宋晓明,张振宇,刘杰,李玉彪,赵仕程,徐光宏.5083铝合金绿色化学机械抛光液对表面粗糙度的影响及机理分析[J].表面技术,2022,51(5):345-353.
SONG Xiao-ming,ZHANG Zhen-yu,LIU Jie,LI Yu-biao,ZHAO Shi-cheng,XU Guang-hong.Effect and Mechanism Analysis of Green Chemical Mechanical Slurry on Surface Roughness of 5083 Aluminum Alloy[J].Surface Technology,2022,51(5):345-353 |
| 5083铝合金绿色化学机械抛光液对表面粗糙度的影响及机理分析 |
| Effect and Mechanism Analysis of Green Chemical Mechanical Slurry on Surface Roughness of 5083 Aluminum Alloy |
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| DOI：10.16490/j.cnki.issn.1001-3660.2022.05.035 |
| 中文关键词: 5083铝合金 化学机械抛光 绿色环保 表面粗糙度 机理分析 电化学分析 |
| 英文关键词:5083 aluminum alloy chemical mechanical polishing green surface roughness mechanism analysis electrochemical analysis |
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| Author | Institution |
| SONG Xiao-ming | School of Mechanical Engineering, Qilu University of Technology, Jinan 250353, China |
| ZHANG Zhen-yu | School of Mechanical Engineering, Qilu University of Technology, Jinan 250353, China;Dalian University of Technology, Liaoning Dalian 116024, China |
| LIU Jie | Dalian University of Technology, Liaoning Dalian 116024, China |
| LI Yu-biao | Dalian University of Technology, Liaoning Dalian 116024, China |
| ZHAO Shi-cheng | School of Mechanical Engineering, Qilu University of Technology, Jinan 250353, China |
| XU Guang-hong | Dalian University of Technology, Liaoning Dalian 116024, China |
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| 中文摘要: |
| 目的 为提高5083铝合金的表面质量，研制一种环境友好型化学机械抛光液，并分析5083铝合金化学机械抛光液对表面粗糙度的影响及作用机理。方法 使用绿色环保的化学机械抛光液对5083铝合金进行化学机械抛光。采用单因素控制变量法，分析不同的pH调节剂类型、pH值以及过氧化氢(H2O2)浓度对铝合金化学机械抛光后表面粗糙度的影响规律。采用电化学工作站，分析5083铝合金在不同抛光液中的静态腐蚀特性。运用X 射线光电子能谱仪(XPS)分析5083铝合金在不同抛光液下表面元素化学组分的变化。结果 绿色环保抛光液的主要成分为去离子水、4%(质量分数)的二氧化硅磨粒、2.0%(质量分数)的H2O2和柠檬酸，并调节pH至3.0。5083铝合金进行化学机械抛光后，在70 μm×50 μm的扫描范围内铝合金表面粗糙度最低为0.929 nm。结论 电化学试验和XPS测试的分析表明，柠檬酸可加快抛光液对铝合金的腐蚀，H2O2使铝合金表面形成氧化层，减缓抛光液对铝合金的腐蚀。氧化层的主要成分为Al2O3、AlOOH和Al(OH)3。 |
| 英文摘要: |
| In order to improve the surface quality of 5083 aluminum alloy, an environment-friendly chemical mechanical slurry was developed, and the effect and mechanism of 5083 aluminum alloy chemical mechanical slurry on surface roughness are analyzed. Chemical mechanical polishing of aluminum alloy with green slurry. The effects of different pH regulators, pH value and H2O2 concentration on the surface roughness of aluminum alloy after CMP were analyzed. The static corrosion characteristics of 5083 aluminum alloy in different slurry were analyzed by electrochemical workstation. X-ray photoelectron spectroscopy (XPS) was used to analyze the chemical composition changes of surface elements of 5083 aluminum alloy in different slurry. As one of the important factors in the CMP process, the slurry is mainly composed of pH regulator, abrasive particles, corrosion inhibitor and oxidant. A new type of green slurry without hazardous chemicals such as strong acid and alkali was developed. After chemical mechanical polishing, the surface roughness of 5083 aluminum alloy decreased to 0.929 nm in the scanning range of 70 μm×50 μm. The main components of the green slurry are silica abrasive particles, citric acid, hydrogen peroxide and deionized water. When the slurry does not contain H2O2, the surface roughness first decreases and then increases with the increase of pH, and the lowest surface roughness is 1.998 nm when the pH is 3.0. With the increase of H2O2 content, the surface roughness first decreases and then increases. When the mass fraction of H2O2 is 2.0wt.%, the surface roughness is at least 0.929 nm. Electrochemical test and XPS analysis show that citric acid can accelerate the corrosion of aluminum alloy by slurry, and H2O2 can form an oxide layer on the surface of aluminum alloy, thus slowing down the corrosion of aluminum alloy by slurry. The main components of the oxide film are Al2O3, AlOOH and Al(OH)3. |
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