潘晓龙,胡小刚,赵婧,邱龙时.薄膜/涂层材料界面结合强度评价方法研究进展[J].表面技术,2022,51(4):50-65.
PAN Xiao-long,HU Xiao-gang,ZHAO Jing,QIU Long-shi.NPResearch Progress on Evaluation Methods of Interfacial Bonding Strength of Film/Coating[J].Surface Technology,2022,51(4):50-65 |
| 薄膜/涂层材料界面结合强度评价方法研究进展 |
| NPResearch Progress on Evaluation Methods of Interfacial Bonding Strength of Film/Coating |
| 投稿时间：2021-08-08 修订日期：2021-11-09 |
| DOI：10.16490/j.cnki.issn.1001-3660.2022.04.005 |
| 中文关键词: 薄膜 涂层 界面 结合强度 评价方法 |
| 英文关键词:film coating interface bonding strength evaluation methods |
| 基金项目:国防科技工业核材料创新基金(ICNM-2021-ZH-15);国家自然科学基金(52101099);陕西省自然科学基础研究计划(2020JQ-924，2021JQ-977);陕西省重点研发计划(2021GY-233，2021GY-249) |
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| Author | Institution |
| PAN Xiao-long | Xi'an Rare Metal Materials Institute Co., Ltd., Xi'an 710016, China |
| HU Xiao-gang | Xi'an Rare Metal Materials Institute Co., Ltd., Xi'an 710016, China |
| ZHAO Jing | Xi'an Rare Metal Materials Institute Co., Ltd., Xi'an 710016, China |
| QIU Long-shi | Xi'an Rare Metal Materials Institute Co., Ltd., Xi'an 710016, China |
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| 中文摘要: |
| 薄膜/涂层与基体间的结合强度作为评价膜层质量的关键指标之一，是保证膜层满足力学、电学、光学以及磁学等使用性能的根本前提。薄膜/涂层材料界面结合性能的表征是表面科学与工程领域的重要组成部分，亦是研判和预防界面失效的基本依据。近年来，新材料、新装备、新技术和新工艺的不断涌现，加剧了界面微观结构的复杂性和结果的不可预测性，同时对膜/基界面结合强度的评价也提出了更高的要求。目前，用于膜/基界面结合强度的评价方法种类繁多，测试原理各异，适用范围不同，且尚无一种方法适用于所有的材料体系。准确评价膜/基界面结合强度对界面性能的控制、改善，以及对膜层的服役行为和寿命的预估具有重要指导意义。首先，简要介绍了界面结合强度的物理含义，明晰了“本征结合强度”与“实际结合强度”间的差异，并从断裂力学的角度描述了界面结合强度的表征模型。然后，将当前常用的评价方法按照加载方式划分为静态加载方法(包括拉伸法、剥离法、划痕法、压入法、鼓泡法、弯曲法等)和动态加载方法(往复划痕法、冲击法、循环压入法、接触疲劳法等)，并进行了分类评述。系统梳理了各种评价方法的基本原理、技术特点、力学模型，概括了不同评价方法的优势及不足。此外，归纳了适用的涂层材料体系和涂层厚度范围，综述了薄膜/涂层材料界面结合强度评价方法的研究现状。在静态评价方法中，划痕法和表面压入法因具有测试简单、耗时少、试样无需特殊处理，且有专业商用化设备可供使用等优点，是目前最为常用的膜基结合强度测试方法。相较于静态方法，采用动态方法来评价界面结合强度更加贴近服役工况，可为薄膜/涂层材料失效提供更为准确的预判。在动态评价方法中，滚动接触疲劳法和循环压入法具有对界面因素敏感、可定量化和可动态化监测等优点，在膜基结合强度评价上展示出良好的应用前景。最后，展望了界面结合强度评价方法未来的发展方向，未来应当开发更加高效、准确的评价方法，构建统一的评价标准和表征参量，建立完整的界面安全和失效评价体系，以期为膜/基界面结合强度的合理及准确评价提供参考，拓展薄膜/涂层材料在新领域和新方向上的应用广度和深度。 |
| 英文摘要: |
| The bonding strength between the film/coating and the substrate as one of the key indexes to evaluate the quality of the film/coating is the basic premise to ensure that the film/coating meets the requirements of mechanical, electrical, optical and magnetic properties. The characterization of interfacial bonding properties of film/coating materials is one of the most important parts of surface science and engineering, as well as the basis for the study and prevention of interface failure. With the constant emergence of new materials, new equipment, new technologies and new process, the interfacial microstructure becomes more complex, the result becomes more unpredictable, and higher requirements are put forward for the evaluation of interface bonding strength. At present, various methods have been developed to evaluate the interfacial bonding strength of film/coating and substrate, the test principle and application scope are quite different. More importantly, there is no single method that is suitable for all material systems. It is of great significance to accurately evaluate the film/coating bonding strength for the control and improvement of the interface properties, and the prediction of the service behavior and life of the film/coating. The physical significance of interfacial bonding strength was introduced, the difference between “intrinsic binding strength” and “actual binding strength” was clarified, and the characterization model of interfacial bonding strength was described from the perspective of fracture mechanics. According to the loadings, the current commonly used evaluation methods were divided into static loading methods (including tensile test, peeling test, scratch test, pressing test, bubbling test, bending test, etc.) and dynamic loading methods (reciprocating scratch test, impact test, cyclic indentation test, contact fatigue test, etc.). The basic principles, technical characteristics, and mechanical models of evaluation methods were systematically reviewed. The advantages, disadvantages and applicable fields of different evaluation methods were induced. Furthermore, the applicable coating material system and coating thickness range were summarized. The research status of evaluation methods for interfacial bonding strength of film/coating materials was reviewed. Among the static evaluation methods, scratch test and surface indentation test were still the most commonly used methods due to the advantages of simple test, less time consuming, no special treatment for samples, and available professional commercial equipment. Compared with the static evaluation methods, the interfacial bonding strength characterized by dynamic evaluation methods was more close to the service conditions, and provided more accurate prediction for the failure of film/coating materials. Among the dynamic evaluation methods, rolling contact fatigue test and cyclic indentation test had the advantages of sensitivity to interface factors, quantification and dynamic monitoring, showing a good application prospect in the evaluation of interfacial bonding strength. Finally, the development directions of interfacial bond strength evaluation methods were prospected. In the future, more efficient and accurate evaluation methods will be developed, unified evaluation criteria and characterization parameters will be constructed, and a complete interface safety and failure evaluation system will be established. The work provides reference for the reasonable and accurate evaluation of the interface bonding strength, and expands the breadth and depth of application of film/coating materials in new fields and directions. |
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