李云玉,任西鹏,陈兆祥,李浩,任丽梅.DLC薄膜沉积对不同表面形貌的钛微弧氧化膜层摩擦学性能的影响[J].表面技术,2019,48(7):112-121.
LI Yun-yu,REN Xi-peng,CHEN Zhao-xiang,LI Hao,REN Li-mei.Influence of DLC Film Deposition on the Tribological Property of Micro-arc Oxidation Films with Different Surface Morphologies on Titanium[J].Surface Technology,2019,48(7):112-121 |
| DLC薄膜沉积对不同表面形貌的钛微弧氧化膜层摩擦学性能的影响 |
| Influence of DLC Film Deposition on the Tribological Property of Micro-arc Oxidation Films with Different Surface Morphologies on Titanium |
| 投稿时间：2019-03-29 修订日期：2019-07-20 |
| DOI：10.16490/j.cnki.issn.1001-3660.2019.07.012 |
| 中文关键词: TA2 微弧氧化 DLC 摩擦系数 磨损率 |
| 英文关键词:TA2 micro-arc oxidation DLC friction coefficient wear rate |
| 基金项目:河北省引进留学人员资助项目（CL201726）；河北省自然科学基金项目（E2016203270）；河北省高等学校科学技术研究项目（QN2019013）；燕山大学基础研究专项（020000904）；燕山大学博士基金项目（B943） |
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| Author | Institution |
| LI Yun-yu | a.School of Mechanical Engineering, b.Key Laboratory of Aviation Science and Technology on Generic Technology of Self-Lubricating Spherical Plain Bearing, Yanshan University, Qinhuangdao 066004, China |
| REN Xi-peng | a.School of Mechanical Engineering, b.Key Laboratory of Aviation Science and Technology on Generic Technology of Self-Lubricating Spherical Plain Bearing, Yanshan University, Qinhuangdao 066004, China |
| CHEN Zhao-xiang | a.School of Mechanical Engineering, b.Key Laboratory of Aviation Science and Technology on Generic Technology of Self-Lubricating Spherical Plain Bearing, Yanshan University, Qinhuangdao 066004, China |
| LI Hao | a.School of Mechanical Engineering, b.Key Laboratory of Aviation Science and Technology on Generic Technology of Self-Lubricating Spherical Plain Bearing, Yanshan University, Qinhuangdao 066004, China |
| REN Li-mei | a.School of Mechanical Engineering, b.Key Laboratory of Aviation Science and Technology on Generic Technology of Self-Lubricating Spherical Plain Bearing, Yanshan University, Qinhuangdao 066004, China |
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| 中文摘要: |
| 目的 在钛微弧氧化（MAO）膜层表面沉积类金刚石碳（DLC）薄膜，探索DLC薄膜沉积对不同表面形貌微弧氧化膜层摩擦学性能的影响。方法 在铝酸盐电解液体系中，通过改变微弧氧化时间（10、60 min）制备表面粗糙度与平均孔径不同的两种微弧氧化膜层MAO_10和MAO_60，而后利用磁控溅射技术在其表面沉积DLC薄膜，获得MAO/DLC复合膜层。通过白光共聚焦显微镜、CSM球盘式摩擦磨损试验机、Mahr轮廓仪和扫描电子显微镜等实验设备，对膜层的表面粗糙度、微孔尺寸、摩擦系数、磨损率和磨痕形貌等进行观察和分析。结果 微弧氧化时间增加导致MAO膜层的表面粗糙度增大，表面微孔数目下降但平均孔径增大。DLC沉积可以在MAO_10膜层表面形成较好的DLC覆盖层，但在粗糙度较高和孔径较大的MAO_60膜层表面呈现出明显的不连续分布。MAO/DLC复合膜层的粗糙度和平均孔径明显低于MAO膜层。摩擦学性能测试表明，MAO_10/DLC复合膜层的摩擦系数和磨损率相比于MAO_10膜层均明显下降，MAO_10膜层和MAO_10/DLC复合膜层的稳定摩擦系数分别为0.85和0.24，磨损率分别为12.76×10-6 mm3/(N•m)和3.71×10-6 mm3/(N•m)；MAO_60/DLC复合膜层的摩擦系数和磨损率则与MAO_60膜层比较接近，MAO_60膜层和MAO_60/DLC复合膜层的稳定摩擦系数分别为0.77和0.67，磨损率分别为68.02×10-6 mm3/(N•m)和61.81×10-6 mm3/(N•m)。结论 在表面较平整且平均孔径较小的钛微弧氧化膜层表面沉积DLC薄膜时，所得MAO/DLC复合膜层在摩擦过程中可以形成较为连续的润滑层，其摩擦学性能良好。相反，在表面粗糙和平均孔径较大的钛微弧氧化膜层表面沉积DLC薄膜时，所得MAO/DLC复合膜层在摩擦过程中难以形成连续的润滑层，其摩擦学性能较差。 |
| 英文摘要: |
| The work aims to deposit diamond-like carbon (DLC) film on the surface of micro-arc oxidation films on titanium and explore the influence of DLC film deposition on the tribological property of micro-arc oxidation (MAO) films with different surface morphologies. Two kinds of MAO films (MAO_10 and MAO_60) with different surface roughness and micro-pore sizes were fabricated in the aluminate electrolytes with the MAO time of 10 min and 60 min, respectively. Then, a DLC film was deposited on the surface of the MAO film by magnetron sputtering to obtain MAO/DLC composite films. The surface roughness, micro-pore size, friction coefficient, wear rate and wear scar morphology of the MAO and MAO/DLC films were observed and studied by confocal microscope, CSM friction tester, Mahr surface profiler and scanning electron microscopy (SEM). The increasing MAO time increased surface roughness and average micro-pore size, but decreased micro-pore number of MAO films. After the DLC deposition, a relatively good DLC top layer was formed on the surface of MAO_10 film. However, the DLC top layer on the MAO_60 film exhibited a discontinuous distribution due to the high surface roughness and large micro-pore size of MAO_60 film. The surface roughness and average micro-pore size of MAO/DLC composite films were lower than that of MAO films. The tribological test results showed that the friction coefficient and wear rate of MAO_10/DLC composite film were significantly lower than that of MAO_10 film. The stable friction coefficient of MAO_10 film and MAO_10/DLC composite film was 0.85 and 0.24, and the wear rate was 12.76×10-6 mm3/(N•m) and 3.71×10-6 mm3/(N•m), respectively. In contrast, the stable friction coefficient and average wear rate of MAO_60/DLC composite film were near to that of MAO_60 film. The stable friction coefficient of MAO_60 film and MAO_60/DLC composite film was 0.77 and 0.67, and the wear rate was 68.02×10-6 mm3/(N•m) and 61.81×10-6 mm3/(N•m), respectively. When the DLC film is deposited on the MAO film with relatively smooth surface and small micro-pore size, the fabricated MAO/DLC composite film has good tribological property due to the formation of a continuous lubricating layer. In contrast, when the DLC film is deposited on the MAO film with rough surface and large micro-pore size, the continuous lubricating layer is difficult to form, thus leading to a relatively poor tribological property. |
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