张欢,马宗敏,谢艳娜,唐军,石云波,薛晨阳,刘俊,李艳君.新型 AFM 原子分辨率导电探针技术研究[J].表面技术,2015,44(2):115-118.
ZHANG Huan,MA Zong-min,XIE Yan-na,TANG Jun,SHI Yun-bo,XUE Chen-yang,LIU Jun,LI Yan-jun.Development of a Novel Conductive Probe at Atomic Resolution in UHV-AFM[J].Surface Technology,2015,44(2):115-118
新型 AFM 原子分辨率导电探针技术研究
Development of a Novel Conductive Probe at Atomic Resolution in UHV-AFM
投稿时间:2014-09-15  修订日期:2015-02-20
DOI:10.16490/j.cnki.issn.1001-3660.2015.02.022
中文关键词:  导电薄膜  Si 探针  原子分辨率  磁交换力显微镜
英文关键词:conductive film  si probe  atomic resolution  MExFM
基金项目:国家自然科学基金重点支持项目(91336110);国家自然科学基金杰出青年基金(51225504);国家自然科学基金(61274103)
作者单位
张欢 1. 中北大学 电子测试技术重点实验室,太原 030051; 2. 中北大学 仪器科学与动态测试教育部重点实验室, 太原 030051;3. 中北大学 仪器与电子学院, 太原 030051; 
马宗敏 1. 中北大学 电子测试技术重点实验室,太原 030051; 2. 中北大学 仪器科学与动态测试教育部重点实验室, 太原 030051;3. 中北大学 仪器与电子学院, 太原 030051; 
谢艳娜 1. 中北大学 电子测试技术重点实验室,太原 030051; 2. 中北大学 仪器科学与动态测试教育部重点实验室, 太原 030051;3. 中北大学 仪器与电子学院, 太原 030051; 
唐军 1. 中北大学 电子测试技术重点实验室,太原 030051; 2. 中北大学 仪器科学与动态测试教育部重点实验室, 太原 030051;3. 中北大学 仪器与电子学院, 太原 030051; 
石云波 1. 中北大学 电子测试技术重点实验室,太原 030051; 2. 中北大学 仪器科学与动态测试教育部重点实验室, 太原 030051;3. 中北大学 仪器与电子学院, 太原 030051; 
薛晨阳 1. 中北大学 电子测试技术重点实验室,太原 030051; 2. 中北大学 仪器科学与动态测试教育部重点实验室, 太原 030051;3. 中北大学 仪器与电子学院, 太原 030051; 
刘俊 1. 中北大学 电子测试技术重点实验室,太原 030051; 2. 中北大学 仪器科学与动态测试教育部重点实验室, 太原 030051;3. 中北大学 仪器与电子学院, 太原 030051; 
李艳君 大阪大学 工学研究科精密科学应用物理学专攻, 日本 大阪 565-0871 
AuthorInstitution
ZHANG Huan 1. National Key Laboratory for Electronic Measurement Technology, North University of China, Taiyuan 030051, China;2. Key Laboratory of Instrumentation Science & Dynamic Measurement, North University of China, Ministry of Education,Taiyuan 030051, China; 3. School of Instruments and Electronics, North University of China, Taiyuan 030051, China; 
MA Zong-min 1. National Key Laboratory for Electronic Measurement Technology, North University of China, Taiyuan 030051, China;2. Key Laboratory of Instrumentation Science & Dynamic Measurement, North University of China, Ministry of Education,Taiyuan 030051, China; 3. School of Instruments and Electronics, North University of China, Taiyuan 030051, China; 
XIE Yan-na 1. National Key Laboratory for Electronic Measurement Technology, North University of China, Taiyuan 030051, China;2. Key Laboratory of Instrumentation Science & Dynamic Measurement, North University of China, Ministry of Education,Taiyuan 030051, China; 3. School of Instruments and Electronics, North University of China, Taiyuan 030051, China; 
TANG Jun 1. National Key Laboratory for Electronic Measurement Technology, North University of China, Taiyuan 030051, China;2. Key Laboratory of Instrumentation Science & Dynamic Measurement, North University of China, Ministry of Education,Taiyuan 030051, China; 3. School of Instruments and Electronics, North University of China, Taiyuan 030051, China; 
