王林青,周永涛,王军军.退火处理对DLC薄膜结构及摩擦学性能的影响[J].表面技术,2019,48(2):133-138.
WANG Lin-qing,ZHOU Yong-tao,WANG Jun-jun.Effects of Annealing Treatment on the Structure and Tribological Properties of Diamond-like Carbon Thin Films[J].Surface Technology,2019,48(2):133-138 |
| 退火处理对DLC薄膜结构及摩擦学性能的影响 |
| Effects of Annealing Treatment on the Structure and Tribological Properties of Diamond-like Carbon Thin Films |
| 投稿时间：2018-07-18 修订日期：2019-02-20 |
| DOI：10.16490/j.cnki.issn.1001-3660.2019.02.019 |
| 中文关键词: DLC薄膜 退火处理 结构 摩擦学性能 Raman光谱 |
| 英文关键词:DLC thin films annealing treatment structure tribological properties Raman spectra |
| 基金项目:国家自然科学基金（51505050）；重庆市教委科学技术研究基础/应用基础研究项目（KJ1500942）；重庆市科委基础与前沿研究一般项目（cstc2017jcyjAX0075） |
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| 中文摘要: |
| 目的 研究退火处理对DLC薄膜结构及摩擦学性能的影响，并讨论它们之间的相互关系。方法 采用平板空心阴极等离子体增强化学气相沉积系统，以C2H2和Ar作为反应气源制备DLC薄膜，将DLC薄膜在大气环境中进行不同温度的退火处理。采用扫描电子显微镜、Raman光谱仪及金相显微镜、薄膜应力测试仪及球-盘摩擦实验仪等，对退火处理前后的DLC薄膜结构、应力及摩擦学性能等进行测试分析。 结果 在较低温度（q≤300 ℃）下退火，随退火温度的增加，薄膜中sp3-C的相对含量缓慢减少，结构没有发生明显的变化，内应力降低，薄膜的摩擦系数变化趋势相同，且随退火温度的增加，摩擦系数达到平稳的趋势发生得更早。在400 ℃退火温度下，DLC薄膜的结构发生了明显的改变，且表面发生了一定的氧化，初始摩擦系数较高，随摩擦时间的延长，薄膜的摩擦系数降低，同时稳定后的摩擦系数（~0.16）较低温退火的DLC薄膜高。在450 ℃退火温度下，DLC薄膜结构发生了明显的改变，并出现了严重的氧化，摩擦学性能严重恶化并迅速失效。结论 退火温度的选择对DLC薄膜的结构及摩擦学性能具有重要影响。 |
| 英文摘要: |
| The work aims to study the effects of annealing treatment on the structure and tribological properties of dia-mond-like carbon thin films and discuss the inter relation. Diamond like carbon (DLC) films were deposited by plate hollow cathode plasma enhanced chemical vapor deposition method with C2H2 and Ar as the reaction gas source. Then, the DLC thin films were annealed in the atmospheric environment with different temperature. The structure, stress and tribological properties of the DLC thin films before and after annealing were investigated and tested by scanning electron spectroscopy (SEM), Raman spectroscopy, metalloscopy, stress analyzer and ball-on-disk tribotester. After annealing at lower temperature (q≤300 ℃), the content of sp3-C in the thin films slowly decreased as the annealing temperature increased and the structure of DLC films had no significant changes. However, the internal stress decreased and the friction coefficient firstly decreased and came to the stable state earlier. At 400 ℃ annealing temperature, the structure of DLC thin films changed obviously and oxidation was observed on the surface. The initial friction coefficient was high and the friction coefficient of thin films decreased as the friction time extended. Meanwhile, the stable friction coefficient (~0.16) was high for the DCL thin film annealed at lower temperature. At 450 ℃ annealing temperature, the structure of thin films changed significantly and serious oxidation was observed. The tribological properties was seriously deteriorated and came to failure quickly. The annealing temperature significantly affects the structure and tribological properties of DLC thin films. |
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