黄民备,赖振国,张斌,龙美彪,高凯雄,张俊彦.含氢碳薄膜500 ℃退火前后摩擦学行为研究[J].表面技术,2022,51(10):192-199.
HUANG Min-bei,LAI Zhen-guo,ZHANG Bin,LONG Mei-biao,GAO Kai-xiong,ZHANG Jun-yan.The Results of Annealing Treatment of Hydrogenated Amorphous Carbon Film Is Affected by Its Intrinsic Structure[J].Surface Technology,2022,51(10):192-199
含氢碳薄膜500 ℃退火前后摩擦学行为研究
The Results of Annealing Treatment of Hydrogenated Amorphous Carbon Film Is Affected by Its Intrinsic Structure
  
DOI:10.16490/j.cnki.issn.1001-3660.2022.10.019
中文关键词:  含氢碳薄膜  500 ℃退火  双极脉冲  干燥空气  甲醇环境  摩擦学性能
英文关键词:a-C:H film  annealing at 500 ℃  bipolar pulse  dry air  methanol environment  tribological properties
基金项目:中国科学院青年创新促进会项目(2017459)
作者单位
黄民备 南岳电控衡阳工业技术股份有限公司,湖南 衡阳 421000 
赖振国 中国科学院兰州化学物理研究所 材料磨损与防护重点实验室,兰州 730000;中国科学院大学 材料与光电技术学院,北京 100049 
张斌 中国科学院兰州化学物理研究所 材料磨损与防护重点实验室,兰州 730000 
龙美彪 南岳电控衡阳工业技术股份有限公司,湖南 衡阳 421000 
高凯雄 中国科学院兰州化学物理研究所 材料磨损与防护重点实验室,兰州 730000 
张俊彦 中国科学院兰州化学物理研究所 材料磨损与防护重点实验室,兰州 730000 
AuthorInstitution
HUANG Min-bei Nanyue Electronic Control Industrial Technology Co.LTD, Hunan Hengyang 421000, China 
LAI Zhen-guo Key Laboratory of Science and Technology on Wear and Protection of Materials, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China;Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China 
ZHANG Bin Key Laboratory of Science and Technology on Wear and Protection of Materials, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China 
LONG Mei-biao Nanyue Electronic Control Industrial Technology Co.LTD, Hunan Hengyang 421000, China 
GAO Kai-xiong Key Laboratory of Science and Technology on Wear and Protection of Materials, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China 
ZHANG Jun-yan Key Laboratory of Science and Technology on Wear and Protection of Materials, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China 
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中文摘要:
      目的 为含氢碳薄膜在甲醇发动机中应用提供新思路。方法 首先利用BiP–PECVD方法在Si基底上制备了含氢碳薄膜,并在500 ℃于Ar气氛中进行1 h退火处理。通过纳米硬度、X射线光电子能谱、傅里叶转变红外光谱、激光共聚焦拉曼光谱、场发射扫描电镜、CSM摩擦试验机等,分别评价未退火和500 ℃退火含氢碳薄膜的结构、力学性能、表面形貌及在干燥空气和甲醇环境中的摩擦学性能。通过对比,研究甲醇的引入对500 ℃退火含氢碳薄膜摩擦学行为造成的影响。结果 500 ℃退火会改变含氢碳薄膜中碳的杂化方式由sp3–C向sp2–C转变,促使薄膜石墨化,C==C/C—C的值明显增大(从0.67到0.99),硬度降低(从26.5 GPa到22.0 GPa),弹性模量几乎不变,H/E减小,耐磨性变差。在干燥空气中,与未退火碳薄膜相比,500 ℃退火含氢碳薄膜的摩擦因数降低(从0.031到0.024),磨损率增加了1.27倍,而相应摩擦对偶球的磨损降低(从4.22×10–6 mm3到3.99 ×10–6 mm3)。而在甲醇环境下,500 ℃退火含氢碳薄膜的摩擦因数增高(从0.052到0.062),磨损率增加了15.11倍,相应摩擦对偶球的磨损也增高(从6.16×10–6 mm3到13.9×10–6 mm3)。但是,未退火含氢碳薄膜在甲醇环境中的磨损率是干燥环境中的1/2.84,表现出降低趋势;500 ℃退火的含氢碳薄膜在甲醇环境中的磨损率是干燥环境中的4.14倍。结论 含氢碳薄膜经过500 ℃退火会造成薄膜内部碳原子杂化方式转变,薄膜石墨化,这对干燥环境中薄膜的摩擦学性能有所提高,但并不利于其甲醇环境中的摩擦。
英文摘要:
      To provide novel way for the application of hydrogen-containing carbon (a-C:H) films in methanol engines. First, a-C:H film was prepared on Si substrate by BiP-PECVD method, and then annealed at 500 ℃ in Ar atmosphere for 1 h. The unannealed and annealed a-C:H films were characterized through Nano-indenter, X-ray Photoelectron Spectroscopy (XPS), Fourier Transform Infrared spectroscopy (FTIR), Raman spectroscopy, Field Emission Scanning Electron microscopy(FESEM), CSM tribometer, etc. to obtain its structure, mechanical properties, surface morphology and tribological properties. The effect of annealing at 500 ℃ on the tribological behavior of a-C:H film was comparatively studied in dry air and methanol environment. As a result, after annealed at 500 ℃, the carbon hybridization have been changed from sp3-C to sp2-C resulting in graphitization of the film and the value of C==C/C—C increasing from 0.67 to 0.99. The hardness decreased from 26.5 Gpa to 22.0 GPa and the elastic modulus was almost unchanged as well as the H/E decreases, which means the wear resistance becomes worse in dry air. Compared with the unannealed a-C:H film, in dry air, the friction coefficient of the a-C:H film annealed at 500 ℃ decreased from 0.031 to 0.024, and the wear rate increased by 1.27 times. Meanwhile, the wear volume of both corresponding friction ball reduced from 4.22×10–6 mm3 to 3.99×10–6 mm3; In the methanol environment, the friction coefficient of the a-C:H film annealed at 500 ℃ increased from 0.052 to 0.062), and the wear rate increased by 15.11 times. Meanwhile, the wear volume of the corresponding friction counter ball also increased from 6.16×10–6 mm3 to 13.9×10–6mm3 However, the wear rate of unannealed a-C:H film in methanol environment was 1/2.84 of that in dry environment which shows a decreasing trend; the wear rate of a-C:H film annealed at 500 ℃ in methanol environment was 4.14 times lower than that in dry environment. In a summary, under annealing temperature of 500 ℃, a-C:H film will result in graphitization, which is conducive to tribological properties in dry air but not in the methanol environment.
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