吴雁,王冰,肖礼军,王犁,张而耕,陈强,黄彪.Ti-Al-Si-N多层梯度涂层的微观结构及力学性能研究[J].表面技术,2021,50(2):232-237.
WU Yan,WANG Bing,XIAO Li-jun,WANG Li,ZHANG Er-geng,CHEN Qiang,HUANG Biao.Research on Microstructure and Mechanical Properties of Ti-Al-Si-N Multilayer Gradient Coating[J].Surface Technology,2021,50(2):232-237 |
| Ti-Al-Si-N多层梯度涂层的微观结构及力学性能研究 |
| Research on Microstructure and Mechanical Properties of Ti-Al-Si-N Multilayer Gradient Coating |
| 投稿时间：2020-02-28 修订日期：2020-12-28 |
| DOI：10.16490/j.cnki.issn.1001-3660.2021.02.023 |
| 中文关键词: TiAlSiN 多层梯度涂层 微观结构 力学性能 强化机制 |
| 英文关键词:TiAlSiN multilayer gradient coating microstructure mechanical properties strengthening mechanism |
| 基金项目:上海市重点支撑计划(170905038000);上海市联盟计划(LM201920) |
|
|
| Author | Institution |
| WU Yan | Shanghai Engineering Research Center of Physical Vapor Deposition PVD Superhard Coating and Equipment, Shanghai Institute of Technology, Shanghai 201418, China |
| WANG Bing | Shanghai Engineering Research Center of Physical Vapor Deposition PVD Superhard Coating and Equipment, Shanghai Institute of Technology, Shanghai 201418, China |
| XIAO Li-jun | Shanghai Engineering Research Center of Physical Vapor Deposition PVD Superhard Coating and Equipment, Shanghai Institute of Technology, Shanghai 201418, China |
| WANG Li | Shanghai Engineering Research Center of Physical Vapor Deposition PVD Superhard Coating and Equipment, Shanghai Institute of Technology, Shanghai 201418, China |
| ZHANG Er-geng | Shanghai Engineering Research Center of Physical Vapor Deposition PVD Superhard Coating and Equipment, Shanghai Institute of Technology, Shanghai 201418, China |
| CHEN Qiang | Shanghai Engineering Research Center of Physical Vapor Deposition PVD Superhard Coating and Equipment, Shanghai Institute of Technology, Shanghai 201418, China |
| HUANG Biao | Shanghai Engineering Research Center of Physical Vapor Deposition PVD Superhard Coating and Equipment, Shanghai Institute of Technology, Shanghai 201418, China |
|
| 摘要点击次数: |
| 全文下载次数: |
| 中文摘要: |
| 目的 分析Ti-Al-Si-N多层梯度涂层微观结构特征和力学性能，得到涂层强化机制。方法 采用阴极电弧离子镀镀膜工艺，使用4个靶材交替沉积的方式，分别在高速钢和Si基底上制备Ti-Al-Si-N多层梯度涂层。采用X射线衍射仪(XRD)、高分辨透射电镜(HRTEM)和纳米压痕仪对Ti-Al-Si-N多层梯度涂层晶相组织、微观结构和力学性能进行了表征。结果 Ti-Al-Si-N多层梯度涂层中主要相为(Ti,Al)N晶相，择优取向(200)。Ti-Al-Si-N多层梯度涂层由TiN、TiAlN、TiAlSiN三种层区组成，层区厚度分别为41.7、1458.3、1450 nm。通过HRTEM实验观察TiN、TiAlN层区结构发现，在TiAlN层区内部形成了TiAlN/TiN周期变化的结构，证实为TiAlN/TiN纳米多层涂层微结构特征，其中TiN调制层为1 nm左右，TiAlN调制层约为0.5 nm，调制周期约为1.5 nm。此外，发现TiAlN层区存在nc-TiAlN/α-Si3N4结构，TiAlN晶粒大约为6 nm左右，非晶层Si3N4大约为2~3 nm。制备的Ti-Al-Si-N多层梯度涂层硬度为27.7 GPa，弹性模量为338.0 GPa。结论 构建了Ti-Al-Si-N多层梯度涂层示意图，对于涂层的强化机制，可以用模量差理论、交变应力场理论及nc-TiN/α-Si3N4模型进行说明，其主要强化机制为nc-TiN/α-Si3N4模型理论。 |
| 英文摘要: |
| The microstructure characteristics of Ti-Al-Si-N multilayer gradient coating were obtained, the mechanical properties of the coating were analyzed, and the strengthening mechanism of the coating was obtained. Ti-Al-Si-N multilayer gradient coatings were prepared on high speed steel and Si substrates by cathodic arc ion plating with four targets alternately deposited. The crystal structure, microstructure and mechanical properties of the Ti-Al-Si-N multilayer gradient coating were characterized by X-ray diffractometer (XRD), high resolution transmission electron microscope (HRTEM), and nanoindentation instrument. The main phase in Ti-Al-Si-N multilayer gradient coating is (Ti,Al)N crystal phase with preferred orientation of (200). Ti-Al-Si-N multilayer gradient coating consists of TiN, TiAlN and TiAlSiN layers with thickness of 41.7, 1458.3 and 1450 nm, respectively. The structure of TiN and TiAlN layers was observed by HRTEM. It is found that TiAlN/TiN periodic structure is formed in TiAlN layer, and confirmed as the microstructure of TiAlN/TiN nano multilayer coating. The TiN modulation layer is about 1 nm, TiAlN modulation layer is about 0.5 nm, and the modulation period is about 1.5 nm. In addition, it is found that there is nc-TiAlN/α-Si3N4 structure in the TiAlN layer. The grain size of TiAlN is about 6 nm, and that of amorphous Si3N4 is about 2~3 nm. The hardness and elastic modulus of Ti-Al-Si-N multilayer gradient coating are 27.7 GPa and 338.0 GPa respectively. The schematic diagram of Ti-Al-Si-N multilayer gradient coating is constructed. The strengthening mechanism of the coating can be explained by modulus difference theory, alternating stress field theory and nc-TiN/α-Si3N4 model. The main strengthening mechanism is nc-TiN/α-Si3N4 model theory. |
| 查看全文 查看/发表评论 下载PDF阅读器 |
| 关闭 |
|
|
|
渝公网安备 50010702501715号