陈芝向,袁巨龙,邵琦,杭伟,吕冰海,赵萍.基于层叠式夹持的夹具失效形式分析[J].表面技术,2021,50(4):369-375.
CHEN Zhi-xiang,YUAN Ju-long,SHAO Qi,HANG Wei,LYU Bing-hai,ZHAO Ping.Analysis of Fixture Failure Form Based on Layer Stacked Clamping[J].Surface Technology,2021,50(4):369-375 |
| 基于层叠式夹持的夹具失效形式分析 |
| Analysis of Fixture Failure Form Based on Layer Stacked Clamping |
| 投稿时间：2020-06-22 修订日期：2020-07-02 |
| DOI：10.16490/j.cnki.issn.1001-3660.2021.04.039 |
| 中文关键词: 层叠式 超薄蓝宝石 限位片 双平面加工 受力分析 |
| 英文关键词:layer stacked ultra-thin sapphire wafer limiter double-sides processing force analysis |
| 基金项目:浙江省公益技术研究项目(LGG19E050021);国家自然科学基金项目(51575492，51775508) |
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| Author | Institution |
| CHEN Zhi-xiang | Ultra-precision Machining Center, Zhejiang University of Technology, Hangzhou 310023, China |
| YUAN Ju-long | Ultra-precision Machining Center, Zhejiang University of Technology, Hangzhou 310023, China |
| SHAO Qi | Ultra-precision Machining Center, Zhejiang University of Technology, Hangzhou 310023, China |
| HANG Wei | Ultra-precision Machining Center, Zhejiang University of Technology, Hangzhou 310023, China |
| LYU Bing-hai | Ultra-precision Machining Center, Zhejiang University of Technology, Hangzhou 310023, China |
| ZHAO Ping | Ultra-precision Machining Center, Zhejiang University of Technology, Hangzhou 310023, China |
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| 中文摘要: |
| 目的 为了解决超薄蓝宝石晶片的双平面加工问题，确定层叠式夹具基盘及限位片的材料，并对限位片的失效形式进行分析。方法 通过分析层叠式夹具中工件在双平面加工中的受力状态及传统双平面加工工件受力状态，确定限位片的受力状态。测量蓝宝石与基盘间的摩擦力对基盘材料进行选择，通过受力分析结合摩擦因数计算限位片的剪切强度，对限位片的材料进行初步选择。在平面抛光机上进行加压试验，对限位片的失效形式进行分析。结果 层叠式夹具在双平面加工中受到工件施加的力小于传统双平面加工行星轮受到的力。在3种基盘材料中，不锈钢材料与蓝宝石晶片间的摩擦力较大，铸铁次之，铝合金最小。液滴在2个表面间形成的液膜对不锈钢和铸铁的摩擦因数有一定的增益效果。基盘选择不锈钢材料，限位片选择玻璃纤维板材料的情况下，限位片所承受的加工压力随着夹持厚度的增加而呈现非线性增加。限位片的主要失效形式表现为限位区域被蓝宝石晶片的边缘切割，受基盘及蓝宝石平面度的影响。结论 层叠式夹具对材料强度的要求更低，更加适用于超薄平面零件的双平面加工。限位片失效受基盘高度差的影响，为保证限位片的夹持效果，应尽量降低基盘表面的高度差。 |
| 英文摘要: |
| The purpose is to solve the problem of double-sides processing of ultra-thin sapphire wafers, determine the baseplate materials and the limiter materials of the layer stacked fixture and analyze the failure form of the limiter. By analyzing the stress of workpiece in double-sides machining which used layer stacked fixture and the stress of the workpiece in traditional double-sides machining, we can determine the force of limiter. By measuring the friction between sapphire and the baseplate to choose the material of baseplate, calculate the shear strength of limiter by force analysis and friction coefficient, and preliminarily select the material of limiter. The pressure experiment is carried out on the plane polishing machine to analyze the failure mode of the limiter. The result shows that the force exerted by the stacked fixture on the workpiece in double-sides machining is less than the force received by the planetary gear clamping. Among the three substrate materials, the friction between stainless steel and sapphire wafer is greater, followed by iron, and aluminum alloy is the smallest. The liquid film formed by droplet between the two surfaces has a certain gain effect on the friction coefficient of stainless steel and iron. When the stainless steel material is selected as baseplate, and the glass fiber board material is limiter, processing pressure on the limiter shows a nonlinear increase with the increase of clamping thickness. The main failure mode of limiter is that the limit area is cut by the edge of sapphire wafer, which is affected by the flatness of baseplate and sapphire. Through experimental analysis, it is proved that layer stacked fixtures have lower material strength requirements and more suitable for double-sides machining of ultra-thin plane parts. In order to ensure the clamping strength of the limiter, a better flatness of the baseplate should be selected as much as possible. |
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