黄卓斌,周青,罗大微,李旗抗,王海丰.高熵合金薄膜微观结构与摩擦学性能的研究综述[J].表面技术,2022,51(9):30-42, 82.
HUANG Zhuo-bin,ZHOU Qing,LUO Da-wei,LI Qi-kang,WANG Hai-feng.Review on Microstructure and Tribological Properties of High Entropy Alloys Film[J].Surface Technology,2022,51(9):30-42, 82 |
| 高熵合金薄膜微观结构与摩擦学性能的研究综述 |
| Review on Microstructure and Tribological Properties of High Entropy Alloys Film |
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| DOI：10.16490/j.cnki.issn.1001-3660.2022.09.003 |
| 中文关键词: 高熵合金薄膜 磁控溅射法 微观结构 摩擦学性能 自润滑 |
| 英文关键词:high entropy alloy film magnetron sputtering microstructure tribological properties self-lubrication |
| 基金项目:国家自然科学基金(52175188，51975474);中央高校基本科研业务费(3102019JC001) |
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| Author | Institution |
| HUANG Zhuo-bin | State Key Laboratory of Solidification Processing, Northwestern Polytechnical University, Xi'an 710072, China |
| ZHOU Qing | State Key Laboratory of Solidification Processing, Northwestern Polytechnical University, Xi'an 710072, China |
| LUO Da-wei | State Key Laboratory of Solidification Processing, Northwestern Polytechnical University, Xi'an 710072, China |
| LI Qi-kang | State Key Laboratory of Solidification Processing, Northwestern Polytechnical University, Xi'an 710072, China |
| WANG Hai-feng | State Key Laboratory of Solidification Processing, Northwestern Polytechnical University, Xi'an 710072, China |
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| 中文摘要: |
| 在机械系统运行中存在的摩擦磨损问题直接影响系统的工作效率、运行可靠性和使用寿命。如何降低摩擦磨损对机械系统运行的影响至关重要。通过特殊的表面处理工艺在关键工件表面沉积耐磨损、自润滑的薄膜在众多的减摩降损方法中效果突出。相较于传统薄膜，高熵合金薄膜具有独特的微观结构和优异的力学性能，在摩擦领域表现出极佳的发展潜力。概述了近年来有关高熵合金薄膜的研究进展。首先介绍了高熵合金薄膜的基本概念和制备方法，论述了这些制备方法的原理、优缺点和适用领域。其中，通过磁控溅射法制备的高熵合金薄膜的表面光滑致密、成分均匀性好、膜基结合强度较高、组织结构可控，该方法已成为高熵合金薄膜最常用的制备方法。重点论述了采用磁控溅射法来调节元素组分、工艺参数、界面结构对高熵合金薄膜的微观结构和摩擦性能的影响，并从耐磨损性和减摩自润滑性等方面分析改善高熵合金薄膜摩擦学性能的关键因素。高熵合金薄膜具有硬质的组织结构、表面光滑致密、膜基结合牢固等特点，这是提升耐磨损性能的关键。通过复合自润滑相或氧化磨损诱导生成致密的润滑膜，可显著改善其减摩性能。总结了目前研究中存在的问题和不足，并就未来高熵合金薄膜在摩擦领域的研究方向进行了展望。 |
| 英文摘要: |
| Friction and wear behaviors occurring to the machinery system during operation directly affect the working efficiency, operational reliability and service life of the system. Therefore, reducing the impact of friction and wear on operation of the mechanical system is necessary. The wear-resistant and self-lubricating films fabricated on the surface of key workpieces by special surface technologies show the significant effects in numerous anti-resistant methods. Compared with traditional films, high entropy alloy films show excellent potential in friction due to their unique microstructures and excellent mechanical properties. This paper reviewed the research progress of high entropy alloy films in recent years. Firstly, the basic concepts and common preparation methods of high entropy alloy films were presented. The principles, advantages, shortages and applicable fields of these preparation methods were discussed. Among them, magnetron sputtering has become the main preparation method for high entropy alloy film with excellent performance, which combines with smooth and dense surface, good ingredient uniformity, high strength of film-substrate bonding and controllable microstructure. Then, the effects of element composition, process parameters and interface structure on the microstructures and tribological properties of high entropy alloy film were discussed. The key factors for improving the tribological properties of high entropy alloy films were analyzed from the two aspects of wear resistance and self-lubrication. It's suggested that hard structure, smooth-dense surface and strong film-substrate bond were the keys to improving the wear resistance. The lubricating film induced by composite of self-lubricating phase and substrate or oxidative wear could significantly improve anti-friction performance. Finally, the problems and shortages in the current research process were summarized and the future development of high entropy films in friction field was prospected. |
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