袁禾蔚,李佳君,刘浩,李震睿,徐锴,孙占峰,孙雪,陈广超.紫外脉冲激光辐刻单晶金刚石的研究[J].表面技术,2018,47(4):24-28.
YUAN He-wei,LI Jia-jun,LIU Hao,LI Zhen-rui,XU Kai,SUN Zhan-feng,SUN Xue,CHEN Guang-chao.Single Crystal Diamond Trenched by UV Pulsed Laser[J].Surface Technology,2018,47(4):24-28
紫外脉冲激光辐刻单晶金刚石的研究
Single Crystal Diamond Trenched by UV Pulsed Laser
投稿时间:2017-09-21  修订日期:2018-04-20
DOI:10.16490/j.cnki.issn.1001-3660.2018.04.004
中文关键词:  金刚石  紫外脉冲激光  脉冲频率  脉冲能量  光化学作用  等离子体诊断  光发射谱
英文关键词:diamond  UV pulsed laser  pulse frequency  pulse energy  photochemical effect  plasma diagnosis  OES
基金项目:国家自然科学基金(50128790);中科院百人计划,科学院装备计划项目(yz201356);河北省科技计划项目(14291110D);北京市科委(Z151100003315024)
作者单位
袁禾蔚 1.中国科学院大学,北京100049;2.电子显微技术联合实验室,北京 101408 
李佳君 1.中国科学院大学,北京100049;2.电子显微技术联合实验室,北京 101408 
刘浩 1.中国科学院大学,北京100049;2.电子显微技术联合实验室,北京 101408 
李震睿 1.中国科学院大学,北京100049;2.电子显微技术联合实验室,北京 101408 
徐锴 1.中国科学院大学,北京100049;2.电子显微技术联合实验室,北京 101408 
孙占峰 1.电子显微技术联合实验室,北京 101408;2.北京中科科仪科技股份有限公司,北京 100190 
孙雪 1.电子显微技术联合实验室,北京 101408;2.北京中科科仪科技股份有限公司,北京 100190 
陈广超 1.中国科学院大学,北京100049;2.电子显微技术联合实验室,北京 101408 
AuthorInstitution
YUAN He-wei 1.University of Chinese Academy of Sciences, Beijing 100049, China; 2.Joint Laboratory of Electron Microscope, Beijing 101408, China 
LI Jia-jun 1.University of Chinese Academy of Sciences, Beijing 100049, China; 2.Joint Laboratory of Electron Microscope, Beijing 101408, China 
LIU Hao 1.University of Chinese Academy of Sciences, Beijing 100049, China; 2.Joint Laboratory of Electron Microscope, Beijing 101408, China 
LI Zhen-rui 1.University of Chinese Academy of Sciences, Beijing 100049, China; 2.Joint Laboratory of Electron Microscope, Beijing 101408, China 
XU Kai 1.University of Chinese Academy of Sciences, Beijing 100049, China; 2.Joint Laboratory of Electron Microscope, Beijing 101408, China 
SUN Zhan-feng 1.Joint Laboratory of Electron Microscope, Beijing 101408, China; 2.KYKY Technology Co., Ltd, Beijing 100190, China 
SUN Xue 1.Joint Laboratory of Electron Microscope, Beijing 101408, China; 2.KYKY Technology Co., Ltd, Beijing 100190, China 
CHEN Guang-chao 1.University of Chinese Academy of Sciences, Beijing 100049, China; 2.Joint Laboratory of Electron Microscope, Beijing 101408, China 
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中文摘要:
      目的 对单晶金刚石进行紫外激光加工,分析紫外激光对金刚石的辐刻效果。方法 在真空环境中,采用波长248 nm(KrF)、脉冲能量500~700 mJ、脉冲频率1~9 Hz、激光功率0.5~6.3 W的脉冲激光对单晶金刚石靶材进行了辐照,并采用光发射谱(OES)对辐照过程中产生的等离子体进行了诊断,采用扫描电镜(SEM)和拉曼谱(Raman)对辐照后的金刚石进行了表征与分析。结果 激光辐照后的金刚石发生了凿刻现象,激光的辐刻速率受脉冲频率的影响显著,存在一个频率阈值,使辐刻速率不再随脉冲频率和能量发生明显变化。激光辐刻金刚石过程中产生的等离子体以C3激元为主,其余为C1和C2激元。结论 实验表明,激光在辐刻金刚石过程中产生等离子体,是造成激光脉冲频率和脉冲能量对辐刻速率具有阈值特性这一现象的主要原因。此外,紫外脉冲激光辐刻后的金刚石沟槽表面光洁,不存在明显裂纹。
英文摘要:
      The work aims to study the processing of single crystal diamond by ultraviolet laser and analyze the trench effect. In vacuum, a single crystal diamond was irradiated by a pulse laser with 248 nm(KrF) wavelength, 500~700 mJ pulse energy, 1~9 Hz pulse frequency and 0.5~6.3 W laser power. The generated plasma was diagnosed by optical emission spectrum (OES). The trenched diamond was characterized and analyzed by Raman spectrum and scan electronic microscope (SEM). The trench was found on the diamond surface after laser irradiation. The trenching rate was obviously subject to laser frequency till the pulse frequency arrived at a threshold value to keep the trenching rate unchanged as the pulse frequency and energy. The laser-induced plasma wasmainly composed of C3, while C1 and C2 were ones else. The influence of laser frequency and energy on the trenching rate ismainly due to the laser-induced plasma. Besides, the surface of the micro-groove of diamond issmooth without obvious cracks after laser trenching.
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