施文彦,蒋百灵,李洪涛.过渡层结构对类石墨镀层结合强度的影响[J].表面技术,2016,45(1):41-48.
SHI Wen-yan,JIANG Bai-ling,LI Hong-tao.Effects of Transaction Layer Structure on Bonding Strength of GLC Films[J].Surface Technology,2016,45(1):41-48 |
| 过渡层结构对类石墨镀层结合强度的影响 |
| Effects of Transaction Layer Structure on Bonding Strength of GLC Films |
| 投稿时间：2015-10-21 修订日期：2016-01-20 |
| DOI：10.16490/j.cnki.issn.1001-3660.2016.01.007 |
| 中文关键词: 磁控溅射 GLC 镀层 结合强度 过渡层结构 划痕法 压痕法 |
| 英文关键词:magnetron sputtering GLC films bonding strength transition layer structure scratch test Rockwell indentation |
| 基金项目:国家自然科学基金(51401106);江苏高校自然科学研究项目(12KJB430008);江苏省自然科学基金(BK2013095) |
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| 中文摘要: |
| 目的 探究过渡层沉积时间和结构对类石墨镀层结合强度的影响规律。 方法 采用微弧离子镀技术,改变梯度层沉积时间,制备不同的类石墨镀层。 利用扫描电子显微镜(SEM)分析镀层的微观形貌,利用截面能谱扫描分析镀层中梯度层结构变化。 采用压痕法和划痕法对镀层与基体的结合强度进行评价。 采用维氏硬度计测试镀层的显微硬度,并利用针盘式摩擦磨损试验机测定镀层的摩擦系数。 结果随着梯度层沉积时间的延长,镀层与基体的结合强度呈先上升、后下降的变化趋势,在过渡层沉积时间为20 min 时,结合强度最高,约为46 N。 此外,随着过渡层沉积时间的延长,镀层摩擦系数逐渐下降,但显微硬度下降,承载能力减弱,摩擦磨损寿命下降。 结论 合理调控过渡层沉积时间有助于类石墨镀层结合强度的提升,镀层的摩擦磨损寿命随着过渡层时间的延长而呈现先上升、后下降的趋势,高结合强度使得膜基界面的结合寿命延长。 |
| 英文摘要: |
| Objective To explore the influencing law of transaction layer deposition time and structure on the bonding strength of the GLC films. Methods Different GLC (Graphite-Like Carbon) films were synthesized by the micro-arc ion plating technology with varied gradient layer deposition time. The microstructure of the coating was characterized by scanning electron microscopy (SEM). The scanning of cross-sectional energy spectrum was used to analyze the variation of gradient layer structure. The bonding strength between the film and the substrate was determined by the scratch and indentation methods. The micro-hardness of the film was tested using Vickers hardness tester, and the friction coefficient of the films was measured by pin-on-disc friction and wear tester. Results When the deposition time of transition layer was 20 min, the bond strength reached 46 N. With the increasing transition layer deposition time, the bond strength of the films first increased and then decreased. The content of chromium increased with the increasing transition layer deposition time, while the hardness of GLC films decreased with the slowing down of gradient layer structure. The friction coefficient and the lifetime of the films decreased with the increasing transaction layer deposition time. Conclusion Reasonable transition deposition period was helpful to improve the bonding strength of the GLC coating. The friction and wear life of the coating first increased and then decreased with the increasing transaction layer deposition time. High bonding strength was helpful to increase the adhesive life between the film and substrate. |
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