欧文敏,韦春贝,代明江,侯惠君,林松盛,邱万奇.MoS2-Zr复合薄膜的摩擦学性能研究[J].表面技术,2017,46(1):93-99.
OU Wen-min,WEI Chun-bei,DAI Ming-jiang,HOU Hui-jun,LIN Song-sheng,QIU Wan-qi.Tribological Properties of MoS2-Zr Composite Films[J].Surface Technology,2017,46(1):93-99 |
| MoS2-Zr复合薄膜的摩擦学性能研究 |
| Tribological Properties of MoS2-Zr Composite Films |
| 投稿时间：2016-09-03 修订日期：2017-01-20 |
| DOI：10.16490/j.cnki.issn.1001-3660.2017.01.016 |
| 中文关键词: MoS2-Zr复合薄膜 磁控溅射 微观结构 硬度 结合力 摩擦系数 |
| 英文关键词:MoS2-Zr composite films magnetron sputtering microstructure hardness adhesion friction coefficient |
| 基金项目:广州市科技计划项目（201510010016）；广东省科技计划项目（2013B091602002、2014B070706026、2013B061800053）；广东省科学院平台建设项目（2016GDASPT-0206、2016GDASPT-0317） |
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| Author | Institution |
| OU Wen-min | 1.School of Materials Science and Engineering, South China University of Technology, Guangzhou 510640, China; 2.Guangdong Institute of New Materials, National Engineering Laboratory for Modern Materials Surface Engineering Technology, Key Lab of Guangdong for Modern Surface Engineering Technology, Guangzhou 510651, China |
| WEI Chun-bei | Guangdong Institute of New Materials, National Engineering Laboratory for Modern Materials Surface Engineering Technology, Key Lab of Guangdong for Modern Surface Engineering Technology, Guangzhou 510651, China |
| DAI Ming-jiang | Guangdong Institute of New Materials, National Engineering Laboratory for Modern Materials Surface Engineering Technology, Key Lab of Guangdong for Modern Surface Engineering Technology, Guangzhou 510651, China |
| HOU Hui-jun | Guangdong Institute of New Materials, National Engineering Laboratory for Modern Materials Surface Engineering Technology, Key Lab of Guangdong for Modern Surface Engineering Technology, Guangzhou 510651, China |
| LIN Song-sheng | Guangdong Institute of New Materials, National Engineering Laboratory for Modern Materials Surface Engineering Technology, Key Lab of Guangdong for Modern Surface Engineering Technology, Guangzhou 510651, China |
| QIU Wan-qi | School of Materials Science and Engineering, South China University of Technology, Guangzhou 510640, China |
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| 中文摘要: |
| 目的 改善MoS2薄膜的疏松结构，提高其硬度及摩擦磨损性能。方法 采用离子源辅助磁控溅射技术在GCr15基体上沉积不同Zr含量的MoS2-Zr复合薄膜，通过SEM分析薄膜的表面及截面形貌。采用EDS检测薄膜的成分，采用显微维氏硬度计测试薄膜的硬度，采用Rockwell-C硬度计进行压痕测试实验，采用球-盘式旋转摩擦磨损试验机评价薄膜的摩擦磨损性能。结果 MoS2-Zr复合薄膜的致密程度和硬度随着Zr含量的增加而增大，其硬度值为300~500HV。复合薄膜与基体的结合力随着Zr含量的增加而增强，但当Zr含量过高时，结合力下降。含Zr原子数分数为15%的MoS2-Zr复合薄膜具有最好的摩擦学性能，其平均摩擦系数为0.09，磨损率为9.33×107 mm3•N–1•m–1，耐磨寿命达5.25×105 r。结论 Zr的掺杂改善了纯MoS2薄膜的疏松结构，提高了MoS2薄膜的硬度和结合力，合适的Zr掺杂可以获得较低的摩擦系数和较长的耐磨寿命。 |
| 英文摘要: |
| The work aims to improve loose structure, hardness, friction and wear properties of MoS2 films. MoS2-Zr composite films with different Zr content were deposited on GCr15 substrate by ion assisted magnetron sputtering technology. Morphology of surface and cross section of films was analyzed by SEM; composition was determined by EDS; hardness by Micro Vickers tester; indentation test was performed by Rockwell-C hardness tester; friction and wear properties of the films were evaluated by ball-disk rotating friction and wear tester. The compactness and hardness of MoS2-Zr composite films increased with the increase of Zr content with hardness value ranging from 300~500HV. The adhesion strength between composite film and substrate increased with the increase of Zr content and decreased in case of excessive Zr content. The MoS2-Zr composite films with 15 at.% Zr content showed the best tribological properties, their average friction coefficient was 0.09, wear rate 9.33×107 mm3•N–1•m–1 and wear life 5.25×105 r. Loose structure, hardness and adhesion strength of MoS2-Zr composite films were improved. Lower friction coefficient and longer wearing life can be obtained provided with appropriate Zr doping content. |
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