熊礼威,彭环洋,汪建华,崔晓慧,龚国华.甲烷体积分数对纳米金刚石薄膜形貌的影响[J].表面技术,2016,45(3):72-77.
XIONG Li-wei,PENG Huan-yang,WANG Jian-hua,CUI Xiao-hui,GONG Guo-hua.Effect of methane concentration on the morphology of nanocrystalline diamond films[J].Surface Technology,2016,45(3):72-77 |
| 甲烷体积分数对纳米金刚石薄膜形貌的影响 |
| Effect of methane concentration on the morphology of nanocrystalline diamond films |
| 投稿时间：2015-12-07 修订日期：2016-03-20 |
| DOI：10.16490/j.cnki.issn.1001-3660.2016.03.012 |
| 中文关键词: 纳米金刚石薄膜 MPCVD 晶粒尺寸 表面粗糙度 甲烷浓度 表面形貌 |
| 英文关键词:Nanocrystalline diamond film MPCVD Grain size surface roughness methane concentration Surface morphology |
| 基金项目:国家自然科学(51402220)；武汉工程大学青年(Q201501) |
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| Author | Institution |
| XIONG Li-wei | School of Materials Science and Engineering, Wuhan Institute of Technology, Wuhan 430074, China |
| PENG Huan-yang | School of Materials Science and Engineering, Wuhan Institute of Technology, Wuhan 430074, China |
| WANG Jian-hua | School of Materials Science and Engineering, Wuhan Institute of Technology, Wuhan 430074, China |
| CUI Xiao-hui | School of Materials Science and Engineering, Wuhan Institute of Technology, Wuhan 430074, China |
| GONG Guo-hua | School of Materials Science and Engineering, Wuhan Institute of Technology, Wuhan 430074, China |
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| 中文摘要: |
| 目的 研究不同甲烷浓度对NCD薄膜生长的影响,实现较小晶粒尺寸、高平整度的NCD薄膜的制备。 方法 采用微波等离子体增强化学气相沉积的方法制备NCD薄膜,以CH4和H2为气源,在生长阶段控制其它条件不变的前提下,探讨不同甲烷浓度对NCD晶粒尺寸、表面形貌以及表面粗糙度的影响。采用SEM、XRD等观测NCD薄膜的表面形貌和晶粒尺寸大小,并利用Raman对NCD薄膜的不同散射峰进行了分析。结果 随着甲烷浓度的增加,薄膜晶粒尺寸有减小的趋势,在低甲烷浓度时,晶形比较完整,但致密度较小,在高甲烷浓度时,晶形杂乱无章,但致密度较好,当甲烷浓度为9%时最小平均粒径为21.3nm,表面粗糙度较好,但非晶金刚石成分开始大量生成,NCD薄膜质量开始变差,而其形貌在甲烷浓度为8%时最好且此时最小表面粗糙度小于20nm,通过Raman分析可知NCD薄膜中出现了硅峰和石墨烯特征峰。 结论 甲烷浓度对NCD薄膜形貌有较大的影响,甲烷浓度为8%时是表面平整度由较差变好再逐渐变差的分界点,在甲烷浓度为8%时,平均晶粒尺寸为23.6nm,薄膜表面具有较好平整度。 |
| 英文摘要: |
| Objective To study the effect of different methane concentrations on the growth of nanocrystalline diamond films, and to realize the preparation of NCD thin films with smaller grain size and Gaoping integer. Method Nanocrystalline diamond thin films were prepared by microwave plasma enhanced chemical vapor deposition method. The effects of different concentrations of methane on the grain size, surface morphology and surface roughness of nanocrystalline diamond films were discussed with CH4 and H2 as the gas source and other conditions. The surface morphology and grain size of nanocrystalline diamond films were observed by SEM and XRD, and the scattering peaks were analyzed by Raman. Results With the increase of methane concentration, the grain size of the films is decreased, in low methane concentration, |
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