王泽松,梁枫,项燕雄,李松权,田灿鑫,邹长伟.低转速下多弧离子镀制备的Mo-Ti-Al-N超晶格硬质涂层的微结构及背散射谱分析[J].表面技术,2019,48(4):160-167.
WANG Ze-song,LIANG Feng,XIANG Yan-xiong,LI Song-quan,TIAN Can-xin,ZOU Chang-wei.Analysis on Microstructure and Backscattering Spectroscopy of Superlattice Mo-Ti-Al-N Hard Coatings Prepared by Multi-arc Ion Plating at Low Rotation Speed[J].Surface Technology,2019,48(4):160-167 |
| 低转速下多弧离子镀制备的Mo-Ti-Al-N超晶格硬质涂层的微结构及背散射谱分析 |
| Analysis on Microstructure and Backscattering Spectroscopy of Superlattice Mo-Ti-Al-N Hard Coatings Prepared by Multi-arc Ion Plating at Low Rotation Speed |
| 投稿时间：2019-01-07 修订日期：2019-04-20 |
| DOI：10.16490/j.cnki.issn.1001-3660.2019.04.023 |
| 中文关键词: 多弧离子镀 纳米多层膜 Mo-Ti-Al-N超晶格涂层 微结构 调制周期 背散射谱 |
| 英文关键词:multi-arc ion plating nanomultilayer Mo-Ti-Al-N superlattice coatings microstructure modulation period backscattering spectroscopy |
| 基金项目:广东省科技计划(对外合作)项目（2018A050506082）；广东省自然科学基金（2018A030307027）；岭南师范学院自然科学研究项目（LZL1809，1170916003） |
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| Author | Institution |
| WANG Ze-song | School of Physics and Technology, Lingnan Normal University, Zhanjiang 524048, China |
| LIANG Feng | School of Physics and Technology, Lingnan Normal University, Zhanjiang 524048, China |
| XIANG Yan-xiong | School of Physics and Technology, Lingnan Normal University, Zhanjiang 524048, China |
| LI Song-quan | School of Physics and Technology, Lingnan Normal University, Zhanjiang 524048, China |
| TIAN Can-xin | School of Physics and Technology, Lingnan Normal University, Zhanjiang 524048, China |
| ZOU Chang-wei | School of Physics and Technology, Lingnan Normal University, Zhanjiang 524048, China |
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| 中文摘要: |
| 目的 研究低基片转速对纳米多层膜微结构和性能的影响。方法 采用阴极多弧离子镀技术在单晶硅基片上沉积制备了MoTiAlN/MoN/Mo纳米复合结构涂层，借助X射线衍射仪（XRD）、扫描电镜（SEM）、透射电镜（TEM）、背散射谱（RBS）和纳米硬度计，分别对样品的物相、形貌、组分和硬度进行表征分析。结果 XRD显示不同转速下制备的涂层的物相结构主要为六角密排结构的MoN和面心立方(Ti,Al)N，较高基片转速下涂层的结晶性较好。SEM和TEM图像证实，2 r/min基片转速下的目标涂层具有平均调制周期26 nm的TiAlN/MoN超晶格结构，总厚度为1.15 μm，且界面清晰。纳米显微硬度测试表明，低基片转速下，涂层硬度和杨氏模量分别达到(30±2) GPa和(500±30) GPa。结论 不同能量的7Li2+离子卢瑟福背散射谱结合SIMNRA拟合程序，可定量评估该超晶格结构涂层的原子百分比、每个子层的物理厚度及调制周期，这为纳米多层膜的微结构表征提供了一种有效的分析手段。 |
| 英文摘要: |
| The work aims to study the impact of low substrate rotation speed on microstructure and physical properties of nanostructured multilayer. MoTiAlN/MoN/Mo composite coatings were deposited on silicon substrates by cathodic multi-arc ion plating, and the phase structure, morphology, component and nanohardness of coatings species were characterized by X-ray diffraction, scanning electron microscopy, transmission electron microscopy, Rutherford backscattering spectroscopy and nano-hardness tester. XRD results indicated that the coatings deposited at various substrate rotation speeds comprised hcp-MoN and fcc-(Ti,Al)N phases and the crystallinity was better at higher substrate rotation speed. SEM and TEM images confirmed that the mean modulation period and total physical thickness of superlattice TiAlN/MoN coatings with a sharp interface deposited at 2 r/min were 26 nm and 1.15 μm, respectively and the interface was clear. The nanohardness and Young modulus were up to (30±2) GPa and (500±30) GPa, respectively. RBS along with SIMNRA program proves to be a good method to evaluate the atomic concentrations, physical thicknesses of individual sublayers as well as the modulation periods of superlattice coatings quantitatively and provide reliable characterization for nanomultilayers. |
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