刘梅军,李广荣,杨冠军,李长久.等离子-物理气相沉积（PS-PVD）及其射流非接触检测方法[J].表面技术,2020,49(1):1-16.
LIU Mei-jun,LI Guang-rong,YANG Guan-jun,LI Chang-jiu.Plasma Spray-physical Vapor Deposition (PS-PVD) and Non-contact Detection Method of Plasma Jet[J].Surface Technology,2020,49(1):1-16 |
| 等离子-物理气相沉积（PS-PVD）及其射流非接触检测方法 |
| Plasma Spray-physical Vapor Deposition (PS-PVD) and Non-contact Detection Method of Plasma Jet |
| 投稿时间：2019-07-04 修订日期：2020-01-20 |
| DOI：10.16490/j.cnki.issn.1001-3660.2020.01.001 |
| 中文关键词: 等离子-物理气相沉积 沉积系统 非接触检测系统 光学发射光谱 输运机理 热防护涂层 |
| 英文关键词:PS-PVD deposition system non-contact measurement system OES transport mechanism thermal protective coatings |
| 基金项目:国家重点研发计划（2017YFB0306103）；中央高校基本科研业务费专项资金；国家“万人计划”首批“青年拔尖人才支持计划”专项基金 |
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| 中文摘要: |
| 等离子-物理气相沉积（PS-PVD）是制备高温防护涂层和功能涂层的一种新方法，既可涵盖等离子喷涂和电子束物理气相沉积工艺，还可实现涂层宏观/介观/微观等跨尺度结构的定制化设计与制备，在热障涂层（TBCs）、环境障涂层（EBCs）、环境热障涂层（TEBCs）、透氧薄膜、燃料电池和太阳电池电极薄膜等领域具有广泛应用前景，尤其在航空发动机和燃气轮机防护涂层领域被视为高性能TBCs/EBCs制备技术发展的新方向。比较分析了PS-PVD等离子射流膨胀流动、材料快速加热气化离化和长距离多模式输运沉积的全流程过程，介绍了PS-PVD原理与设备系统，面向等离子射流参数快速无损检测分析的目标，建立了基于光学发射光谱学（OES）的等离子射流和材料特性非接触式检测与诊断装备系统，发展了射流和材料特性参数的定量表征和精确诊断方法。依据电子数密度等检测结果，进一步计算分析等离子温度分布规律。基于射流与材料检测结果，研究了粉末材料在等离子射流中的多相态转变行为，归纳了调控沉积单元多相态转变的工艺控制参数集。这些硬件平台和表征检测方法的建立，为构建PS-PVD理论和研制新型高性能热防护涂层提供了坚实的理论基础和必要的条件支撑。 |
| 英文摘要: |
| Plasma spray-physical vapor deposition (PS-PVD) is a new method for preparing high temperature protective coatings and functional coatings, not only covering plasma spray and electron beam physical vapor deposition processes, but also including customized design and preparation of macro/meso/micro cross-scale structures in coatings. It has been broadly applied in areas such as thermal barrier coatings (TBCs), environmental barrier coatings (EBCs), environmental thermal barrier coatings (TEBCs), oxygen permeable membranes, fuel cells, and solar cell electrode films. Especially in the field of aero-engine and gas turbine protective coatings, it is regarded as a new direction for the development of high-performance TBCs/EBCs preparation technology. The whole process of PS-PVD in expansion flow of plasma jet, material rapid heating gasification ionization and long-distance multi-mode transport deposition was compared and analyzed and the PS-PVD principle and equipment system were introduced. For the goal of rapid non-destructive testing of plasma jet parameters, a detection and diagnostic equipment system was established based on spectroscopy (OES) plasma jet and material property, and quantitative characterization and accurate diagnostic methods for jet and material property parameters were developed. According to the detection results of electron number density and other detection results, the plasma temperature distribution law was further calculated and analyzed. Based on the results of jet and material detection, the multi-phase transition behavior in the plasma jet of powder material was studied, and the process control parameter set for controlling the multi-phase transition of the deposition unit was summarized. The establishment of hardware platforms and characterization detection methods provides a solid theoretical basis and necessary conditional support for constructing PS-PVD theory and developing new high-performance thermal protective coatings. |
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