王伟超,张军战,张颖,杨迪.薄膜热电偶的研究进展[J].表面技术,2019,48(10):139-147.
WANG Wei-chao,ZHANG Jun-zhan,ZHANG Ying,YANG Di.Research Progress of Thin Film Thermocouples[J].Surface Technology,2019,48(10):139-147 |
| 薄膜热电偶的研究进展 |
| Research Progress of Thin Film Thermocouples |
| 投稿时间：2019-03-14 修订日期：2019-10-20 |
| DOI：10.16490/j.cnki.issn.1001-3660.2019.10.017 |
| 中文关键词: 薄膜热电偶 温度测量 热电势 Seebeck系数 |
| 英文关键词:thin film thermocouples temperature measurement thermoelectric power Seebeck coefficient |
| 基金项目: |
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| Author | Institution |
| WANG Wei-chao | Functional Materials Laboratory, School of Materials Science and Engineering, Xi′an University of Architecture and Technology, Xi′an 710055, China |
| ZHANG Jun-zhan | Functional Materials Laboratory, School of Materials Science and Engineering, Xi′an University of Architecture and Technology, Xi′an 710055, China |
| ZHANG Ying | Functional Materials Laboratory, School of Materials Science and Engineering, Xi′an University of Architecture and Technology, Xi′an 710055, China |
| YANG Di | Functional Materials Laboratory, School of Materials Science and Engineering, Xi′an University of Architecture and Technology, Xi′an 710055, China |
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| 中文摘要: |
| 现代科学技术对各种场合下局域温度的准确测量提出了新的要求，极大地促进了温度传感器的发展。薄膜热电偶因具有无源、响应时间短、精确度高以及对测试环境几乎无影响等优点，在温度测量领域具有广阔的应用前景。对薄膜热电偶近年来的研究进展与热点进行了综述。首先简单介绍了以不同材料为基底时，薄膜热电偶的结构。然后分别介绍了应用于航空发动机热端部件高温测量的金属合金类、陶瓷类和复合类薄膜热电偶及其常用的电极材料。讨论了薄膜厚度、退火处理、电极薄膜类型、气氛和掺杂等工艺对薄膜热电偶热电势、Seebeck系数、耐高温能力和电极材料微观结构等方面的影响，将近年来的典型研究成果进行了汇总，并阐述了陶瓷类薄膜热电偶应用于航空发动机中温度监测的优势。此外，分析讨论了应用于局域二维温度场测量的阵列型薄膜热电偶的发展、结构优化设计、制备工艺研究与改进以及实际测温场合中的布局。最后，对薄膜热电偶在相关应用领域的研究和发展方向进行了展望。 |
| 英文摘要: |
| Modern science and technology put forward new requirements for accurate measurement of local temperature in various occasions, which greatly promotes the development of temperature sensor. Due to the advantages of passivity, short response time, high accuracy and little impact on the testing environment, thin film thermocouples have broad application prospects in the field of temperature measurement. The work summarized the research progress and hotspots of thin film thermocouples in recent years. Firstly, the structure of thin film thermocouples based on different materials was presented. Then, metal, ceramic and composite thin film thermocouples and common electrode materials used in high temperature measurement of aero-engine hot end components were introduced respectively. The effects of thickness of film, annealing treatment, type of electrode film, atmosphere and doping on thermoelectric potential, Seebeck coefficient, high temperature resistance and microstructure of electrode of thin film thermocouples were discussed. The typical research results in recent years were summarized, and the advantages of ceramic thin film thermocouples for temperature monitoring in aero-engine were described. In addition, the development course, structure optimization design, research and improvement of fabrication technology and the layout in real temperature measurement occasions of thin film thermocouples array applied to local two-dimensional temperature field measurement were analyzed and discussed. Finally, the research and development direction of the thin film thermocouples in related application fields are prospected. |
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