邓家云,潘继生,阎秋生.单晶SiC化学机械抛光基础研究——电芬顿反应条件优化及6H-SiC氧化效果分析[J].表面技术,2020,49(4):64-73.
DENG Jia-yun,PAN Ji-sheng,YAN Qiu-sheng.Basic Research on Chemical Mechanical Polishing of Single Crystal SiC—Optimization of Electro-Fenton Reaction Conditions and Analysis of 6H-SiC Oxidation Effect[J].Surface Technology,2020,49(4):64-73 |
| 单晶SiC化学机械抛光基础研究——电芬顿反应条件优化及6H-SiC氧化效果分析 |
| Basic Research on Chemical Mechanical Polishing of Single Crystal SiC—Optimization of Electro-Fenton Reaction Conditions and Analysis of 6H-SiC Oxidation Effect |
| 投稿时间：2020-03-05 修订日期：2020-04-20 |
| DOI：10.16490/j.cnki.issn.1001-3660.2020.04.008 |
| 中文关键词: 电芬顿 6H-SiC 化学机械抛光 正交试验 羟基自由基 氧化反应 |
| 英文关键词:Electro-Fenton 6H-SiC chemical mechanical polishing orthogonal experimental hydroxyl radical oxidation reaction |
| 基金项目:NSFC-广东联合基金（U1801259）；广州市科技计划项目资助（201904010300）；广东省自然科学基金（No.2019A1515011243） |
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| 中文摘要: |
| 目的 揭示电芬顿参数对生成羟基自由基（•OH）最大浓度和•OH总量的影响规律，实现电芬顿反应对单晶6H-SiC氧化腐蚀的最大化。方法 通过6因素5水平正交试验，分析电压大小、电极种类、氧化剂过氧化氢（H2O2）浓度、催化剂种类、催化剂浓度以及反应液pH等参数对电芬顿反应生成•OH最大浓度和•OH总量的影响规律，找出最佳试验组合和主要影响因素，并利用最佳试验组合与同等条件下的芬顿反应对单晶6H-SiC进行氧化腐蚀对比分析。结果 影响电芬顿反应生成•OH最大浓度和•OH总量的主次顺序为：催化剂种类>电压大小>H2O2浓度>催化剂浓度>pH>电极种类。其中，催化剂种类、电压、氧化剂浓度影响显著，影响因子分别为45%、22%、12%和30%、19%、41%。与同等条件下的芬顿反应相比，电芬顿反应生成的•OH最大浓度、•OH总量分别提高了61.34%和68.62%，在6H-SiC表面能形成更多SiO2氧化层。结论 电芬顿反应通过控制电参数，能够加速Fe3+向Fe2+转化并原位生成部分H2O2，补充反应过程中H2O2的消耗，提高•OH生成总量，加速•OH对单晶SiC基片的氧化腐蚀作用。 |
| 英文摘要: |
| The work aims to reveal the effects of the maximum concentration of hydroxyl radicals (•OH) and the total concentration of •OH generated by the Electro-Fenton parameters, so as to maximize the Electro-Fenton reaction on single crystal 6H-SiC oxidation corrosion. The influence rules of the voltage, electrode types, oxidant concentration of hydrogen peroxide (H2O2), catalyst types, catalyst concentration, and reaction solution pH and other parameters were optimized through the six-factor five-level orthogonal experiment to generate maximum concentration of •OH and total concentration of •OH and find the best experimental combination and main influencing factors were found. Then, the optimal experimental combination and Fenton reaction under the same conditions were used to compare and analyze on the single crystal 6H-SiC oxidation corrosion. The order of factors influencing the maximum concentration of •OH and the total concentration of •OH generated by the Electro-Fenton reaction was catalyst type > voltage > H2O2 concentration > catalyst concentration > pH> electrode type; of which, catalyst type, voltage, and oxidant concentration had significant effects, with impact factors of 45%, 22%, 12% and 30%, 19%, 41%, respectively. Compared with the Fenton reaction under the same conditions, the maximum concentration of •OH and the total concentration of •OH produced by the Electro-Fenton reaction increased by 61.34% and 68.62%, respectively, and more SiO2 oxide layers could be formed on the 6H-SiC surface. The Electro-Fenton reaction can accelerate the conversion of Fe3+ to Fe2+ and generate a portion of H2O2 in situ by controlling the electrical parameters, supplement the consumption of H2O2 during the reaction, increase the total concentration of •OH produced, and accelerate the oxidative and corrosive effect of •OH on the single crystal SiC substrate. |
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