梁杨梦甜,范其香,王欣,王铁钢,刘艳梅,曹凤婷.CrAlN纳米梯度涂层的组织结构与性能研究[J].表面技术,2021,50(5):348-355.
LIANG Yang-meng-tian,FAN Qi-xiang,WANG Xin,WANG Tie-gang,LIU Yan-mei,CAO Feng-ting.Study on Microstructure and Properties of CrAlN Nano-Gradient Coatings[J].Surface Technology,2021,50(5):348-355 |
| CrAlN纳米梯度涂层的组织结构与性能研究 |
| Study on Microstructure and Properties of CrAlN Nano-Gradient Coatings |
| 投稿时间：2020-03-10 修订日期：2020-05-27 |
| DOI：10.16490/j.cnki.issn.1001-3660.2021.05.039 |
| 中文关键词: 磁控溅射 电弧离子镀 CrAlN涂层 组织结构 力学性能 抗高温氧化性能 |
| 英文关键词:magnetron sputtering arc ion plating CrAlN coating microstructure mechanical properties high temperature oxidation resistance |
| 基金项目:国家自然科学基金(51501130);天津市科技军民融合重大专项项目(18ZXJMTG00050);天津职业技术师范大学校级科研项目(KJ 1908);天津职业技术师范大学研究生创新基金(YC20-5);天津市科技特派员项目(20YDTPJC00900) |
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| Author | Institution |
| LIANG Yang-meng-tian | Tianjin Key Laboratory of High Speed Cutting and Precision Machining, Tianjin University of Technology and Education, Tianjin 300222, China |
| FAN Qi-xiang | Tianjin Key Laboratory of High Speed Cutting and Precision Machining, Tianjin University of Technology and Education, Tianjin 300222, China |
| WANG Xin | Tianjin Key Laboratory of High Speed Cutting and Precision Machining, Tianjin University of Technology and Education, Tianjin 300222, China |
| WANG Tie-gang | Tianjin Key Laboratory of High Speed Cutting and Precision Machining, Tianjin University of Technology and Education, Tianjin 300222, China |
| LIU Yan-mei | Tianjin Key Laboratory of High Speed Cutting and Precision Machining, Tianjin University of Technology and Education, Tianjin 300222, China |
| CAO Feng-ting | Tianjin Key Laboratory of High Speed Cutting and Precision Machining, Tianjin University of Technology and Education, Tianjin 300222, China |
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| 中文摘要: |
| 目的 研究Al靶功率对CrAlN纳米梯度涂层组织结构和力学性能的影响。方法 采用磁控溅射与电弧离子镀复合技术，通过保持Cr靶电流不变、Al靶功率线性增加(0.6~2.2、0.6~2.4、0.6~2.6 kW)的方法，制备了三种不同表面Al含量的CrAlN纳米梯度涂层。利用X射线衍射仪、扫描电子显微镜、透射电子显微镜、纳米压痕仪、划痕仪和高温马弗炉，表征CrAlN纳米梯度涂层的组织结构、成分、力学性能和抗高温氧化性能。结果 当Al靶线性末端功率小于2.4 kW时，涂层的主要相结构为fcc-(Cr,Al)N，择优取向为(111)晶面，而Al靶线性末端功率增大为2.6 kW时，涂层中出现hcp-AlN相。随着Al靶线性末端功率的增加，涂层的硬度和结合力先减小、后增大。Al靶线性末端功率为2.4 kW条件下制备的CrAlN涂层在800 ℃氧化1 h后，晶粒发生轻微粗化，表面发生微小的氧化，并出现了裂纹，但涂层主要相结构依然为fcc-(Cr,Al)N。结论 当Al靶线性末端功率为2.4 kW时，CrAlN纳米梯度涂层具有最高的硬度(31.3 GPa)和最好的膜基结合力(88 N)，表现出较好的抗高温氧化性能。 |
| 英文摘要: |
| The effects of Al target power on the microstructure and mechanical properties of CrAlN nanometer gradient coatings was studied. Three kinds of CrAlN nano-gradient coatings with different Al contents on the surface were prepared by using the magnetron sputtering and arc ion plating technique, keeping the Cr target current unchanged and increasing the Al target power linearly (0.6~2.2, 0.6~2.4, 0.6~2.6 kW). The microstructure, composition, mechanical properties and high temperature oxidation resistance of CrAlN nano-gradient coatings were characterized by X-ray diffractometer, electron microscope scanning, transmission electron microscope, nano-indentation instrument, scratch gauge and high temperature muff furnace. When the linear terminal power of Al target was less than 2.4 kW, the main phase structure of the coating was fcc-(Cr,Al)N, and the preferred orientation was (111) crystal plane; when the linear terminal power of Al target increased to 2.6 kW, the hcp-AlN phase appeared in the coating. With the increase of the linear terminal power of Al target, the hardness and adhesion strength of the coating decreased firstly and then increased. The CrAlN coating prepared under the condition of 2.4 kW linear terminal power of Al target was oxidized at 800 ℃ for 1 h. The grains became coarse slightly, and the surface was slightly oxidized and cracked, but the main phase structure of the coating was still fcc-(Cr,Al)N. When the linear terminal power of the Al target was 2.4 kW, the CrAlN nano-gradient coating had the highest hardness (31.3 GPa) and the best film-substrate cohesion(88 N), and behaved a good resistance to high temperature oxidation. |
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