indentation, scratch tester, high temperature friction tester and step tester. With the increase of preparation temperature, the hardness and elastic modulus of AlCrSiN coating increased, while H/E and H3/E2 increased firstly and then decreased, and the friction coefficient firstly decreased and then increased, which was because the coating was denser and less brittle coatings were formed in friction. When the deposition temperature was 350 ℃, the friction coefficient was the lowest, which was 0.5, and the characteristic coefficient H/E and H3/E2 of AlCrSiN coating were the highest, and the corresponding coating had the best tribological properties. When the deposition temperature rose to 450 ℃, the nano-hardness and elastic modulus of the coating were the highest, which were 25.59 GPa, 501.76 GPa respectively and the adhesion of coating was the strongest, which was 121.9 N. The microstructure of AlCrSiN coating can be adjusted by changing the deposition temperature. The prepared AlCrSiN coating is relatively dense without obvious defects such as pores, and exhibits strong adhesion and good wear resistance. The AlCrSiN coating deposited at 350 ℃ shows the lowest friction coefficient, the highest H/E and H3/E2and the best wear resistance. |
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