李林儒,王振玉,左潇,刘林林,黄美东,柯培玲,汪爱英.直流磁控溅射和高功率脉冲磁控溅射TiSiN涂层的结构与性能比较[J].表面技术,2019,48(9):70-77.
LI Lin-ru,WANG Zhen-yu,ZUO Xiao,LIU Lin-lin,HUANG Mei-dong,KE Pei-ling,WANG Ai-ying.Comparative Study on Structure and Properties of TiSiN Coatings Prepared by DCMS and HiPIMS[J].Surface Technology,2019,48(9):70-77 |
| 直流磁控溅射和高功率脉冲磁控溅射TiSiN涂层的结构与性能比较 |
| Comparative Study on Structure and Properties of TiSiN Coatings Prepared by DCMS and HiPIMS |
| 投稿时间：2019-06-12 修订日期：2019-09-20 |
| DOI：10.16490/j.cnki.issn.1001-3660.2019.09.006 |
| 中文关键词: 高功率脉冲磁控溅射 TiSiN涂层 纳米复合 低应力 高硬度 |
| 英文关键词:HiPIMS TiSiN coating nanocomposite low stress high hardness |
| 基金项目:国家自然科学基金项目（51875555, 11705258, 51801226）；宁波市自然科学基金（2018A610175） |
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| Author | Institution |
| LI Lin-ru | 1.School of Physics and Materials Science, Tianjin Normal University, Tianjin 300387, China; 2.a.Key Laboratory of Marine Materials and Related Technologies, b.Zhejiang Key Laboratory of Marine Materials of Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China |
| WANG Zhen-yu | 2.a.Key Laboratory of Marine Materials and Related Technologies, b.Zhejiang Key Laboratory of Marine Materials of Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China |
| ZUO Xiao | 2.a.Key Laboratory of Marine Materials and Related Technologies, b.Zhejiang Key Laboratory of Marine Materials of Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China |
| LIU Lin-lin | 2.a.Key Laboratory of Marine Materials and Related Technologies, b.Zhejiang Key Laboratory of Marine Materials of Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China |
| HUANG Mei-dong | 1.School of Physics and Materials Science, Tianjin Normal University, Tianjin 300387, China |
| KE Pei-ling | 2.a.Key Laboratory of Marine Materials and Related Technologies, b.Zhejiang Key Laboratory of Marine Materials of Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China; 3.Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China |
| WANG Ai-ying | 2.a.Key Laboratory of Marine Materials and Related Technologies, b.Zhejiang Key Laboratory of Marine Materials of Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China; 3.Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China |
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| 中文摘要: |
| 目的 对比研究HiPIMS和DCMS技术对涂层组织、结构与性能的影响，为不同磁控溅射技术制备硬质涂层提供理论依据与实验指导。方法 在相同功率密度下，通过HiPIMS和DCMS技术分别制备 TiSiN 涂层。通过X射线衍射仪（XRD）、X射线光电子能谱（XPS）、扫描电子显微镜（SEM）、透射电子显微镜（TEM）、扫描探针显微镜（SPM）表征涂层的结构和形貌，并通过纳米压痕仪、划痕仪、UMT-3摩擦磨损试验机、电化学工作站表征涂层的力学、摩擦学和耐腐蚀性能。结果 与DCMS制备的TiSiN涂层相比，HiPIMS技术所制备的涂层表面更加光滑，结构更为致密，硬度提高了10%，且应力降低了35%，呈低应力高硬度特征，涂层的韧性和结合力也明显提高，膜基结合力由DCMS涂层的40 N提高至50 N。同时，涂层的耐磨和耐腐蚀性能得到提升，摩擦系数降低了18%，腐蚀电流密降低了将近1个数量级。结论 与DCMS 相比，HiPIMS技术在制备TiSiN纳米复合涂层上具有显著优势，有效提高了涂层的综合使役性能。 |
| 英文摘要: |
| The work aims to comparatively study the composition, microstructure and properties of TiSiN coatings prepared by the two different methods, high power impulse magnetron sputtering and direct current magnetron sputtering, so as to provide the theoretical basis and experimental guidance for the preparation of hard coatings by different magnetron sputtering techniques. The TiSiN coatings were prepared by HiPIMS and DCMS under the same power density. The structure and morphology of the coatings were characterized by X-ray diffractometry, X-ray photoelectron spectroscopy, scanning electron microscopy, transmission electron microscopy, surface profilometry, and scanning probe microscopy. The mechanical, tribological and corrosion resistance properties of the coatings were characterized by nanoindentor, scratch tester, UMT-3 reciprocating friction and wear tester and electrochemical workstation, respectively. Compared with the TisiN coatings prepared by DCMS, the TiSiN coatings prepared by HiPIMS technology demonstrated smoother surface and more compact structure. The hardness increased by 10% while the stress reduced by 35%, so the coatings exhibited higher hardness but lower stress. The toughness and coating-substrate adhesion also increased obviously. The coating-substrate adhesion was increased from 40 N to 50 N. The wear and corrosion resistance were also improved and the friction coefficient and corrosion current density were reduced by 10% and almost one order of magnitude, respectively. Therefore, compared with DCMS, HiPIMS technology presents significant advantages in the preparation of TiSiN nanocomposite coatings, and effectively improves the comprehensive performance of the coatings. |
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