张文勇,孙德恩,裴晨蕊,张世宏,黄佳木.调制周期对 CrAlN / ZrN 纳米多层膜韧性的影响[J].表面技术,2016,45(1):55-61.
ZHANG Wen-yong,SUN De-en,PEI Chen-rui,ZHANG Shi-hong,HUANG Jia-mu.Effect of Modulation Period on Toughness of CrAlN/ ZrN Nano-multilayer Films[J].Surface Technology,2016,45(1):55-61
调制周期对 CrAlN / ZrN 纳米多层膜韧性的影响
Effect of Modulation Period on Toughness of CrAlN/ ZrN Nano-multilayer Films
投稿时间:2015-10-19  修订日期:2016-01-20
DOI:10.16490/j.cnki.issn.1001-3660.2016.01.009
中文关键词:  CrAlN/ ZrN 纳米多层膜  磁控溅射  调制周期  硬度  韧性
英文关键词:CrAlN / ZrN nano-multilayers  magnetron sputtering  modulation period  hardness  toughness
基金项目:中央高校基本科研业务费科研专项理工类跨学科项目资助(CDJZR14135502);重庆市基础与前沿研究计划项目(cstc2015jcyjA70005)
作者单位
张文勇 重庆大学 材料科学与工程学院, 重庆 400030 
孙德恩 重庆大学 材料科学与工程学院, 重庆 400030 
裴晨蕊 重庆大学 材料科学与工程学院, 重庆 400030 
张世宏 安徽工业大学 材料科学与工程学院, 安徽 马鞍山 243011 
黄佳木 重庆大学 材料科学与工程学院, 重庆 400030 
AuthorInstitution
ZHANG Wen-yong College of Materials Science and Engineering, Chongqing University, Chongqing 400030, China 
SUN De-en College of Materials Science and Engineering, Chongqing University, Chongqing 400030, China 
PEI Chen-rui College of Materials Science and Engineering, Chongqing University, Chongqing 400030, China 
ZHANG Shi-hong College of Materials Science and Engineering,Anhui University of Technology, Maanshan 243011, China 
HUANG Jia-mu College of Materials Science and Engineering, Chongqing University, Chongqing 400030, China 
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中文摘要:
      目的 研究调制周期对纳米多层膜性能的影响。 方法 采用磁控溅射方法制备了 CrAlN 与 ZrN的固定厚度比为 2. 6,不同调制周期(撰 为 6,8,10,20 nm)的 CrAlN/ ZrN 纳米多层膜。 利用场发射扫描电镜(FESEM)表征薄膜的形貌、结构。 用 Dektak150 型台阶仪测薄膜表面粗糙度。 用 Agilent TechnologiesG200 纳米压痕仪检测涂层的硬度和弹性模量。 用划痕仪测薄膜/ 基材的结合力,同时,引入抗裂纹扩展系数(CPR)表征纳米多层膜的韧性。 结果 CrAlN/ ZrN 纳米多层膜断面皆为穿晶柱状结构, 调制周期为20 nm 时,多层膜层与层之间的界面清晰;多层膜表面呈致密的花椰菜状,厚度均约为 2 μm。 调制周期为8 nm 时,硬度为 20. 4 GPa,进一步增大调制周期,硬度下降。 调制周期为 8 nm 的多层膜临界载荷 Lc2为18 N,CPR 值为 73. 2,Lc2与 CPR 值均高于其他调制周期的多层膜。 在临界载荷 Lc2处,裂纹扩展导致薄膜发生了严重的片状剥落,露出了亮白的热轧钢基底,薄膜失去了保护作用。 结论 实验表明,在多层膜厚度、调制比不变的条件下,改变调制周期能够改变多层膜的韧性。 随着调制周期的增大,韧性呈先上升、后下降的趋势。 调制周期为 8 nm 时,纳米多层膜的硬度最高,韧性最好,综合性能良好。
英文摘要:
      Objective To study the effect of modulation period on the properties of nano-multilayers. Methods CrAlN/ ZrN nano-multilayers were deposited with different modulation periods in a magnetron sputtering system, fixing the layer thickness ratio CrAlN : ZrN as 2. 6. To characterize the morphology and structure of the films, the field emission scanning electron microscopy (FESEM) was used. The Dektak 150 surface profiler was used to measure the coatings' roughness. Agilent Technologies G200 nanoindentation was used to test the coatings' hardness and elastic modulus. Automatic scratch tester was used to measure film critical loads. The toughness of the films was characterized by CPR (crack propagation resistances). Results CrAlN / ZrN nano-multi-layers' sections were transgranular columnar structure. When the modulation period was 20 nm, the distinction between layer and layer was clear. The surface of nano-multilayers was dense like the cauliflower. The thickness of nano-multilayers was about 2 microns. When the modulation period was 8 nm, the hardness was 20. 4 GPa. After further increasing the modulation period, the hardness decreased. The critical load Lc2 was 18 N, CPR number was 73. 2, when the modulation period was 8 nm. The nano-mul-tilayer's critical load Lc2 and CPR number were higher than other nano-multilayers. At the critical load Lc2 , the coatings were peeled off as the result of crack propagation. And the bright white hot rolled steel substrate was exposed and the nano-multilayers lost the protective effect to substrates. Conclusion Changing the modulation period will affect the nano-multilayer coating's toughness under the condition, keeping the multilayer coat's thickness and modulation ratio invariable. With the increase of modulation period, toughness properties is improved then descended. The film has the highest hardness and toughness and gets the best comprehensive performance when the modulation period is 8 nm.
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