曾华智,王海,沈军.梯度基体负偏压真空多弧离子镀沉积 TiN 涂层及其力学性能[J].表面技术,2016,45(2):79-83.
ZENG Hua-zhi,WANG Hai,SHEN Jun.Arc Ion Plating with Gradient Bias Voltage Deposition and Mechanical Properties of TiN Coatings[J].Surface Technology,2016,45(2):79-83
梯度基体负偏压真空多弧离子镀沉积 TiN 涂层及其力学性能
Arc Ion Plating with Gradient Bias Voltage Deposition and Mechanical Properties of TiN Coatings
投稿时间:2016-01-05  修订日期:2016-02-20
DOI:10.16490/j.cnki.issn.1001-3660.2016.02.012
中文关键词:  多弧离子镀  TiN  梯度涂层  纳米压痕  纳米划痕  力学性能
英文关键词:arc ion plating  TiN  gradient coating  nanoindentation  nano-scratch  mechanical property
基金项目:
作者单位
曾华智 同济大学 材料科学与工程学院, 上海 201804 
王海 同济大学 材料科学与工程学院, 上海 201804 
沈军 同济大学 材料科学与工程学院, 上海 201804 
AuthorInstitution
ZENG Hua-zhi College of Materials Science and Engineering, Tongji University, Shanghai 201804, China 
WANG Hai College of Materials Science and Engineering, Tongji University, Shanghai 201804, China 
SHEN Jun College of Materials Science and Engineering, Tongji University, Shanghai 201804, China 
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中文摘要:
      目的 通过梯度基体负偏压沉积工艺,获得综合性能优良的 TiN 涂层。 方法 采用多弧离子镀工艺,在 0 ~ -180 V 连续变化的梯度基体负偏压参数下沉积梯度 TiN 涂层。 通过 X 射线衍射仪和扫描电子显微镜对涂层的物相结构和形貌进行分析,通过纳米压痕和纳米划痕对涂层的力学性能进行系统研究。 结果 与无梯度沉积的涂层相比,梯度基体负偏压沉积 TiN 涂层的(111)晶面衍射峰减小,厚度增加,表明涂层的沉积速率增大。 经测试,梯度涂层的断裂临界载荷 Lc2 =215. 21 mN,硬度值 H=31. 2 GPa,弹性模量 E=498 GPa,塑性变形临界载荷 Ly = 81. 65 mN;无梯度沉积涂层的 Lc2 = 248. 63 mN,H = 29. 6GPa,E=452 GPa,Ly =23. 39 mN。 二者相比之下,梯度涂层虽然断裂临界载荷有所减小,但硬度值和弹性模量均有所增大,并且塑性增大,塑性变形临界载荷大幅增加,综合力学性能提高。 结论 梯度基体负偏压沉积工艺改变了常规的单一参数设置,在沉积过程中,基体负偏压对涂层生长的影响不断改变,获得的涂层具有结构上的梯度变化,从而力学性能得到了改善。
英文摘要:
      Objective To obtain TiN coatings with excellent comprehensive performance through gradient bias voltage deposition. Methods Gradient TiN coatings were deposited by arc ion plating with gradient bias voltage through 0 V to -180 V. Coating phase structure and morphology were analyzed through X-ray diffraction and scanning electron microscope. The mechanical properties were investigated through nanoindentation and nano-scratch test. Results Compared with the constant bias voltage coatings, the intensity of the (111) peak decreased in the gradient bias voltage coatings. The thickness of the coatings decreased, which indicated that the deposition rate was increased. The testing results showed as below. The gradient bias voltage coatings had the Lc2 of 215. 21 mN, the hardness of 31. 2 GPa, the elastic modulus of 498 GPa and the Ly of 81. 65 mN. The constant bias voltage coatings had the Lc2 of 248. 63 mN, the hardness of 29. 6 GPa, the elastic modulus of 452 GPa and the Ly of 23. 39 mN. Even though the Lc2 of the gradient bias voltage coatings decreased, the hardness, the elastic modulus and the plasticity increased, and the (Ly) increased greatly. A TiN coating with excellent comprehensive performance was achieved. Conclusion The gradient bias voltage deposition method was used to change the single parameter setting. The gradient bias voltage changed the influence of the coating growth continually during deposition, which made the obtained coatings have a gradient change in the structure. Thus, the mechanical properties were improved.
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