刘庆露,朱丽慧,刘振宇.微喷砂处理对TiN/MT-TiCN/Al2O3/TiOCN多层涂层摩擦磨损性能的影响[J].表面技术,2019,48(7):371-377.
LIU Qing-lu,ZHU Li-hui,LIU Zhen-yu.Effect of Micro-blasting Post-treatment on the Friction and Wear Properties of TiN/MT-TiCN/Al2O3/TiOCN Multilayer Coatings[J].Surface Technology,2019,48(7):371-377 |
| 微喷砂处理对TiN/MT-TiCN/Al2O3/TiOCN多层涂层摩擦磨损性能的影响 |
| Effect of Micro-blasting Post-treatment on the Friction and Wear Properties of TiN/MT-TiCN/Al2O3/TiOCN Multilayer Coatings |
| 投稿时间：2018-10-23 修订日期：2019-07-20 |
| DOI：10.16490/j.cnki.issn.1001-3660.2019.07.043 |
| 中文关键词: 微喷砂处理 化学气相沉积 TiOCN 多层涂层 力学性能 摩擦磨损 |
| 英文关键词:micro-blasting post treatment chemical vapor deposition TiOCN multilayer coatings mechanical properties friction and wear |
| 基金项目:国家重点研发计划资助（2016YFB0300403）；美国kennametal公司资助项目 |
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| 中文摘要: |
| 目的 采用微喷砂的方法对TiN/MT-TiCN/Al2O3/TiOCN多层涂层进行后处理，研究其对涂层摩擦磨损性能的影响。方法 采用化学气相沉积（CVD）的方法在硬质合金基体上沉积多层涂层，并进行微喷砂处理。利用X射线衍射仪（XRD）、扫描电子显微镜（SEM）表征涂层的显微组织结构，利用显微维氏硬度计、纳米压痕仪、X射线应力仪以及划痕仪测试涂层的硬度、应力和结合力，采用往复式多功能摩擦磨损试验机（UMT-3T）研究涂层的摩擦磨损性能。结果 TiN/MT-TiCN/Al2O3/TiOCN多层涂层经过微喷砂处理后，表层粗糙度改善，显微硬度提高21.4%，顶层TiOCN的纳米压痕硬度由微喷砂前的36.31 GPa增大至39.32 GPa，摩擦系数降低，磨损体积由微喷砂前的1.95×10-3 mm3增大至2.26×10-3 mm3，磨损率由微喷砂前的1.81× 10-6 mm3/(N•m)增大至2.10×10-6 mm3/(N•m)。微喷砂后处理在提高TiOCN顶层硬度的同时，也减薄了TiOCN顶层的厚度，并使得TiOCN层表面出现明显的裂纹，Al2O3层的抗塑性变形能力变弱，从而使顶层TiOCN被提早磨穿，Al2O3层产生大量磨屑，加剧了磨损，微喷砂后涂层表现出较差的耐磨性。结论 微喷砂处理可以有效改善涂层力学性能。但在涂层较薄的情况下，微喷砂处理造成的裂纹和减薄现象会使其整体耐磨损性能下降。 |
| 英文摘要: |
| The work aims to treat the TiN/MT-TiCN/Al2O3/TiOCN multilayer coatings through micro-blasting and study the effect of micro-blasting post-treatment on the friction and wear properties of coatings. Multilayer coatings were deposited on cemented carbides by chemical vapor deposition (CVD). X-ray diffraction (XRD) and scanning electron microscopy (SEM) were applied to characterize the microstructure of coatings. The hardness, stress and adhesion strength of coatings were tested by mi-crohardness tester, nanoindentation, X-ray stress tester and scratch tester. The friction and wear properties of coatings were investigated by UMT-3MT tribometer. After micro-blasting treatment, the roughness of TiN/MT-TiCN/Al2O3/TiOCN multilayer coating was improved, the micro-hardness increased by 21.4% and the nano-hardness of TiOCN layer increased from 36.31 GPa to 39.32 GPa. Meanwhile, the friction coefficient decreased, the wear volume increased from 1.95×10-3 mm3 to 2.26×10-3 mm3 and the wear rate increased from 1.81×10-6 mm3/(N•m) to 2.10×10-6 mm3/(N•m). Micro-blasting post-treatment improved the hardness of TiOCN top layer, but reduced the thickness of TiOCN top layer. Moreover, many obvious cracks were formed on the surface of TiOCN layer, and the plastic resistance of Al2O3 layer became weak. Therefore, the TiOCN layer was worn out in advance, and a large amount of debris were produced on the Al2O3 layer. Consequently, the wear was aggravated and the coating showed poor wear property after micro-blasting. The micro-blasting treatment can effectively improve the mechanical properties of TiN/MT-TiCN/Al2O3/TiOCN coatings. However, the cracking and thinning caused by micro-blasting treatment reduce the wear resistance of the TiN/MT-TiCN/Al2O3/TiOCN multilayer coatings when coatings are thinner. |
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