付泽钰,王天国.氮氩比对模具钢表面镀CrAlN薄膜形貌和性能的影响[J].表面技术,2022,51(1):105-112.
FU Ze-yu,WANG Tian-guo.Effect of the Ratio of Nitrogen and Argon on the Microstructure and Properties of CrAlN Film Deposited on Die Steel Surface[J].Surface Technology,2022,51(1):105-112 |
| 氮氩比对模具钢表面镀CrAlN薄膜形貌和性能的影响 |
| Effect of the Ratio of Nitrogen and Argon on the Microstructure and Properties of CrAlN Film Deposited on Die Steel Surface |
| 投稿时间：2021-01-25 修订日期：2021-05-31 |
| DOI：10.16490/j.cnki.issn.1001-3660.2022.01.011 |
| 中文关键词: 多弧离子镀 CrAlN薄膜 抗氧化性能 耐腐蚀性能 |
| 英文关键词:multi-arc ion plating CrAlN film oxidation resistance corrosion resistance |
| 基金项目:湖北省教育厅科学技术项目(Q20181802) |
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| 中文摘要: |
| 目的 提高H13模具钢的表面性能，延长模具使用寿命。方法 采用多弧离子镀技术，以氮气作为反应气体，通过改变氮气流量的方法制备出不同原子含量的CrAlN薄膜，研究氮氩比对CrAlN薄膜表面形貌、组织结构、硬度、结合力、抗高温氧化性及耐腐蚀性的影响。结果 随着氮氩比增加，CrAlN薄膜表面大颗粒数量减少，大颗粒尺寸变小，薄膜表面逐渐均匀致密，孔隙率降低，表面粗糙度下降。CrN(200)衍射峰逐渐增强，六方相AlN(101)逐渐消失，硬度、结合力、抗高温氧化性及耐腐蚀性先升高、后降低。在氮氩比为8∶2时，CrAlN薄膜性能最优，硬度达到最大值，为2400HV，膜基结合力达到最大值，约29 N，抗高温氧化性能及耐腐蚀性能达到最佳。结论 通过多弧离子镀技术在H13模具钢表面制备CrAlN薄膜，可以提高其表面性能，延长使用寿命。当氮氩比为8∶2时，在H13模具钢表面制备出的CrAlN薄膜性能最佳。 |
| 英文摘要: |
| H13 steel is widely used in the die industry because of its excellent performance, but the poor working environment often makes the surface of H13 die steel fail. In this paper, CrAlN thin film is prepared on the surface of H13 die steel by multi-arc ion plating technology to improve the surface performance of H13 die steel and prolong the service life of the die. In the experiment, nitrogen was used as the reaction gas to prepare CrAlN films with different atomic contents by changing the nitrogen flow rate. The effects of nitrogen-argon ratio on the surface morphology, microstructure, hardness, adhesion, high temperature oxidation resistance and corrosion resistance of CrAlN films were studied. The results showed that with the increase of nitrogen argon ratio, the number of large particles on the surface of CrAlN film decreased, the diffraction peak of CrN(200) gradually increased, and the hexagonal AlN(101) gradually disappeared. The hardness, adhesion, high temperature oxidation resistance and corrosion resistance first increased and then decreased. When the ratio of nitrogen and argon was 8∶2, the CrAlN film had the best performance, the hardness reached the maximum value of 2400HV, the adhesion between film and substrate reached the maximum value of 29 N, and the high temperature oxidation resistance and corrosion resistance were the best. The experimental results show that the CrAlN film prepared on the surface of H13 die steel by multi-arc ion plating technology can improve the surface properties and prolong the service life. When the ratio of nitrogen to argon is 8∶2, the CrAlN film prepared on the surface of H13 die steel is the best. |
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