陈恩,冯长杰.环境温度对磁控溅射Ti-Al-Si-N涂层摩擦学性能的影响[J].表面技术,2017,46(1):106-110.
CHEN En,FENG Chang-jie.Influence of Ambient Temperature on Tribological Property of Ti-Al-Si-N Coatings Deposited by Magnetron Sputtering[J].Surface Technology,2017,46(1):106-110 |
| 环境温度对磁控溅射Ti-Al-Si-N涂层摩擦学性能的影响 |
| Influence of Ambient Temperature on Tribological Property of Ti-Al-Si-N Coatings Deposited by Magnetron Sputtering |
| 投稿时间：2016-09-12 修订日期：2017-01-20 |
| DOI：10.16490/j.cnki.issn.1001-3660.2017.01.018 |
| 中文关键词: Ti-Al-Si-N涂层 磁控溅射 耐磨性 高温 磨损机理 |
| 英文关键词:Ti-Al-Si-N coatings magnetron sputtering wear resistance high temperature wear mechanism |
| 基金项目:国家自然科学基金（51365041） |
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| 中文摘要: |
| 目的 探索磁控溅射制备的Ti-Al-Si-N涂层在不同环境温度下的摩擦学性能。方法 利用磁控溅射技术，在AISI304不锈钢表面制备了Ti-Al-Si-N涂层，采用扫描电镜、能谱仪和X射线衍射仪研究了涂层的成分与微观结构，利用HT-1000型高温摩擦磨损试验机，以直径为5 mm的Al2O3球作为摩擦副，研究了Ti-Al-Si-N涂层在室温、200、400、600 ℃时的摩擦学性能。结果 磁控溅射制得的Ti-Al-Si-N涂层表面平整、致密，具有典型的柱状晶结构；在室温、200、400、600 ℃的环境温度下，涂层的摩擦系数分别为0.6、0.35、0.25和0.2，磨损体积分别为0.319、0.232、0.0149和0.0136 mm3。涂层的摩擦系数和磨损体积均随温度的升高而降低。结论 随着测试温度的升高，磨痕区域生成越多的以氧化钛和氧化铝为主的氧化物，其具有一定的减摩作用。在室温下，涂层的磨损机理主要为疲劳剥落，200 ℃时为磨粒磨损，400 ℃时为磨粒磨损和氧化磨损，600 ℃时主要为氧化磨损。 |
| 英文摘要: |
| The work aims to study tribological properties of magnetron sputtering-deposited Ti-Al-Si-N coatings at different ambient temperatures. Ti-Al-Si-N coatings were deposited on the surface of AISI304 stainless steel by magnetron sputtering. Composition and microstructure of the coatings were analyzed by scanning electron microscopy (SEM), energy dispersive spectroscopy (EDS) and X-ray diffractometer (XRD). Dry sliding friction experiments were carried out at room temperature, 200 ℃, 400 ℃ and 600 ℃ respectively with Al2O3 balls as friction pairs by using HT-1000 tribometer, so as to study tribological properties of Ti-Al-Si-N coatings. The prepared Ti-Al-Si-N coatings had uniform and compact columnar crystals. At RT, 200 ℃, 400 ℃ and 600 ℃, the friction coefficient was 0.6, 0.35, 0.25 and 0.2 respectively while wear volume was 0.319, 0.232, 0.0149 and 0.0136 mm3 respectively. The friction coefficient and wear volume of the coatings decreased as test temperature increased from room temperature to 600 ℃. With the increase of temperature, more oxides, mainly consisting of TiO2 and Al2O3, were produced on the wear cracks. The oxides had certain antifriction effect. Wear mechanism was mainly spalling fatigue at RT, abrasive wear at 200 ℃, oxidation wear and abrasive wear at 400 ℃, and oxidation wear at 600 ℃. |
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