廖孟德,许文举,吉利,刘晓红,孙初锋,李红轩.氧气流量对电弧离子镀制备氧化铬薄膜结构及摩擦学性能的影响[J].表面技术,2021,50(5):168-176.
LIAO Meng-de,XU Wen-ju,JI Li,LIU Xiao-hong,SUN Chu-feng,LI Hong-xuan.Effect of Oxygen Flow Rate on Structure and Tribological Properties of Chromium Oxide Films Prepared by Arc Ion Plating[J].Surface Technology,2021,50(5):168-176
氧气流量对电弧离子镀制备氧化铬薄膜结构及摩擦学性能的影响
Effect of Oxygen Flow Rate on Structure and Tribological Properties of Chromium Oxide Films Prepared by Arc Ion Plating
投稿时间:2020-08-24  修订日期:2020-12-21
DOI:10.16490/j.cnki.issn.1001-3660.2021.05.018
中文关键词:  氧气流量  多弧离子镀  氧化铬  宽温域  摩擦学性能
英文关键词:oxygen flow rate  arc ion plating  chromium oxide  wide temperature range  tribological properties
基金项目:国家自然科学基金(51975561);国家民委中青年英才计划项目(XBMU-2019-AB-32);兰州市城关区科技计划项目(2018KJGG0020)
作者单位
廖孟德 西北民族大学 化工学院,兰州 730030;中国科学院兰州化学物理研究所 中国科学院材料磨损与防护重点实验室,兰州 730000 
许文举 中国科学院兰州化学物理研究所 中国科学院材料磨损与防护重点实验室,兰州 730000 
吉利 中国科学院兰州化学物理研究所 中国科学院材料磨损与防护重点实验室,兰州 730000 
刘晓红 中国科学院兰州化学物理研究所 中国科学院材料磨损与防护重点实验室,兰州 730000 
孙初锋 西北民族大学 化工学院,兰州 730030 
李红轩 中国科学院兰州化学物理研究所 中国科学院材料磨损与防护重点实验室,兰州 730000 
AuthorInstitution
LIAO Meng-de School of Chemical Engineering, Northwest Minzu University, Lanzhou 730030, China;Key Laboratory of Science and Technology on Wear and Protection of Materials, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China 
XU Wen-ju Key Laboratory of Science and Technology on Wear and Protection of Materials, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China 
JI Li Key Laboratory of Science and Technology on Wear and Protection of Materials, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China 
LIU Xiao-hong Key Laboratory of Science and Technology on Wear and Protection of Materials, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China 
SUN Chu-feng School of Chemical Engineering, Northwest Minzu University, Lanzhou 730030, China 
LI Hong-xuan Key Laboratory of Science and Technology on Wear and Protection of Materials, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China 
摘要点击次数:
全文下载次数:
中文摘要:
      目的 研究氧气流量对多弧离子镀制备的氧化铬薄膜结构、力学性能以及摩擦学性能的影响。方法 采用多弧离子镀技术在不同氧气流量下(70、90、110、130、150 mL/min)在Inconel718高温合金表面制备了氧化铬薄膜。利用扫描电子显微镜、冷场发射扫描电镜分别分析薄膜的表面形貌与断面形貌。利用X射线衍射仪和Raman光谱仪对薄膜的物相组成及晶体结构进行分析;利用划痕仪、纳米压痕仪评价薄膜的力学性能。利用高温球盘摩擦磨损试验机测试薄膜的摩擦学性能,并利用光学显微镜及三维表面轮廓仪观察磨痕的形貌并测量摩擦后的磨损体积。结果 随着氧气流量的增加,薄膜的沉积速率先增大后减小,表面逐渐变得致密光滑,除110 mL/min氧气流量下的截面形貌是无序紧密堆积的纳米级晶体颗粒外,其他流量下制备的薄膜截面形貌均为柱状晶。薄膜的主要物相组成由Cr2O2.4逐渐转变为Cr2O3,且薄膜的晶化程度增加。薄膜与基底的粘结强度逐渐降低,薄膜的硬度和弹性模量先升高后降低。在110 mL/min氧气流量下沉积的氧化铬薄膜表现出较好的宽温域摩擦学性能,在室温下(25 ℃)的摩擦因数较高,约为0.49,高温下(400、600、800 ℃)的摩擦因数为0.27~0.30。其他氧气流量下制备的氧化铬薄膜的常温摩擦学性能均较差。结论 氧气流量对沉积的薄膜的表面形貌、断面形貌、物相组成以及力学性能有很大的影响。110 mL/min氧气流量下制备的氧化铬薄膜不仅具有较好的力学性能,而且表现出了较为优异的宽温域摩擦学性能。
英文摘要:
      In order to study the influence of oxygen flow rate on the structure, mechanical properties and tribological properties of chromium oxide films prepared by multi-arc ion plating. In this paper, a series of chromium oxide films are prepared on the surface of Inconel718 alloy by using arc ion plating technology under different oxygen flow rates (70 mL/min, 90 mL/min, 110 mL/min, 130 mL/min, 150 mL/min). Scanning electron microscope (SEM) and cold field emission scanning electron microscope (FESEM) are used to observe the surface morphology and cross-sectional morphology of the films. The phase composition and crystal structure of films are analyzed by X-ray diffraction (XRD) and Raman spectrum. The mechanical properties of the films are evaluated by scratch tester and nano-indentation. The tribological properties of the films are tested by high temperature ball disc friction and wear tester. The wear tracks of the films are observed by optical microscope, and the wear volume of the films is measured by 3D surface profilometer. With the increase of oxygen flow rate, the deposition rate of the films increases first and then decreases, and the surface of the films becomes smoother. Except that the cross-sectional morphology of the films prepared at 110 mL/min oxygen flow rate is the crystal disorderly and tightly packed, the cross-sectional morphology of the films at other oxygen flow rate are columnar crystal. As the oxygen flow rate increases, the phase composition of the films changes from Cr2O2.4 to Cr2O3, and the crystallinity of the films increases. With the increase of oxygen flow rate, the adhesion force between the films and the substrate gradually decreases, the hardness and elastic modulus of the films increase first and then decrease. The chromium oxide films deposited at 110 mL/min oxygen flow rate show excellent tribological properties in wide temperature range, the friction coefficient is about 0.49 at room temperature (25 ℃) and the friction coefficient is in the range of 0.27~0.30 at high temperature (400 ℃, 600 ℃, 800 ℃). Chromium oxide films deposited at other oxygen flow rates have a poor tribological properties at room temperature. The oxygen flow rate has a significant influence on the morphology of the surface and cross section, phase composition and mechanical properties of the chromium oxide films. The chromium oxide films deposited at 110 mL/min oxygen flow rate not only show superior mechanical properties, but also have excellent tribological properties in wide temperature range.
查看全文  查看/发表评论  下载PDF阅读器
关闭

关于我们 | 联系我们 | 投诉建议 | 隐私保护 | 用户协议

您是第19509298位访问者    渝ICP备15012534号-3

版权所有:《表面技术》编辑部 2014 surface-techj.com, All Rights Reserved

邮编:400039 电话:023-68792193传真:023-68792396 Email: bmjs@surface-techj.com

渝公网安备 50010702501715号