张赵云,段泽文,江海霞,张贝贝,赵晓宇,吴有智,王鹏.掺杂元素Ti对WS2薄膜结构和摩擦学性能的影响[J].表面技术,2022,51(6):239-247, 266.
ZHANG Zhao-yun,DUAN Ze-wen,JIANG Hai-xia,ZHANG Bei-bei,ZHAO Xiao-yu,WU You-zhi,WANG Peng.The Influence of Doped Ti Element on Structure and Tribological Properties of WS2 Film[J].Surface Technology,2022,51(6):239-247, 266 |
| 掺杂元素Ti对WS2薄膜结构和摩擦学性能的影响 |
| The Influence of Doped Ti Element on Structure and Tribological Properties of WS2 Film |
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| DOI：10.16490/j.cnki.issn.1001-3660.2022.06.021 |
| 中文关键词: WS2–Ti复合膜 结构 力学性能 摩擦学性能 |
| 英文关键词:WS2-Ti composite film structure mechanical properties tribological properties |
| 基金项目:中国科学院西部之光青年学者项目 |
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| Author | Institution |
| ZHANG Zhao-yun | College of Materials Science and Engineering, Lanzhou University of Technology, Lanzhou 730050, China;State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China |
| DUAN Ze-wen | State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China |
| JIANG Hai-xia | State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China |
| ZHANG Bei-bei | State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China |
| ZHAO Xiao-yu | State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China |
| WU You-zhi | College of Materials Science and Engineering, Lanzhou University of Technology, Lanzhou 730050, China |
| WANG Peng | State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China |
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| 中文摘要: |
| 目的 提高单一成分WS2薄膜的力学和摩擦学性能。方法 采用多靶磁控溅射方法制备不同Ti含量的WS2–Ti复合薄膜。利用X射线能谱仪(EDS)、拉曼光谱仪(Raman)、X射线光电子能谱仪(XPS)、X射线衍射仪(XRD)、扫描电子显微镜(SEM)、纳米压痕仪，对薄膜的成分、化学态、晶体结构、形貌以及力学性能进行表征，并利用球–盘摩擦试验机检测该系列薄膜在大气和真空环境下的摩擦学性能。结果 掺杂元素Ti 显著改善WS2薄膜的微观结构、力学性能和摩擦学性能。随着Ti含量的增加，WS2薄膜的结晶度下降，致密度增加，其硬度和杨氏模量分别从0.25 GPa和16.60 GPa增加到3.52 GPa和59.00 GPa。Ti原子数分数为7.17%时，复合薄膜的磨损率在真空和大气环境下分别低至0.10×10‒15 m3/(N.m)和2.66×10‒15 m3/(N.m)。结论 在真空摩擦试验中，WS2基薄膜的磨损机制为黏着磨损，适量的Ti可有效抑制薄膜发生黏着磨损，使得薄膜的磨损率大幅降低。在大气摩擦试验中，Ti有效抑制了硬质颗粒WO3刺穿WS2分子保护膜，使得复合薄膜的磨损寿命延长，磨损率降低。 |
| 英文摘要: |
| The aim of this work was to improve the mechanical and tribological properties of pure WS2 film. The WS2-Ti composite films with different contents of Ti were prepared by the means of multi-target magnetron sputtering. The energy spectrometer (EDS)，Raman spectroscopy (Raman), X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), scanning electron microscope (SEM) and nano-indentation tester were used to characterize the film composition, chemical state, crystal structure, morphology and mechanical properties. Furthermore, the ball-on-disk was performed to analyze the tribological property of film under humid air and vacuum conditions. The results show that the doping element Ti significantly improves the microstructure, mechanical properties and tribological properties of the WS2 film. With the increase of Ti content, the crystallinity of the WS2 film decreases and the density increases. Its hardness and Young’s modulus increase from 0.25 GPa and 16.60 GPa to 3.52 GPa and 59.00 GPa, respectively. When the Ti contents is 7.17at.%, the wear rate of the composite film is as low as 0.10×10‒15 m3/(N.m) and 2.66×10‒15 m3/(N.m) under vacuum and humid air environment, respectively. In the vacuum friction test, the wear mechanism of the WS2-based film is adhesive wear, and an appropriate amount of Ti can effectively inhibit the adhesive wear of the film, which greatly reduces the wear rate of the film. In the atmospheric friction test, Ti effectively inhibited the hard particles WO3 from piercing the WS2 molecular protective film, so that the wear life of the composite film was prolonged and the wear rate was reduced. |
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