SHI Yun-bo 1. National Key Laboratory for Electronic Measurement Technology, North University of China, Taiyuan 030051, China;2. Key Laboratory of Instrumentation Science & Dynamic Measurement, North University of China, Ministry of Education,Taiyuan 030051, China; 3. School of Instruments and Electronics, North University of China, Taiyuan 030051, China; 
XUE Chen-yang 1. National Key Laboratory for Electronic Measurement Technology, North University of China, Taiyuan 030051, China;2. Key Laboratory of Instrumentation Science & Dynamic Measurement, North University of China, Ministry of Education,Taiyuan 030051, China; 3. School of Instruments and Electronics, North University of China, Taiyuan 030051, China; 
LIU Jun 1. National Key Laboratory for Electronic Measurement Technology, North University of China, Taiyuan 030051, China;2. Key Laboratory of Instrumentation Science & Dynamic Measurement, North University of China, Ministry of Education,Taiyuan 030051, China; 3. School of Instruments and Electronics, North University of China, Taiyuan 030051, China; 
LI Yan-jun Department of Applied Physics, Osaka University, Osaka 565-0871, Japan 
摘要点击次数:
全文下载次数:
中文摘要:
      目的 制备新型导电探针,解决目前探针针尖曲率半径较粗、饱磁力大、调频困难、不容易得到高分辨图像等问题。 方法 向 Si 探针针尖蒸镀导电金属薄膜得到导电薄膜 Si 探针,镀 Fe 薄膜厚度约为几纳米,同时保证探针的曲率半径约 10 nm。 利用透射电镜观察和超高真空原子力显微镜扫描镀膜前后探针 NaCl(001)表面,分析其性能。 结果 自制的 Fe 薄膜 Si 探针由于蒸镀了金属薄膜,探针针尖性能稳定,Si 探针扫描效果的悬挂键影响被消除,同时提高了系统的扫描分辨率。 结论 导电薄膜 Si 探针能够充分利用现有的仪器设备进行实验,具有造价低、使用简单、性能稳定等优点,可以作为将来磁交换力显微镜(MExFM)的磁性探针来测试材料的表面磁信息。
英文摘要:
      Objective To prepare a novel conductive probe to solve the existing problems such as the relatively large curvature radius of the tip of the conductive cantilever, high saturated magnetic force, low resolution and bad modulation. Methods A conductive film Si probe was obtained by evaporating of the Si probe tip with conductive metal thin film, the thickness of the Fe film was only a few nanometers, and meanwhile the curvature radius was ensured to be around 10 nm. The probe NaCl(001) surface before and after coating was observed and scanned by TEM and UHV-AFM, respectively, and the properties were analyzed. Results Because of the metal thin film evaporation, the home-built Fe thin film Si probe had a stable probe tip performance, and the hanging key effect of Si probe scanning was eliminated. At the same time, the scanning resolution of the system was elevated. Conclusion Conductive film Si probe made full use of existing equipments for experiments. It has advantages such as low cost, easy to use and stable performance. It can be used as an important tool for the magnetic exchange force measurements in spin research at atomic resolution in the future.
查看全文  查看/发表评论  下载PDF阅读器
关闭

关于我们 | 联系我们 | 投诉建议 | 隐私保护 | 用户协议

您是第13594295位访问者    渝ICP备15012534号-3

版权所有:《表面技术》编辑部 2014 surface-techj.com, All Rights Reserved

邮编:400039 电话:023-68792193传真:023-68792396 Email: wjqkbm@163.com

渝公网安备 50010702501715号