成健,孔维畅,杨震,廖建飞,刘顿.液体辅助激光微孔加工研究进展[J].表面技术,2023,52(2):183-195.
CHENG Jian,KONG Wei-chang,YANG Zhen,LIAO Jian-fei,LIU Dun.Research Progress of Liquid-assisted Laser Micro-hole Processing[J].Surface Technology,2023,52(2):183-195
液体辅助激光微孔加工研究进展
Research Progress of Liquid-assisted Laser Micro-hole Processing
  
DOI:10.16490/j.cnki.issn.1001-3660.2023.02.016
中文关键词:  辅助加工  液体辅助  激光打孔  加工材料  打孔质量
英文关键词:auxiliary processing  liquid-assisted  laser drilling  processing materials  drilling quality
基金项目:
作者单位
成健 湖北工业大学 机械学院中英超快激光研究中心,武汉 430068 
孔维畅 湖北工业大学 机械学院中英超快激光研究中心,武汉 430068 
杨震 湖北工业大学 机械学院中英超快激光研究中心,武汉 430068 
廖建飞 湖北工业大学 机械学院中英超快激光研究中心,武汉 430068 
刘顿 湖北工业大学 机械学院中英超快激光研究中心,武汉 430068 
AuthorInstitution
CHENG Jian Center for Sino-UK Ultrafast Laser Processing Research, School of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, China 
KONG Wei-chang Center for Sino-UK Ultrafast Laser Processing Research, School of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, China 
YANG Zhen Center for Sino-UK Ultrafast Laser Processing Research, School of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, China 
LIAO Jian-fei Center for Sino-UK Ultrafast Laser Processing Research, School of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, China 
LIU Dun Center for Sino-UK Ultrafast Laser Processing Research, School of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, China 
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中文摘要:
      随着微孔加工技术的逐渐成熟,激光微孔加工的应用越来越广泛,但依靠单一激光束进行微孔加工仍存在一些问题,尤其是在深孔加工方面,出现了以激光束为主、多能量场辅助的复合打孔技术,并逐渐成为了热点。针对液体辅助激光微孔加工研究领域,总结了水基辅助激光打孔、水基超声振动辅助激光打孔、水基超声−磁场辅助激光打孔和电解液/水射流辅助激光打孔等方法。在水基的基础上,加入了超声、磁场和温度场,使得辅助场变得多元化,在多层面上进行复合加工。介绍了不同辅助加工方法的去除材料机理及加工后材料特性的变化,水起到冷却的作用,但在水层下会形成空化气泡,超声振动可以击溃气泡,磁场和温度场为材料残渣提供了能量,具体表现在热效应、材料去除速率、打孔深度、重铸层及裂纹等方面。影响微孔质量的因素有微孔锥度、深径比、孔的圆度、重铸层厚度、热影响区、微裂纹和粗糙度等,主要对微孔锥度、深径比及其他指标进行了分析,总结了加工方法对微孔质量的影响。
英文摘要:
      With the rapid progress of laser processing technology, micro-hole processing with laser is becoming more and more popular. However, it is still away from qualifying real applications, especially when high aspect ratio micro-hole is required. Facing the situation, hybrid micro-hole drilling methods, i.e., laser beam-based and multi-energy field-assisted hole drilling techniques gradually emerge. With the purpose of elucidating the inspiring development in this important field, the work aims to summarize the methods of underwater laser drilling, water-based ultrasonic vibration-assisted laser drilling, water-based ultrasonic & magnetic field assisted laser drilling and electrolyte/water jet assisted laser drilling. The advantages and shortages of each method are provided and discussed as follows. Compared to laser beam drilling, underwater laser drilling means that the workpiece is immersed into water and the laser beam passes through water to drill holes. By tuning water layer thickness and laser parameters, the quality of micro-hole can be improved. On the one hand, the existence of water takes away accumulated heat thus achieving more accurate edge quality; on the other hand, the cooling effect makes it easy for the expelled slags to re-accumulate inside the drilled voids, which seriously affects the incoming laser beam absorption. The latter one limits its applicability in industry. Water-based ultrasonic vibration assisted micro-hole processing is based on underwater laser drilling. In addition, ultrasonic vibration source is employed. The ultrasonic vibration can break the bubbles generated during the drill course. It can also decrease the interference of bubbles on the laser beam and reduce debris repositioning in the processing area. All the above effects favor a cleaner surface profile and a better aspect ratio. As for water-based ultrasonic-magnetic field assisted laser micro-hole drilling method, an ultrasonic vibration field and a magnetic field are coupled simultaneously into the underwater micro-hole drilling procedures. The addition of magnetic field can weaken the shielding effect of the plasma on the incident laser beam, increase the effective energy injection of the incident laser beam and enhance the mixing effect caused by the electromagnetic force inside the molten metal. It can improve the laser energy absorption inside the drilled hole and promote material removal efficiency. Meantime, it can also suppress the formation of recast layers and reduce residual stress. Water jet assisted micro-hole drilling method is another novel way for micro-hole drilling. In this procedure, water jet is used not only for putting workpiece inside water tank. Water jet provides powerful water flow. The water flow can cool down the generated slags and take them away, which is unavailable for underwater laser drilling. Water jet can also wash the recast layer to improve the quality of the drilled hole. Furthermore, electrolyte can be introduced into the water flow to become into hybrid liquid flow. By virtue of its corrosive effect and the laser beam ablation, material removal rate speeds up. As the results, hole drilling efficiency is obviously increased.
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