段佳妮,李文正,赵春蕾,赵远,董敏鹏,袁志威,李金龙.多弧离子镀制备TiAlCN和TiAlN涂层的结构和摩擦磨损性能[J].表面技术,2022,51(4):139-148.
DUAN Jia-ni,LI Wen-zheng,ZHAO Chun-lei,ZHAO Yuan,DONG Min-peng,YUAN Zhi-wei,LI Jin-long.Structure and Tribological Property of TiAlCN and TiAlN Coatings Prepared by Multi-arc Ion Plating[J].Surface Technology,2022,51(4):139-148 |
| 多弧离子镀制备TiAlCN和TiAlN涂层的结构和摩擦磨损性能 |
| Structure and Tribological Property of TiAlCN and TiAlN Coatings Prepared by Multi-arc Ion Plating |
| 投稿时间：2021-05-06 修订日期：2021-08-26 |
| DOI：10.16490/j.cnki.issn.1001-3660.2022.04.013 |
| 中文关键词: 离子镀 TiAlCN TiAlN 结构 硬度 结合力 摩擦磨损 |
| 英文关键词:ion plating TiAlCN TiAlN structure hardness bonding ability friction wear |
| 基金项目:浙江省自然科学基金探索项目(LY20E010001);宁波市“科技创新2025”重大专项(2018B10019) |
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| Author | Institution |
| DUAN Jia-ni | Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Key Laboratory of Marine Materials and Related Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Zhejiang Ningbo 315201, China;Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China |
| LI Wen-zheng | Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Key Laboratory of Marine Materials and Related Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Zhejiang Ningbo 315201, China;Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China |
| ZHAO Chun-lei | Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Key Laboratory of Marine Materials and Related Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Zhejiang Ningbo 315201, China |
| ZHAO Yuan | Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Key Laboratory of Marine Materials and Related Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Zhejiang Ningbo 315201, China |
| DONG Min-peng | Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Key Laboratory of Marine Materials and Related Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Zhejiang Ningbo 315201, China;Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China |
| YUAN Zhi-wei | Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Key Laboratory of Marine Materials and Related Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Zhejiang Ningbo 315201, China |
| LI Jin-long | Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Key Laboratory of Marine Materials and Related Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Zhejiang Ningbo 315201, China;Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China |
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| 中文摘要: |
| 目的 对比研究TiAlCN和TiAlN涂层的结构、塑韧性、结合力和摩擦磨损性能。方法 采用多弧离子镀技术制备了TiAlCN和TiAlN涂层。利用扫描电镜(SEM)、X射线衍射仪(XRD)和X射线光电子能谱仪(XPS)研究了涂层的微观形貌、元素和物相组成。通过纳米压痕、纳米划痕、划痕测试仪和摩擦磨损实验研究了涂层的硬度、塑韧性、结合力和摩擦学性能。结果 TiAlCN和TiAlN涂层表面均匀致密，有明显的柱状晶结构特征。TiAlN涂层的硬度(29.4±2.2) GPa大于TiAlCN涂层的硬度(22.5±1.1) GPa。TiAlCN涂层的H/E、H3/E*2、塑韧性和结合强度优于TiAlN涂层。大气环境摩擦时TiAlN和TiAlCN涂层的摩擦因数分别为0.80和0.38，TiAlCN涂层的摩擦因数远低于TiAlN。TiAlN和TiAlCN的磨损率分别为1.4×10‒5 mm3/(N.m)和9.1×10‒6 mm3/(N.m)，TiAlCN涂层具有更低的磨损率。结论 碳元素的掺入可以明显改善TiAlCN涂层的塑韧性和摩擦磨损性能，这主要归因于TiAlCN涂层优异的抗变形能力和无定形碳的润滑作用。 |
| 英文摘要: |
| The work aims to compare the structure, plastic toughness, bonding ability and tribological property of TiAlCN and TiAlN coatings. The coatings were deposited by multi-arc ion plating. The micromorphology, element composition and crystal phases of the coatings were studied by scanning electron microscope (SEM), X-ray diffractometer (XRD) and X-ray photoelectron spectroscopy (XPS). The composition, hardness, plastic toughness, bonding ability and tribological property of the coatings were studied by nanoindentation, nanoscratch, scratch test and friction wear experiments. The results show that both surfaces are uniform and compact, with obvious columnar crystal structure. The hardness of TiAlN coating (29.4±2.2) GPa was higher than that of TiAlCN coating (22.5±1.1) GPa. The H/E, H3/E2, plastic toughness and bonding ability of the TiAlCN coating were better than TiAlN coating. The friction coefficients of TiAlN and TiAlCN coatings were 0.80 and 0.38 in atmospheric environment, respectively, and the friction coefficient of TiAlCN coating was much lower than TiAlN. The wear rate of TiAlN and TiAlCN was 1.4×10‒5 mm3/(N.m) and 9.1×10‒6 mm3/(N.m), respectively. The TiAlCN coating had a lower wear rate. The incorporation of carbon can significantly improve the plastic toughness and tribological property of TiAlCN coating. This was mainly due to the excellent deformation resistance of TiAlCN coating, and the lubricating effect of amorphous carbon. |
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