蒋琴,孙丽,张旭.磁过滤沉积TiAlSiN纳米薄膜的摩擦磨损与腐蚀磨损行为[J].表面技术,2022,51(8):214-224.
JIANG Qin,SUN Li,ZHANG Xu.Wear and Corrosion-Wear Behavior of TiAlSiN Nano-film Deposited by Filtered Cathodic Vacuum Arc Deposition[J].Surface Technology,2022,51(8):214-224 |
| 磁过滤沉积TiAlSiN纳米薄膜的摩擦磨损与腐蚀磨损行为 |
| Wear and Corrosion-Wear Behavior of TiAlSiN Nano-film Deposited by Filtered Cathodic Vacuum Arc Deposition |
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| DOI：10.16490/j.cnki.issn.1001-3660.2022.08.017 |
| 中文关键词: TiAlSiN薄膜 磁过滤阴极真空弧沉积技术 耐磨性 磨损腐蚀 |
| 英文关键词:TiAlSiN film filtered cathodic vacuum arc deposition wear resistance corrosion-wear |
| 基金项目:国家自然科学基金(12175019);国家自然科学基金联合基金重点项目(U1865206);国家科技重大专项(2017-VII-0012-0107) |
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| 中文摘要: |
| 目的 研究磁过滤沉积方法制备的TiAlSiN纳米薄膜的结构及力学性能对摩擦学性能及腐蚀磨损行为的影响。方法 采用磁过滤阴极真空弧沉积技术，在6×10–2~15×10–2 Pa的N2气压条件下，将316L不锈钢作为基底，制备出TiAlSiN薄膜。利用SEM、XRD、XPS对薄膜的结构成分形貌进行表征分析，使用摩擦磨损仪分析测试薄膜的摩擦磨损行为，并且使用电化学工作站分析测试薄膜在3.5%(质量分数)人工海水环境下的摩擦磨损及开路电位变化曲线，通过台阶仪测得磨损后磨痕轮廓曲线，并计算磨损率。结果 TiAlSiN薄膜具有典型的非晶包覆纳米晶的复合结构，薄膜表面细致光滑，截面无明显柱状晶结构。随着气压的增大，薄膜晶粒尺寸从26 nm降至12 nm。在0.08 Pa气压下制备的TiAlSiN薄膜的力学性能最佳，纳米硬度为22 GPa，基膜结合力达到28 N，干摩擦系数为0.412，磨损率为0.5×10–6 mm3/(N.m)。在3.5%人工海水介质中，TiAlSiN薄膜的摩擦系数为0.36，磨损率为2.5×10–6 mm3/(N.m)，腐蚀和磨损的交互作用使磨损率增大。结论 磁过滤阴极真空弧沉积技术制备的TiAlSiN纳米薄膜表现出良好的力学性能，兼具耐摩擦和耐磨蚀性能，具有宽广的应用前景。 |
| 英文摘要: |
| This paper aims to investigate the contribution of structure and mechanical properties to tribological properties and corrosion-wear behavior of TiAlSiN nano-films prepared by Filtered Cathodic Vacuum Arc Deposition. TiAlSiN films were deposited on the surface of 316L stainless steel substrate under the pressure of N2 at 6×10–2~15×10–2 Pa. The microstructure, composition and morphology of film were analyzed by SEM, XRD, XPS. The friction and wear behavior of the film in dry condition were tested by friction tester, also the open circuit potential change curve of the film in 3.5wt.% artificial seawater environment were recorded by electrochemical workstation. The profiler was used to test the contour curve of the wear and calculate the wear rate. The results show the TiAlSiN film has a typical composite structure of amorphous nanocrystals. The surface of the film is fine and smooth, and the cross section has no obvious columnar crystal structure. With the increase of air pressure, the grain size of the film decreases from 26 nm to 12 nm. In addition, the TiAlSiN film deposited under the air pressure of 0.08Pa exhibits the superior mechanical properties with nano-hardness at 22 GPa and basement membrane binding force at 28 N. The dry friction coefficient is 0.412 and wear rate is 0.5×10–6 mm3/(N.m); while in 3.5wt.% artificial seawater, the friction coefficient and wear rate change to 0.36 and 2.5×10–6 mm3/(N.m) due to the enhancement of wear rate caused by the interaction of corrosion and wear. The TiAlSiN nano-film prepared by the Filtered Cathodic Vacuum Arc Deposition shows good mechanical properties as well as friction and abrasion resistance, which boasts broad application prospects. |
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