吴雁,李艳峰,张而耕,赵杰.PVD涂层技术制备类金刚石薄膜及性能研究综述[J].表面技术,2016,45(8):115-123.
WU Yan,LI Yan-feng,ZHANG Er-geng,ZHAO Jie.PVD Coating Technology Preparation of Diamond-like Carbon Film and Its Performance[J].Surface Technology,2016,45(8):115-123 |
| PVD涂层技术制备类金刚石薄膜及性能研究综述 |
| PVD Coating Technology Preparation of Diamond-like Carbon Film and Its Performance |
| 投稿时间：2016-03-09 修订日期：2016-08-20 |
| DOI：10.16490/j.cnki.issn.1001-3660.2016.08.020 |
| 中文关键词: 类金刚石 摩擦系数 结合力 物理气相沉积 |
| 英文关键词:diamond-like carbon friction coefficient adhesion physical vapor deposition |
| 基金项目:上海市联盟计划资助项目（LM2014235,LM201374, LM201308）；上海市教育委员会科研创新项目（12YZ160）；上海应用技术学院研究生课程建设基金项目（101YM130007）；上海市大学青年教师培训项目（ZZyyy12003） |
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| 中文摘要: |
| 介绍了采用物理气相沉积（PVD）技术制备类金刚石涂层的方法，进而论述了涂层的摩擦磨损和结合力等性能的研究现状和发展前景。分析并综述了类金刚石涂层的技术发展，以及制备类金刚石薄膜的方法和影响其性能的多种要素。表面涂有类金刚石薄膜的工件具有较高的硬度、良好的热传导率、极低的摩擦系数、优异的电绝缘性能等。类金刚石薄膜（DLC Films）是近年来兴起的一种以sp3和sp2键的形式结合生成的亚稳态材料，因其优异的减摩和抗磨性能，在摩擦学领域获得了广泛应用，是一种与金刚石涂层性能相似的新型薄膜材料。DLC涂层的性能研究大多集中在它的摩擦学特性和结合力性能，并且作为优质的涂层材料已被广泛应用于汽车、模具、刀具等领域。 |
| 英文摘要: |
| This work introduced the method to prepare DLC coating by physical vapor deposition (PVD) and then demonstrated the current research situation and development prospect of frictional wear and adhesion performance. It analyzed and summarized the technical development of DLC coating technology as well as DLC film preparation methods and factors influencing its functions. Workpiece with DLC films had relatively high hardness, good thermal conductivity, low coefficient of friction, excellent electrical insulation properties and so on. Diamond-like carbon (DLC) film is a metastable material combining the form of sp3 and sp2 bonds that has sprung up in recent years. DLC films have been widely applied in tribological field because of excellent friction-reduction and anti-wear properties. It is a new coating with properties similar to the diamond thin film. The study of DLC coating mainly focuses on its tribological property and binding force. As high-quality coating material, the DLC film has been widely applied in various fields such as automobile, mould, tools etc. |
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