李洪,杨鸿泰,林松盛,石倩,韦春贝,郭朝乾,苏一凡,唐鹏.电弧离子镀电磁线圈电压对TiAlN涂层结构及性能的影响[J].表面技术,2019,48(9):273-279.
LI Hong,YANG Hong-tai,LIN Song-sheng,SHI Qian,WEI Chun-bei,GUO Chao-qian,SU Yi-fan,TANG Peng.Effect of Electromagnetic Coil Voltage on Microstructure and Properties of TiAlN Coating Prepared by Arc Ion Plating[J].Surface Technology,2019,48(9):273-279
电弧离子镀电磁线圈电压对TiAlN涂层结构及性能的影响
Effect of Electromagnetic Coil Voltage on Microstructure and Properties of TiAlN Coating Prepared by Arc Ion Plating
投稿时间:2018-11-30  修订日期:2019-09-20
DOI:10.16490/j.cnki.issn.1001-3660.2019.09.032
中文关键词:  线圈电压  TiAlN涂层  力学性能  耐磨性  结构及性能
英文关键词:coil voltage  TiAlN coating  mechanical properties  wear resistance  structure and property
基金项目:国家重点研发计划项目(2016YFB0300403-05);广东省科技计划项目(2017A050506037);广东省科技厅项目(2017A070701027);2018年省院项目(2018GDASCX-0402)
作者单位
李洪 1.广东省科学院 广东省新材料研究所 现代材料表面工程技术国家工程实验室,广州 510651 
杨鸿泰 2.广东工业大学 材料与能源学院,广州 510006 
林松盛 1.广东省科学院 广东省新材料研究所 现代材料表面工程技术国家工程实验室,广州 510651 
石倩 1.广东省科学院 广东省新材料研究所 现代材料表面工程技术国家工程实验室,广州 510651 
韦春贝 1.广东省科学院 广东省新材料研究所 现代材料表面工程技术国家工程实验室,广州 510651 
郭朝乾 1.广东省科学院 广东省新材料研究所 现代材料表面工程技术国家工程实验室,广州 510651 
苏一凡 1.广东省科学院 广东省新材料研究所 现代材料表面工程技术国家工程实验室,广州 510651 
唐鹏 1.广东省科学院 广东省新材料研究所 现代材料表面工程技术国家工程实验室,广州 510651 
AuthorInstitution
LI Hong 1.National Engineering Laboratory for Modern Materials Surface Engineering Technology, Guangdong Institute of New Materials, Guangdong Academy of Science, Guangzhou 510651, China 
YANG Hong-tai 2.School of Material and Energy & Guangdong, Guangdong University of Technology, Guangzhou 510006, China 
LIN Song-sheng 1.National Engineering Laboratory for Modern Materials Surface Engineering Technology, Guangdong Institute of New Materials, Guangdong Academy of Science, Guangzhou 510651, China 
SHI Qian 1.National Engineering Laboratory for Modern Materials Surface Engineering Technology, Guangdong Institute of New Materials, Guangdong Academy of Science, Guangzhou 510651, China 
WEI Chun-bei 1.National Engineering Laboratory for Modern Materials Surface Engineering Technology, Guangdong Institute of New Materials, Guangdong Academy of Science, Guangzhou 510651, China 
GUO Chao-qian 1.National Engineering Laboratory for Modern Materials Surface Engineering Technology, Guangdong Institute of New Materials, Guangdong Academy of Science, Guangzhou 510651, China 
SU Yi-fan 1.National Engineering Laboratory for Modern Materials Surface Engineering Technology, Guangdong Institute of New Materials, Guangdong Academy of Science, Guangzhou 510651, China 
TANG Peng 1.National Engineering Laboratory for Modern Materials Surface Engineering Technology, Guangdong Institute of New Materials, Guangdong Academy of Science, Guangzhou 510651, China 
摘要点击次数:
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中文摘要:
      目的 揭示电弧离子镀过程中,电磁和永磁复合磁场耦合作用下电磁线圈偏压对TiAlN涂层结构及性能的作用规律,优化TiAlN涂层制备工艺。方法 采用电弧离子镀技术在M2高速钢基体表面沉积高Al含量Ti0.33Al0.67N涂层(TiAl靶,原子数分数,Ti∶Al=1∶2)。改变电磁线圈电压,研究涂层微观组织结构、表面粗糙度、硬度、膜/基结合力和耐磨性的变化规律。结果 在15~45 V范围内,电磁线圈电压小于30 V时,Ti0.33Al0.67N涂层内部致密;线圈电压大于30 V时,涂层内部变得疏松。线圈电压为15 V时,TiAlN涂层表面粗糙度最小,为0.2 μm。随着线圈电压升高,Ti0.33Al0.67N涂层硬度增大,线圈电压为45 V时,Ti0.33Al0.67N涂层硬度达到最大,为3866HV0.025。随着线圈电压的升高,Ti0.33Al0.67N涂层膜/基结合力及耐磨性先增加后减小,线圈电压为15 V时,结合力最高,为95.4 N,磨损率达到最低,为1.62×10-15 m3/(N•m)。结论 在线圈电压较小时,随着电压的升高,作用于阴极靶材的磁场强度增加,阴极弧斑速度加快,每个弧光点维持时间缩短,能量降低,离化率升高,溅射出的液滴数量减少,涂层结构致密,粗糙度降低,硬度和耐磨性能升高;随着线圈电压进一步升高,磁场强度继续增大,弧斑运动受到的磁性束缚力增大,弧斑运动半径向靶材中心收缩,作用于固定位置的弧光累计时间更长,离化率降低,液滴增多,涂层综合性能下降。
英文摘要:
      The work aims to reveal the effect of electromagnetic coil bias on the structure and properties of TiAlN coating under the coupling of electromagnetic and permanent magnetic composite magnetic field in the process of arc ion plating, and optimize the preparation process of TiAlN coating. Ti0.33Al0.67N coating with high Al content (TiAl target at%, Ti∶Al=1∶2) was deposited on the M2 high-speed steel substrate by arc ion plating technique. By changing the voltage of the electromagnetic coil, the microstructure, surface roughness, hardness, film/base bonding force and wear resistance of the coating were studied. When the coil voltage was less than 30 V in the range of 15 V to 45 V, the interior of the Ti0.33Al0.67N coating was dense. When the coil voltage was greater than 30 V, the interior of the coating became loose. When the coil voltage was 15 V, the surface roughness of the Ti0.33Al0.67N coating was at least 0.2 μm. With the increase of voltage, the hardness of Ti0.33Al0.67N coating increased, and the hardness of Ti0.33Al0.67N coating reached the maximum of 3866HV0.3 when the coil voltage was 45 V. As the coil voltage increased, the adhesion and wear resistance of the Ti0.33Al0.67N coating/base increased first and then decreased. When the coil voltage was 15 V, the binding force was 95.4 N and the wear rate reached the minimum of 1.62×10-15 m3/(N•m). When the coil voltage is small, as the coil voltage increases, the strength of the magnetic field acting on the cathode target increases, the speed of the cathode arc spot increases, the time for maintaining each arc spot shortens, the energy decreases, the ionization rate increases and the number of droplets splashed decreases. Thus, the coating structure becomes dense, the roughness decreases and the hardness and wear resistance increase. As the coil voltage increases further, the magnetic field strength continues to increase, the magnetic binding force of the arc spot movement increases, the movement radius of the arc spot contracts toward the center of the target and the accumulated time of the arc at a fixed position is longer, the ionization rate decreases, the droplets increase and overall performance of the Ti0.33Al0.67N coating declines.
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