张而耕,陈强.PECVD制备DLC复合薄膜性能及模具应用[J].表面技术,2019,48(1):298-304.
ZHANG Er-geng,CHEN Qiang.Properties of DLC Composite Films Prepared by PECVD and Application of Mold[J].Surface Technology,2019,48(1):298-304
PECVD制备DLC复合薄膜性能及模具应用
Properties of DLC Composite Films Prepared by PECVD and Application of Mold
投稿时间:2018-08-12  修订日期:2019-01-20
DOI:10.16490/j.cnki.issn.1001-3660.2019.01.039
中文关键词:  Cr/DLC  结合强度  耐磨性  硬度  寿命
英文关键词:CrN/DLC  adhesion strength  wear resistance  hardness  life
基金项目:上海市重点支撑计划(170905038000)
作者单位
张而耕 上海应用技术大学 a.表面工程研究所,上海 201418 
陈强 上海应用技术大学 b.工程创新学院,上海 201418 
AuthorInstitution
ZHANG Er-geng a.Institute of Surface Engineering, Shanghai Institute of Technology, Shanghai 201418, China 
CHEN Qiang b.School of Engineering Innovation, Shanghai Institute of Technology, Shanghai 201418, China 
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中文摘要:
      目的 比较分析CrN过渡层与不同膜厚对DLC薄膜性能的影响,以及涂层模具的成型特性。 方法采用PECVD方法在718合金试样及模具表面沉积CrN/DLC复合膜,预设CrN过渡层厚度为0.2 μm,DLC膜层厚度为0.5~1.2 μm。采用无损设备对不同沉积时间(10、15、20、25、30、35 min)的薄膜厚度进行表征,并使用扫描电子显微镜(SEM)观察薄膜表面及截面结构特征。采用拉曼光谱(Raman)分析不同厚度DLC膜的峰位信息以及sp3-C/sp2-C的比例关系,用纳米压痕仪表征膜层硬度,用硬度计分析膜/基结合力,用轮廓仪表征薄膜表面特征,并探讨膜厚对薄膜性能的影响机制。结果 薄膜的厚度值在预设范围以内,该方法制备的薄膜结构致密,表面光滑,无分层、凹坑、液滴粘附等缺陷。随涂层厚度的增加,薄膜中sp3-C/sp2-C的比例呈先减小后增大的趋势,G峰也先向D峰靠近,而后远离。薄膜硬度同样随膜层厚度的增加呈先增加后减小的趋势,1.06 μm厚的CrN/DLC膜的硬度最高(3600HV)。薄膜的结合力等级最高可以达到工业级的HF2。表面轮廓无较大波动,表面粗糙度Ra最低可达0.011 μm。1.06 μm CrN/DLC涂层模具的成型寿命是未涂层模具的3倍以上。结论 对橡胶模具而言,适当厚度的DLC微/纳涂层处理可以起到一定的减磨、抗腐蚀效果,降低模具本体表面润湿性,保证橡胶件成型质量。
英文摘要:
      The work aims to compare and analyze the effects of CrN transition layer and different film thickness on the properties of DLC films and the molding characteristics of the coating mold. The CrN/DLC composite films were deposited on the surface of 718 alloy sample and mold by PECVD method. The thickness of the CrN transition layer and DLC film was preset as 0.2 μm and 0.5~1.2 μm respectively. The thickness of films for different deposition time (10 min, 15 min, 20 min, 25 min, 30 min and 35 min) was characterized by non-destructive equipment, and the surface and cross-sectional structure of the films were observed by scanning electron microscopy (SEM). Raman spectroscopy was used to analyze the peak position information and sp3-C/sp2-C ratio of DLC films with different thickness. The nano-indentator was used to characterize the film hardness, the hardness tester was adopted to analyze the adhesion strength of film and substrate and the profilometer was applied to characterize surface features. Moreover, all the mechanisms leading to the above effects were discussed. The thickness of all the films was within the preset range. The film structure fabricated by this method was compact, smooth, and free from defects such as delamination, pits, droplet adhesion, etc. The ratio of sp3-C/sp2-C in the film decreased and then increased with the increase of coating thickness, and the G peak approached D peak first and then went away. The hardness of film also increased with the in-crease of film thickness, and then decreased. 1.6 μm thick film had the highest hardness (HV3600). The highest adhesion strength of the film could reach HF2 of the industrial grade. The surface profile was free from greater range of fluctuations, and the minimum surface roughness Ra could reach 0.011 μm. The service life of the coating mold was increased by at least 1.5 times. For rubber mold, suitable thickness of DLC micro-nano coating can reduce wear and corrosion, lower the surface wettability of the mold body, and ensure the forming quality of rubber parts.
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