刘朋朋,刘卫国,李亚国,周顺.熔石英表面激光平滑中扫描速度对粗糙度的影响规律[J].表面技术,2019,48(8):316-322.
LIU Peng-peng,LIU Wei-guo,LI Ya-guo,ZHOU Shun.Influence Law of Scanning Velocity on Roughness in Laser Smoothing of Fused Silica Surface[J].Surface Technology,2019,48(8):316-322
熔石英表面激光平滑中扫描速度对粗糙度的影响规律
Influence Law of Scanning Velocity on Roughness in Laser Smoothing of Fused Silica Surface
投稿时间:2019-02-28  修订日期:2019-08-20
DOI:10.16490/j.cnki.issn.1001-3660.2019.08.042
中文关键词:  激光平滑  熔石英  有限元分析  扫描速度  温度场  表面粗糙度
英文关键词:laser smoothing  fused silica  finite element analysis  scanning velocity  temperature field  surface roughness
基金项目:国家自然科学基金(51505444);中国工程物理研究院超精密加工重点实验室基金(ZZ15004);中国工程物理研究院激光聚变研究中心青年人才基金(LFRC-PD012);国防科技卓越青年基金(2017-JCJQ-ZQ-024)
作者单位
刘朋朋 1.西安工业大学 光电工程系,西安 710021;2.中国工程物理研究院 激光聚变研究中心,四川 绵阳 621900 
刘卫国 1.西安工业大学 光电工程系,西安 710021 
李亚国 2.中国工程物理研究院 激光聚变研究中心,四川 绵阳 621900 
周顺 1.西安工业大学 光电工程系,西安 710021 
AuthorInstitution
LIU Peng-peng 1.Department of Photoelectric Engineering, Xi’an Technological University, Xi’an 710021, China; 2.Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, China 
LIU Wei-guo 1.Department of Photoelectric Engineering, Xi’an Technological University, Xi’an 710021, China 
LI Ya-guo 2.Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, China 
ZHOU Shun 1.Department of Photoelectric Engineering, Xi’an Technological University, Xi’an 710021, China 
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中文摘要:
      目的 研究激光平滑光学元件的工艺,探索使用CW(连续)CO2激光器对熔石英光学元件表面进行平滑处理时,当激光束功率、束斑尺寸一定的情况下,不同的扫描速度对平滑后熔石英元件表面粗糙度的影响规律。方法 用仿真结合实验的方式进行了研究。使用有限元仿真模型对激光功率为25 W,作用斑点为短轴2 mm、长轴3 mm的椭圆斑的激光加工模型进行了仿真,得到了不同扫描速度下激光束作用于熔石英表面的温度场及对应的稳定温度。通过定点照射实验验证了温度仿真结果的准确性,并进行了扫描速度为0.04、0.1、0.2、0.35、0.5 mm/s的单因素实验,使用原子力显微镜检测平滑实验前后的熔石英表面粗糙度,得到了粗糙度与激光扫描速度之间的关系。结果 激光功率为25 W时,5种扫描速度对应的稳定温度都分布在熔石英材料的熔点以上。5种扫描速度下平滑后的熔石英表面粗糙度都明显降低,在扫描速度为0.1 mm/s的情况下,取得了将熔石英表面粗糙度由初始的62.55 nm降低至6.17 nm的平滑效果。结论 激光平滑过程中,当激光功率、激光斑尺寸一定时,存在一个最佳的扫描速度,可以使加工表面的粗糙度降低至光学表面的要求。
英文摘要:
      The work aims to study the technology of smoothening the fused silica optical elements and explore the influence of different scanning velocities on the surface roughness of smoothed fused silica optical elements when CW CO2 laser is used to smoothen the fused silica optical elements under the fixed laser power and beam size. The study was carried out by simulation and experiment. A finite element model was used to simulate the laser processing model with a laser power of 25 W and an elliptical spot with a minor axis of 2 mm and a major axis of 3 mm. The temperature field and corresponding stable temperature of laser beam acting on the surface of fused silica under different scanning speeds were obtained. The accuracy of temperature simulation model was verified by fixed-point irradiation experiment, and single factor experiments with scanning speeds of 0.04 mm/s, 0.1 mm/s, 0.2 mm/s, 0.35 mm/s and 0.5 mm/s were carried out. Atomic force microscope was used to detect the surface roughness of fused silica before and after the smoothing experiment, and the relationship between roughness and laser scanning speed was obtained. When the laser power was 25 W, the stable temperature corresponding to the five scanning speeds was all distributed above the melting point. The surface roughness of the fused silica after smoothing at five scanning speed was significantly reduced, and the smoothing effect of reducing the initial surface roughness of the fused silica from 62.55 nm to 6.17 nm was obtained at a scanning speed of 0.1 mm/s. When the laser power and laser spot size are constant, there is an optimum scanning speed to reduce the roughness of the machined surface to the optical surface.
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