黄元盛,蔡铭洪,叶均蔚.AlCoCrCu0.5 NiFe 高熵合金氧化物薄膜光学特性的研究[J].表面技术,2016,45(2):129-133.
HUANG Yuan-sheng,CAI Ming-hong,YE Jun-wei.Optical Properties of Sputtered Oxide Films of AlCoCrCu0. 5NiFe High-entropy Alloy[J].Surface Technology,2016,45(2):129-133
AlCoCrCu0.5 NiFe 高熵合金氧化物薄膜光学特性的研究
Optical Properties of Sputtered Oxide Films of AlCoCrCu0. 5NiFe High-entropy Alloy
投稿时间:2015-11-29  修订日期:2016-02-20
DOI:10.16490/j.cnki.issn.1001-3660.2016.02.020
中文关键词:  高熵合金  氧化物  薄膜  折射率  吸收系数  膜厚
英文关键词:high-entropy alloy  oxide  film  refractive index  absorption index  film thickness
基金项目:广东省科技计划项目(2012B010200047);广东省自然科学基金项目(2014A030313784);江门市科技计划项目(2014-2016)
作者单位
黄元盛 江门职业技术学院 材料技术系, 广东 江门 529090 
蔡铭洪 新竹清华大学 材料科学与工程系, 台湾 新竹 300 
叶均蔚 新竹清华大学 材料科学与工程系, 台湾 新竹 300 
AuthorInstitution
HUANG Yuan-sheng Department of Materials Technology, Jiangmen Polytechnic, Jiangmen 529090, China 
CAI Ming-hong Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 300, China 
YE Jun-wei Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 300, China 
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中文摘要:
      目的 制备 AlCoCrCu0. 5NiFe 高熵合金氧化物薄膜,并对其光学性能进行表征。 方法 使用磁控溅射设备在单晶硅片和玻璃上制备 AlCoCrCu0. 5NiFe 高熵合金氧化物薄膜,并对膜进行退火处理。 使用椭圆偏振光谱仪对薄膜的光学特性进行分析。 结果 随着氧含量的增加,折射系数减小。 当光波长为633 nm 时,折射系数为 1. 69 ~2. 40。 当氧分压为 10% ,折射率色散曲线在 475 nm 和 600 nm 处出现拐点,在 600 nm 之后折射率随着波长的增大而逐渐减小。 当氧分压为 30% 时,折射率曲线在 500 nm 和600 nm 处出现拐点,在 600 nm 后折射率趋于稳定。 当氧分压为 50% 时,折射率曲线在 525 nm 处出现拐点,之后折射率随波长的增大而逐渐增大。 在 450 ~ 550 nm 波段内,AlCoCrCu0. 5FeNi 氧化物薄膜的吸收系数随氧分压的增加而增加。 在 550 ~850 nm 波段内,薄膜的吸收系数随工作气压的变化趋势不明显。随着氧分压的增加膜的颜色逐渐变深。 经过退火处理后,膜的颜色进一步加深。 在相同工艺参数的情况下,氧的分压增加,膜厚减小。 结论 适当减小氧分压,能获得具有高折射率的 AlCoCrCu0. 5FeNi 氧化物薄膜。 不同的分压下,AlCoCrCu0. 5FeNi 氧化物薄膜的吸收系数随波长的增加均存在一个拐点,并且随氧分压的增加,拐点的波长减小。 氧含量增加导致氧化物薄膜厚度减小,颜色加深。
英文摘要:
      Objective To synthesize the oxide films of AlCoCrCu0. 5NiFe high-entropy alloy and characterize their optical properties. Methods The sputtered oxide films of AlCoCrCu0. 5NiFe high-entropy alloy were deposited on the silicon wafer and glass using radio frequency sputter system, and were subsequently annealed. Ellipsometer was employed to analyze thickness, refractive index ( n) and absorption index (k). Results The refractive index n decreased with the oxygen concentration. When the wavelength was 633 nm, n varied between 1. 69 and 2. 40. At the oxygen concentration of 10% , the curve of refractive index had inflection points at the wavelengths of both 475 nm and 600 nm. After 600 nm, n value decreased with the increase of wavelength. At 30% oxygen, the curve of refractive index had inflection points at 500 nm and 600 nm. After that, the change of n value was minor. At 50% ox-ygen, there was an inflection point on the refractive-index curve at the wavelength of 525 nm. After that, n value increased with the increase of wavelength. The absorption index of AlCoCrCu0. 5 FeNi oxide film increased with the increase of oxygen concentration in the wavelength of between 450 nm and 550 nm. k value changed less obviously between 550 nm and 850 nm wavelengths. The film color became deeper with the increase of oxygen concentration. After the film was annealed at different temperatures, the film color became even deeper. The film thickness decreased with the increase of the oxygen concentration. Conclusion Decreasing oxygen concentration resulted in oxide films of AlCoCrCu0. 5 NiFe high-entropy alloy with high refractive index. There was an inflection point in the absorption index curves of different oxygen concentrations. With oxygen concentration increasing, the wavelength value of the inflection point decreased, the film thickness increased, and the film color became deeper.
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