李忠建,肖金涛,鞠鹏飞,臧旭升,徐州,刁磊.铝合金不同氧化处理工艺对其表面溅射MoS2膜层耐磨性的影响[J].表面技术,2020,49(12):23-29.
LI Zhong-jian,XIAO Jin-tao,JU Peng-fei,ZANG Xu-sheng,XU Zhou,DIAO Lei.Effect of Different Aluminum Oxidation Treatments on Abrasion Resistance of MoS2 Film Prepared by Magnetron Sputtering[J].Surface Technology,2020,49(12):23-29 |
| 铝合金不同氧化处理工艺对其表面溅射MoS2膜层耐磨性的影响 |
| Effect of Different Aluminum Oxidation Treatments on Abrasion Resistance of MoS2 Film Prepared by Magnetron Sputtering |
| 投稿时间：2020-11-04 修订日期：2020-12-08 |
| DOI：10.16490/j.cnki.issn.1001-3660.2020.12.004 |
| 中文关键词: 铝合金 阳极氧化 微弧氧化 硬质氧化 磁控溅射 二硫化钼薄膜 固体润滑 |
| 英文关键词:aluminum alloy anodic oxidation micro arc oxidation hard oxidation magnetron sputtering molybdenum disulfide film solid lubrication |
| 基金项目:国家自然科学基金(51771122);上海市优秀技术带头人计划(20XD1431400);上海市浦江人才计划(19PJ1431500) |
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| Author | Institution |
| LI Zhong-jian | Shanghai Aerospace Equipments Manufacture Co., Ltd, Shanghai 200245, China |
| XIAO Jin-tao | Shanghai Aerospace Equipments Manufacture Co., Ltd, Shanghai 200245, China |
| JU Peng-fei | Shanghai Aerospace Equipments Manufacture Co., Ltd, Shanghai 200245, China |
| ZANG Xu-sheng | Shanghai Aerospace Equipments Manufacture Co., Ltd, Shanghai 200245, China |
| XU Zhou | Shanghai Aerospace Equipments Manufacture Co., Ltd, Shanghai 200245, China |
| DIAO Lei | Shanghai Aerospace Equipments Manufacture Co., Ltd, Shanghai 200245, China |
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| 中文摘要: |
| 目的 探究铝合金表面不同氧化处理工艺对磁控溅射制备MoS2固体润滑膜层性能的影响。方法 在溅射MoS2膜层前，对铝合金基底分别采用硫酸阳极氧化、微弧氧化、硬质氧化三种不同的氧化工艺进行预先表面处理，然后在其表面溅射沉积一层MoS2润滑薄膜。通过摩擦磨损试验对其耐磨性能进行评价，并通过SEM、XRD、EDS对薄膜表面形貌、结构及磨痕形貌、成分进行分析。结果 铝合金采用不同的氧化方式处理对表面MoS2膜层的结构不会产生影响。硫酸阳极氧化处理+磁控溅射双重表面处理技术制备的MoS2膜层表观最为致密均匀，粗糙度较低，呈花菜状。截面SEM照片显示，溅射膜层与基体之间结合紧密，溅射膜层厚度为2 μm。在10、20、30 N高载荷下，试样摩擦系数均小于0.1，磨损寿命分别高于45万转、30万转和9万转，均高于其他试样，且不同膜层试样均具有较好的耐环境湿热性能。在摩擦过程中，试样承受的载荷基本转移到氧化膜上，阳极氧化后镀膜试样表面粗糙度较小，在滑动运动过程中，所受切向应力较小，不会产生较严重的粘着磨损，从而使磨损损耗速度较慢，因此耐磨寿命较长。结论 铝合金阳极氧化预处理对提高铝合金表面溅射MoS2膜层耐磨性能的效果最佳。 |
| 英文摘要: |
| To explore the effect of different oxidation treatments on the wear resistance of MoS2 solid lubrication film prepared by magnetron sputtering. Before sputtering the MoS2 film, the aluminum alloy was pre-treated by anodic oxidation, micro arc oxidation and hard oxidation, and then a layer of MoS2 lubrication film was deposited on the surface by sputtering. The wear resistance of the film was evaluated by friction and wear test, and analyze the surface morphology, structure and wear scar morphology and composition of the film by SEM, XRD, EDS. The XRD pattern shows that aluminum alloys treated with different oxidation methods will not affect the structure of the MoS2 film. The surface of MoS2 film on aluminum alloy was prepared by sulfuric acid anodizing and magnetron sputtering is the most compact, uniform, low roughness, cauliflower like. The cross-section SEM photos show that the sputtering film and the substrate are closely combined, The thickness of the sputtered film is 2 μm, The friction coefficient of the samples is less than 0.1 and the wear life was more than 450 000 r, 300 000 r and 90 000 r respectively under high loads of 10, 20, 30 N, which were all higher than other samples. All film samples have excellent environmental resistance to humidity and heat. In the process of friction, the load borne by the sample is basically transferred to the oxide film. After anodizing, the surface roughness of the coated sample is small, which will not produce large adhesive wear as the tangential stress is small, so the wear loss speed is slow and the wear life is long. Therefore, the anodic oxidation pretreatment of aluminum alloy has the best effect on improving the friction resistance of sputtering MoS2 film. |
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