宋沂泽.多弧离子镀负偏压对氮化钛薄膜的影响研究[J].表面技术,2015,44(11):1-6,28.
.Application Research on Negative bias"s Influence on binding TiN Film Deposited by Multi-arc Ion Plating[J].Surface Technology,2015,44(11):1-6,28 |
| 多弧离子镀负偏压对氮化钛薄膜的影响研究 |
| Application Research on Negative bias"s Influence on binding TiN Film Deposited by Multi-arc Ion Plating |
| 投稿时间：2015-09-20 修订日期：2015-10-30 |
| DOI： |
| 中文关键词: 多弧离子镀 氮化钛 偏压 耐磨性 结合力 硬度 |
| 英文关键词:MAIP TiN negative bias voltage wear resistance fording force hardness |
| 基金项目:国家自然科学基金资助项目(51264007);国家自然科学基金青年基金(51201043);广西科学研究与技术开发科技攻关计划(12118020-2-2-1);广西信息材料重点实验室(桂林电子科技大学)资助(1210908-10-Z);桂林电子科技大学-桂林电科院研究生联合培养基地专项经费资助(20121225-10-Z; 20121225-03-Z) |
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| 中文摘要: |
| 在4Cr13不锈钢表面制备TiN薄膜,通过改变负偏压,探讨偏压对薄膜的表面质量、结构、硬度、结合力和摩擦系数的影响。结果表明：负偏压对薄膜的表面质量影响较大。偏压为0 V时,TiN薄膜表面凹凸不平,液滴较多。随着偏压的升高,薄膜表面变得光滑,液滴的尺寸和数量都减小,致密性也得到提高；TiN薄膜在不同偏压下均体现出了在(111)晶面的择优取向,但随着偏压的增大,这种择优取向逐渐减弱,当偏压达到400V时,薄膜在(220)晶面的峰值逐渐增强；当偏压在0 V-400 V之间变化时,薄膜的硬度先增大后减小,当偏压为300 V时,薄膜硬度达到最大值2650 HV；超过300 V时,薄膜的硬度开始降低；当偏压为200 V时,薄膜的结合力为42 N左右；偏压为300 V时,薄膜结合力最大为58 N,偏压为400 V时,薄膜的结合力反而出现下降,为42 N；当偏压为：0V、200V、300V、400V时：平均摩擦系数分别为：0.66、0.55、0.48和0.5；适当的偏压可以提高薄膜的硬度、结合力、耐磨性等性能,当偏压为300 V时,薄膜的各项性能达到最佳。 |
| 英文摘要: |
| TiN coatings were deposited with different negative bias voltage on 4Cr13 stainless steel. The effect of negative bias voltage on the surface microstructure, hardness, phase structure, binding force of the coatings was investigated. Results showed that negative bias voltage can obviously improve the surface quality of the TiN. There are many droplet, larger particles and a few pits with no negative bias voltage. With the rising of the bias voltage, the number and size of droplet on the film surface were reduced, and the coatings surface becomes smooth and density is also improved; TiN film at different bias voltage all reflects in preferred orientation in (111) crystal plane, but with the increase of bias voltage, the preferred orientation gradually diminishes with bias voltage, when the bias voltage is 400 V, the film in the peak of (220) crystal plane gradually strengthened; When the bias changes between 0V and 400V, hardness of coatings first increases then decrease, when the bias is 300V, the biggest hardness achieve to 2650 HV; More than 300 V, the hardness began to decrease; the fording force increases with the increase of bias voltage, but to a certain extent, began to reduce. When the bias voltage is 200 V, the fording force is about 42 N, the bias is 300 V, the bonding force is the largest 58 N, but the bias is 400 V, the fording force film fall to 42 N; When the bias is respectively: 0 V, 200 V, 300 V, 400 V: the average friction coefficient is respectively: 0.66, 0.55, 0.48 and 0.5; Proper bias voltage can improve the hardness, fording force, abrasion resistance of coatings; when the bias voltage is 300 V, the various properties of the film is the best. |
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