刘兴光,张凯锋,周晖.基于FIB/SEM双束系统的原位、实时观测三点弯曲薄膜测试方法[J].表面技术,2020,49(11):351-357.
LIU Xing-guang,ZHANG Kai-feng,ZHOU Hui.In-situ Three-point Bending Test Method with Real-time Observation Based on FIB-SEM System[J].Surface Technology,2020,49(11):351-357 |
| 基于FIB/SEM双束系统的原位、实时观测三点弯曲薄膜测试方法 |
| In-situ Three-point Bending Test Method with Real-time Observation Based on FIB-SEM System |
| 投稿时间：2019-11-08 修订日期：2020-02-29 |
| DOI：10.16490/j.cnki.issn.1001-3660.2020.11.041 |
| 中文关键词: 原位 三点弯曲 FIB/SEM双束系统 CrN薄膜 Cr/CrN多层薄膜 极限形变 |
| 英文关键词:in-situ three-point bending SEM/FIB dual-beam system CrN films Cr/CrN multilayer films critical strain |
| 基金项目:军委装发部装备预研领域基金(重点)(61409230603，61409220205)和重点实验室基金(HTKJ2018KL510003) |
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| 中文摘要: |
| 目的 需要直接测量薄膜的极限形变这一关键参数，来评价某种薄膜在一定服役载荷下的某种基体表面是否能胜任。方法 借助聚焦离子束显微镜/扫描电子显微镜(FIB/SEM)双束显微分析测试系统，提出了一种在微米尺度下、原位进行三点弯曲薄膜测试的方法，同时可以进行实时观测与分析记录。之后，使用磁控溅射技术制备了具有强择优晶体生长取向的CrN薄膜和Cr/CrN多层薄膜，并使用上述三点弯曲测试方法对这两种薄膜进行了弯曲测试。结果 CrN薄膜的极限形变量为(1.8±0.1)%，且其在原位三点弯曲试验中断裂前的变形类型为纯弹性形变，而不是塑性形变或者弹性/塑性混合形变。而Cr/CrN多层薄膜的极限形变达到了9.1%，是纯CrN薄膜的5倍，且对“预裂纹”等缺陷不敏感。结论 将此测试方法与在微米尺度使用FIB测量薄膜残余应力的方法相结合，将可以有效地评估多种薄膜的形变能力及形变特性。所获得的薄膜相关性能数据，对于针对不同基体、不同使用工况(如不同的表面受力状态、变形状态等)的薄膜体系或结构的选择与设计，具有很好的指导意义。 |
| 英文摘要: |
| The work aims to evaluate whether the film is competent on a specific substrate surface under a known load by directly measuring the critical strain of thin films. The in-situ three-point bending test method under the micron scale was proposed by scanning electron microscope (SEM)/focused ion beam (FIB) analysis and test system. At the same time, the real-time observation, analysis and record were carried out. Then, magnetron sputtered technology was used to prepare highly preferentially oriented CrN film, and Cr/CrN multilayer film and the above in-situ three-point bending test method was utilized to conduct bending test on the two films The measured results showed that, the critical strain of the thin CrN film was (1.8±0.1)%, with its deformation type before failure being elastic rather than plastic or mixed. Remarkably, the critical strain of multilayer Cr/CrN film reached as high as 9.1%, 5 times that of CrN film. Moreover, the Cr/CrN multilayer film was insensitive to preliminary cracks. By combing the residual stress measurements at the micron scale using FIB, the in-situ test method can be used to evaluate the deformation capability of various thin films and to provide a guidance for the design of tribological films for specific applications. The obtained performance data of thin films have a good guiding significance for the selection and design of thin film systems or structures for different substrates and different working conditions (such as different surface stress states and deformation states, etc.). |
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