曹慧,张发,孟超平.钢表面纳米TiAlN 薄膜的结构表征与性能研究[J].表面技术,2016,45(10):108-113.
CAO Hui,ZHANG Fa,MENG Chao-ping.Structural Characteristics and Performance of Nano TiAlN Film Deposited on Steels[J].Surface Technology,2016,45(10):108-113 |
| 钢表面纳米TiAlN 薄膜的结构表征与性能研究 |
| Structural Characteristics and Performance of Nano TiAlN Film Deposited on Steels |
| 投稿时间：2016-03-22 修订日期：2016-10-20 |
| DOI：10.16490/j.cnki.issn.1001-3660.2016.10.017 |
| 中文关键词: 磁控溅射 TiAlN 薄膜 微观结构 摩擦磨损 纳米 显微硬度 |
| 英文关键词:magnetron sputtering TiAlN film microstructure frictional wear nano micro-hardness |
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| 中文摘要: |
| 目的 在GCr15 轴承钢和W18Cr4V 高速钢基体上制备硬质耐磨的纳米TiAlN 薄膜，以此来提高GCr15 和W18Cr4V 钢的使用寿命。方法 采用直流反应磁控溅射的方法，以氩气为工作气体，氮气为反应气体，采用反复试验并优化后的一组参数，在两种常用的钢基体上制备高质量的耐磨薄膜。通过XRF、XRD、AFM 和SEM 研究了薄膜的元素含量、表面形貌和物相组成等结构特点，借助销盘式摩擦磨损试验机研究了薄膜的摩擦磨损性能。结果 两组钢基体上薄膜的化学成分接近，Ti 和Al 元素的原子数分数之比为1:1，薄膜主要由AlN、TiN 和TiAlN 相组成，且在(111)方向具有择优生长取向，薄膜的平均晶粒尺寸分别为24.15 nm 和28.32 nm；薄膜呈现岛状生长，表面的平均粗糙度为15.8 nm 和17.6 nm，硬度值不足2500HV，摩擦系数分别为0.5 和0.4，薄膜的磨损量分别为89 μg 和56 μg。结论 薄膜结构由硬质陶瓷相组成，平均晶粒尺寸较小，薄膜的摩擦系数稳定，磨损量较小，耐磨效果较好。 |
| 英文摘要: |
| The work aims to improve the service life of GCr15 and W18Cr4V steel by preparing hard wear resistant nano-films on GCr15 bearing steel and W18Cr4V high-speed steel substrate. With argon as working gas and nitrogen as reaction gas, the high-quality wear resistant films were prepared on two common steel substrates by taking advantage of DC reactive magnetron sputtering by using a group of optimal parameters obtained by our research team from repeated tests. XRF, XRD, AFM and SEM were employed to study the structure characteristics including chemical composition, surface morphology of the films. The frictional wear properties of the films were investigated by using pin disc friction and wear testing machine. The chemical compositions of films on two groups of steel substrates were very similar, Ti and Al element content ratio was 1:1, the films were mainly composed of AlN, TiN and TiAlN, and had a preferential orientation in the (111) direction. The average grain size of films were 24.15 nm and 28.32 nm respectively. The films presented island growth, average roughness of the surface was 15.8 nm and 17.6 nm respectively while hardness was less than 2500HV. The friction coefficients were 0.5 and 0.4 respectively and abrasion loss of the films were 89 μg and 56 μg respectively. The structure of films is composed of hard ceramic phase and is provided with small average grain size and better wear-resisting effect due to stable friction coefficient and minor wear loss. |
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