裴露露,吉利,李红轩,刘晓红,周惠娣,陈建敏.类富勒烯结构对含氢碳膜摩擦学性能的影响[J].表面技术,2020,49(6):68-75.
PEI Lu-lu,JI Li,LI Hong-xuan,LIU Xiao-hong,ZHOU Hui-di,CHEN Jian-min.Effect of Fullerene-like Structure on Tribological Properties of Hydrogenated Carbon Films[J].Surface Technology,2020,49(6):68-75 |
| 类富勒烯结构对含氢碳膜摩擦学性能的影响 |
| Effect of Fullerene-like Structure on Tribological Properties of Hydrogenated Carbon Films |
| 投稿时间：2020-05-04 修订日期：2020-06-20 |
| DOI：10.16490/j.cnki.issn.1001-3660.2020.06.008 |
| 中文关键词: 类富勒烯结构 含氢碳膜 反应磁控溅射 摩擦学性能 类球状纳米结构 |
| 英文关键词:fullerene-like structure hydrogenated carbon films reactive magnetron sputtering tribological properties spherical-like nanostructured particles |
| 基金项目:国家自然科学基金（51775537，U1637204）；中国科学院青年创新促进会（2016368） |
|
|
| Author | Institution |
| PEI Lu-lu | 1.Key Laboratory of Science and Technology on Wear and Protection of Materials, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China; 2.Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China |
| JI Li | 1.Key Laboratory of Science and Technology on Wear and Protection of Materials, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China |
| LI Hong-xuan | 1.Key Laboratory of Science and Technology on Wear and Protection of Materials, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China |
| LIU Xiao-hong | 1.Key Laboratory of Science and Technology on Wear and Protection of Materials, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China |
| ZHOU Hui-di | 1.Key Laboratory of Science and Technology on Wear and Protection of Materials, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China |
| CHEN Jian-min | 1.Key Laboratory of Science and Technology on Wear and Protection of Materials, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China |
|
| 摘要点击次数: |
| 全文下载次数: |
| 中文摘要: |
| 目的 研究类富勒烯结构含氢碳膜的摩擦学性能及润滑机理。方法 采用闭合场非平衡反应磁控溅射技术，通过调节靶电流制备出类富勒烯结构含氢碳膜（FL-C:H）与非晶含氢碳膜（a-C:H）。通过扫描电子显微镜、原子力显微镜观察薄膜表面与断面的形貌，通过傅里叶红外光谱仪表征了碳膜的碳氢键结构，通过纳米压痕仪、划痕仪、摩擦磨损实验评价薄膜的力学及摩擦学性能，通过透射电子显微镜分析磨屑结构，并通过光学显微镜及三维轮廓仪对磨斑及磨痕形貌进行分析。结果 类富勒烯结构对薄膜的机械力学性能影响不大，但是对其大载荷下的摩擦学性能有影响。与a-C:H碳膜相比，小载荷下（5 N），FL-C:H碳膜的摩擦系数较高，大载荷下（20 N），FL-C:H碳膜具有较低的摩擦系数（0.03）和磨损率（4.8×10-8 mm3/(m•N)），并且其摩擦界面形成了类球状纳米结构颗粒。随着载荷的增加，FL-C:H碳膜的摩擦系数和磨损率先降低，后基本不变，在载荷大于15 N时，摩擦界面形成了类球状纳米结构颗粒。结论 类球状纳米结构颗粒的形成能降低薄膜的摩擦系数和磨损率，而FL-C:H碳膜比a-C:H碳膜更易在摩擦界面形成类球状纳米结构颗粒。这种类球状纳米结构的形成还依赖于载荷的大小（大载荷时更易形成），因此类富勒烯碳膜在大载荷下更易保持低的摩擦系数及磨损率。 |
| 英文摘要: |
| The work aims to study the tribological properties and lubrication mechanism of fullerene-like structured carbon films. Fullerene-like structured carbon films (FL-C:H) and amorphous hydrogenated carbon films (a-C:H) were prepared by regulating current with closed field unbalanced reactive magnetron sputtering technique. Scanning electron microscope (SEM) and atomic force microscope (AFM) were used to observe the morphology of the surface and cross section of the film. The structure of C─H bond was analyzed by Fourier transformation infrared spectra (FT-IR). The mechanical and tribological properties of the film were evaluated by nano-indentation, scratch tester and friction and wear test. The structure of wear debris was analyzed by high resolution transmission electron microscope (HRTEM), and the morphologies of wear scar were analyzed by optical microscope and 3D non-contact surface profilometer. The fullerene-like structure did not have obvious effect on the mechanical properties of the carbon films, but it had a significant effect on tribological properties of the carbon films under the higher load. Under lower load (5 N), the friction coefficient of FL-C:H film was higher than that of a-C:H film. While under higher load (20 N), FL-C:H film had a relatively lower friction coefficient (0.03) and wear rate (4.8×10-8 mm3/(m•N)) and spherical-like nanostructured particles were formed at the friction interface. The friction coefficient and wear rate of FL-C:H film decreased with the increase of load, and then tended to be stable. The spherical-like nanostructured particles were formed at the friction interface when the load was higher than 15 N. The formation of the spherical-like nanostructured particles reduces the friction coefficient and wear rate of the carbon films, while the FL-C:H film is easier to form the special structure at the friction interface than the a-C:H film. The formation of the spherical-like nanostructured particles also depends on the load, which is easier under higher load, so the fullerene-like carbon film is easier to maintain lower friction coefficient and wear rate under higher load. |
| 查看全文 查看/发表评论 下载PDF阅读器 |
| 关闭 |
|
|
|
渝公网安备 50010702501715号