黄红光,郭钟宁,王冠.模具钢微细蚀刻的侧蚀研究及其工艺优化[J].表面技术,2013,42(6):44-47.
HUANG Hong-guang,GUO Zhong-ning,WANG Guan.Research and Process Optimization on Undercut of Die Steel in Micro-etching[J].Surface Technology,2013,42(6):44-47
模具钢微细蚀刻的侧蚀研究及其工艺优化
Research and Process Optimization on Undercut of Die Steel in Micro-etching
投稿时间:2013-07-18  修订日期:2013-08-18
DOI:
中文关键词:  模具钢  微细蚀刻  侧蚀量  正交实验
英文关键词:die steel  Micro-etching  undercut  orthogonal experiment
基金项目:国家自然科学基金重点资助项目( U1134003) ;国家青年科学基金资助项目(51205066)
作者单位
黄红光 广东工业大学, 广州 510006 
郭钟宁 广东工业大学, 广州 510006 
王冠 广东工业大学, 广州 510006 
AuthorInstitution
HUANG Hong-guang Guangdong University of Technology, Guangzhou 510006, China 
GUO Zhong-ning Guangdong University of Technology, Guangzhou 510006, China 
WANG Guan Guangdong University of Technology, Guangzhou 510006, China 
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中文摘要:
      目的 研究 HNO3 浓度、喷淋压力、掩膜间隙、加工时间对侧蚀量的影响规律。 方法 设计正交实验,测定蚀刻后的侧蚀量,采用极差分析、方差分析法对侧蚀量进行分析,通过验证性实验进行验证。结果 侧蚀量随加工时间的延长以及喷淋压力、加工时间的增大而增大, 随 HNO3 浓度的增大而减小。侧蚀量最小的工艺是:HNO3 浓度为 1 . 8 mol / L,喷淋压力为 0 . 2 MPa,掩膜间隙为 50 μm,蚀刻时间为 2min。 结论 加工时间对侧蚀量有显著性影响,喷淋压力对侧蚀量影响较大,其次是掩膜间隙和 HNO3 浓度。 验证性试验证明最优工艺方案可行。
英文摘要:
      Objective To study the effects of HNO3 concentration, spray pressure, mask gap and etching time on undercut . Methods Orthogonal experiment was designed to measure the undercut, meanwhile, analysis methods such as range analysis and analysis of variance were used to analyze the undercut, and the results were then verified using confirmatory experiment . Results It was found that the experiment conditions of the least undercut were a HNO3 concentration of 0 . 3 mol / L, a spray pressure of 0 . 2 MPa, a mask gap of 50 μm and an etching time of 2 min. The undercut increased with the increase of the etching time, the spray pressure, and the mask gap, while it decreased with the rising concentration of HNO3 . Conclusion Etching time has a significant effect on undercut . Other important influencing factors were spray pressure, followed by mask gap and HNO3 concentration. Verification test showed that the optimal experiment scheme was feasible.
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