徐亚萌,周海,张杰群,李永康,沈军州.纳米尺度单晶氧化镓摩擦磨损性能试验研究[J].表面技术,2021,50(4):244-252, 284.
XU Ya-meng,ZHOU Hai,ZHANG Jie-qun,LI Yong-kang,SHEN Jun-zhou.Experimental Study on Friction and Wear Properties of Nanoscale Single Crystal Gallium Oxide[J].Surface Technology,2021,50(4):244-252, 284 |
| 纳米尺度单晶氧化镓摩擦磨损性能试验研究 |
| Experimental Study on Friction and Wear Properties of Nanoscale Single Crystal Gallium Oxide |
| 投稿时间：2020-03-22 修订日期：2020-05-26 |
| DOI：10.16490/j.cnki.issn.1001-3660.2021.04.024 |
| 中文关键词: 纳米划痕 摩擦磨损 单晶氧化镓 摩擦速度 垂直载荷 摩擦次数 |
| 英文关键词:nano scratch friction and wear single crystal gallium oxide friction velocity vertical load friction number of times |
| 基金项目:国家自然科学基金面上项目(51675457);江苏省研究生实践创新项目(SJCX20_1351) |
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| Author | Institution |
| XU Ya-meng | School of Mechanical Engineering, Yancheng Institute of Technology, Yancheng 224051, China |
| ZHOU Hai | School of Mechanical Engineering, Yancheng Institute of Technology, Yancheng 224051, China |
| ZHANG Jie-qun | School of Mechanical Engineering, Yancheng Institute of Technology, Yancheng 224051, China |
| LI Yong-kang | School of Mechanical Engineering, Yancheng Institute of Technology, Yancheng 224051, China |
| SHEN Jun-zhou | School of Mechanical Engineering, Yancheng Institute of Technology, Yancheng 224051, China |
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| 中文摘要: |
| 目的 分析单晶氧化镓在纳米尺度下的摩擦磨损性能，为金刚石磨料对氧化镓晶体的精密研磨加工提供理论依据。方法 在G200纳米压痕仪上，使用Cube Corner金刚石压头，对单晶氧化镓的(010)和(100)晶面进行了摩擦磨损试验，利用原子力显微镜观测试验后的形貌并测量尺寸。结果 在金刚石以不同速度摩擦单晶氧化镓时，(010)和(100)晶面的划痕宽度与摩擦速度的拟合直线的斜率分别4.057 69和7.634 62，深度与摩擦速度拟合直线的斜率分别为0.820 73和0.798 62。以不同载荷摩擦氧化镓时，(010)和(100)晶面的划痕宽度与载荷的拟合直线的斜率分别为47.625和46.750，深度与载荷拟合直线的斜率分别为23.764和31.9546。在多次重复摩擦磨损试验中，摩擦次数从1次增加到10次，划痕的深度从571.22 nm增加到2964.81 nm，划痕宽度从889.34 nm增加到7360 nm。结论 在干摩擦状态下，金刚石压头的摩擦速度对氧化镓的摩擦系数、磨损影响不大。在低载荷下，氧化镓的磨损以塑性变形引起的材料去除为主，在载荷增大到一定值时，磨损转变为脆性材料去除的形式，出现裂纹、剥落和碎屑等，磨损增大。氧化镓(100)晶面由于硬度低、易解理，比(010)晶面更容易磨损。 |
| 英文摘要: |
| The micro friction and wear performance of single crystal gallium oxide at the nanometer scale is analyzed to provide a theoretical basis for the precision grinding of gallium oxide crystals by diamond abrasives. On the G200 Nano Indenter, using the Cube Corner diamond indenter, at the nanometer scale, the friction and wear tests of the (010) and (100) crystal planes of single-crystal gallium oxide are performed, and the morphology after the test is observed using an atomic force microscope and then the size is measured. When the diamond is rubbed against single-crystal gallium oxide at different speeds, the slopes of the straight-line fitting between scratch widths and depths of the (010) and (100) crystal planes and the friction speed are 4.057 69 and 7.634 62, 0.820 73 and 0.798 62, respectively. When rubbing gallium oxide with different loads, the slopes of straight-line fitting between scratch widths and depths of the (010) and (100) crystal planes and the load are 47.625 and 46.750, 23.764 and 31.9546, respectively. The depth of scratches increase from 571.22 nm to 2964.81 nm as the friction number of times increase from 889.34 nm to 7360 nm in repeated friction wear tests. In the dry friction state, the friction velocity of the diamond indenter has little effect on the friction coefficient and wear of gallium oxide. When the load is small, the gallium oxide wear is removed by plastic deformation. When the load increases to a certain value, the wear changes to brittle material removal, and cracks, flaking, and debris appear, which increases the wear. Gallium oxide (100) crystal plane is easier to wear than (010) crystal plane because of its low hardness and easy cleavage. |
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