田灿鑫,邹长伟,王泽松,项燕雄,谢伟,李助军,刘怡飞.基底偏压对电弧离子镀制备AlCrVN涂层微结构及力学性能的影响[J].表面技术,2023,52(3):181-188.
TIAN Can-xin,ZOU Chang-wei,WANG Ze-song,XIANG Yan-xiong,XIE Wei,LI Zhu-jun,LIU Yi-fei.Influence of Substrate Bias Voltage on Structure and Properties of AlCrVN Coatings Deposited by Cathodic Arc Ion Platings[J].Surface Technology,2023,52(3):181-188
基底偏压对电弧离子镀制备AlCrVN涂层微结构及力学性能的影响
Influence of Substrate Bias Voltage on Structure and Properties of AlCrVN Coatings Deposited by Cathodic Arc Ion Platings
  
DOI:10.16490/j.cnki.issn.1001-3660.2023.03.015
中文关键词:  阴极电弧离子镀  AlCrVN涂层  偏压  硬度  耐磨性能
英文关键词:cathodic arc ion plating  AlCrVN coatings  bias voltage  hardness  wear resistance
基金项目:广东省自然科学基金面上项目(2020A1515011451);岭南师范学院人才项目(ZL1931);广东省科技特派员项目(GDKTP2021007500)
作者单位
田灿鑫 岭南师范学院,广东 湛江 524048 
邹长伟 岭南师范学院,广东 湛江 524048 
王泽松 岭南师范学院,广东 湛江 524048 
项燕雄 岭南师范学院,广东 湛江 524048 
谢伟 岭南师范学院,广东 湛江 524048 
李助军 广州铁路职业技术学院,广州 510430 
刘怡飞 广州铁路职业技术学院,广州 510430 
AuthorInstitution
TIAN Can-xin Lingnan Normal University, Guangdong Zhanjiang 524048, China 
ZOU Chang-wei Lingnan Normal University, Guangdong Zhanjiang 524048, China 
WANG Ze-song Lingnan Normal University, Guangdong Zhanjiang 524048, China 
XIANG Yan-xiong Lingnan Normal University, Guangdong Zhanjiang 524048, China 
XIE Wei Lingnan Normal University, Guangdong Zhanjiang 524048, China 
LI Zhu-jun Guangzhou Railway Polytechnic, Guangzhou 510430, China 
LIU Yi-fei Guangzhou Railway Polytechnic, Guangzhou 510430, China 
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中文摘要:
      目的 研究基底偏压对AlCrVN涂层微结构及力学性能的影响。方法 采用电弧离子镀技术,使用合金靶AlCrV,纯N2作为引弧介质和氮源,在不同的基底偏压下制备AlCrVN涂层,对AlCrVN涂层的物相结构、微观形貌、硬度、摩擦因数及磨损率进行测试分析,作为对比制备了AlCrN涂层。结果 AlCrVN涂层为柱状晶结构,由面心立方CrN为基础的(CrV)N置换固溶体相和Cr2N六方相2种晶相组成,随着基底偏压的增大,涂层衍射峰强度及位置变化不明显;涂层表面的大颗粒数量减少,凹坑增多;涂层硬度由50 V时的22 GPa增大到150 V时的24.2 GPa,200 V时硬度值减小到22 GPa;摩擦因数由0.42增大到0.71;磨损率由6.4×10‒7 mm3/(N.m)逐渐增大到13.2×10‒7 mm3/(N.m)。结论 基底偏压对AlCrVN涂层性能影响较大,低偏压(50 V)时,涂层的摩擦因数、磨损率最低,耐磨性能最好。含V元素的AlCrVN涂层的力学和摩擦学性能都优于AlCrN涂层。
英文摘要:
      AlCrN coatings cannot meet the increasing requirements for processing technology. Nano multilayer structure and multiple alloyed methods are effective method to tailor the microstructure and properties of wear resistance coatings. Metal V is easy to oxidize at high temperature to form Magnéli phase V2O5 with low melting point, which has self-lubrication effect, and reduces the friction coefficient of the coating in the wear. Here, V alloyed AlCrN coatings was deposited to study the influence of bias voltage on the properties of AlCrVN. When V is alloyed with AlCrN, the phase transition could be observed causing a congruent deterioration of the mechanical properties. When the crystal structure of AlCrVN coating remains unchanged, the wear resistance of AlCrVN coating with low V content (<7.1at.%) is better than that with high V content (>7.1at.%) while the influence of V content on the hardness of AlCrVN coating is not obvious. The properties of AlCrVN coating are also affected by its own structure which is closely related to the process of the coatings. Compared with AlCrVN coatings with high V content, the properties of AlCrVN coatings with low V content is more worthy of exploration. Therefore, the AlCrVN coatings were deposited by arc ion plating using low V content alloy target AlCrV in pure N2 and under different bias voltage. The influence of bias voltage on structure, hardness, wear was systematically analyzed, and the AlCrN coatings was prepared as a comparison. The composition, structure and morphology of the coating were characterized by X-ray diffractometer, electron energy spectrometer and field emission scanning electron microscope. The mechanical and wear properties of the coatings were tested by hardness tester, friction and wear tester and surface profilometer. AlCrVN coatings is a columnar crystal structure composed of fcc-CrN based (CrV)N substitutional solid solution phase and hexagonal Cr2N phase. With the increase of bias voltage, the content of N and Cr in AlCrVN coatings increases slightly, the content of Al decreases slightly, and the content of V does not change significantly. The crystalline phase structure and grain size of AlCrVN coatings do not change obviously, and the intensity and position of diffraction peak do not change obviously. The number of large particles on the surface of AlCrVN coatings decreases while the number of pits increases. The hardness of AlCrVN coatings increases from 22 GPa at 50 V to 24.2 GPa at 150 V, and decreases to 22 GPa at 200 V. The friction coefficient of AlCrVN coating increases from 0.42 to 0.71 for grinding Si3N4 ball at room temperature with the increase of bias voltage. The wear rate increases from 6.4×10‒7 mm3/(N.m) to 13.2×10‒7 mm3/(N.m), and the wear mechanism of AlCrVN coatings gradually changes from adhesion wear with a small amount of abrasive wear to abrasion wear with a small amount of adhesion wear. At low bias voltage (50 V), the friction coefficient and wear rate of AlCrVN coating are the lowest and wear resistance is the best. The friction coefficient and wear rate of AlCrVN coating with low V content (3%) are lower than those of AlCrN coating at room temperature.
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