李新领,周志男,孙维连,孙铂,王会强,安广.氮气流量对 ZrN / Zr 薄膜色度特性的影响[J].表面技术,2013,42(3):13-15,41.
LI Xin-ling,ZHOU Zhi-nan,SUN Wei-lian,SUN Bo,WANG Hui-qiang,AN Guang.Effect of Nitrogen Flow on the Chromaticity Properties of ZrN / Zr Thin Films[J].Surface Technology,2013,42(3):13-15,41 |
| 氮气流量对 ZrN / Zr 薄膜色度特性的影响 |
| Effect of Nitrogen Flow on the Chromaticity Properties of ZrN / Zr Thin Films |
| 投稿时间：2012-12-26 修订日期：2013-01-14 |
| DOI： |
| 中文关键词: 氮气流量 ZrN / Zr 薄膜 色度 沉积速率 中频孪生靶 |
| 英文关键词:nitrogen flow ZrN / Zr thin films chromaticity deposition rate mid-frequency twin-targets |
| 基金项目:河北省自然科学基金项目( E2009000646) ; 河北农业大学社科基金和理工基金( LG20120101) |
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| Author | Institution |
| LI Xin-ling | Mechanical & Electronic Engineering College, Agriculture University of Hebei, Baoding 071001 , China;Light Metal of Alloy Material Engineering Centre in Hebei Province, Baoding 071001 , China |
| ZHOU Zhi-nan | Modern Education and Technology Centre, Agriculture University of Hebei, Baoding 071001 , China |
| SUN Wei-lian | Mechanical & Electronic Engineering College, Agriculture University of Hebei, Baoding 071001 , China;Light Metal of Alloy Material Engineering Centre in Hebei Province, Baoding 071001 , China |
| SUN Bo | Mechanical & Electronic Engineering College, Agriculture University of Hebei, Baoding 071001 , China |
| WANG Hui-qiang | Mechanical & Electronic Engineering College, Agriculture University of Hebei, Baoding 071001 , China;Light Metal of Alloy Material Engineering Centre in Hebei Province, Baoding 071001 , China |
| AN Guang | Mechanical & Electronic Engineering College, Agriculture University of Hebei, Baoding 071001 , China |
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| 中文摘要: |
| 采用中频孪生靶磁控溅射技术,在不锈钢和铝基体上沉积出 ZrN / Zr 薄膜,表征了薄膜的厚度、色度及表面形貌,研究了氮气流量对 ZrN / Zr 薄膜的沉积速率和色度的影响。 结果表明:随着氮气流量的增加,薄膜的沉积速率先降低,后升高,氮气流量在 2 . 5 X10-10~ 3 . 5 X10-10m3/ s 范围内时对薄膜的沉积速率影响很小;随着氮气流量的变化,薄膜的颜色呈现规律性的变化,在氮气流量 2 . 5 X10-10~ 3 . 5 X10-10m3/ s 范围内,可以制备出色彩亮丽的仿金薄膜 ZrN,且膜层致密。英文摘要 |
| 英文摘要: |
| The ZrN / Zr films were deposited on stainless steel and aluminum substrates by mid-frequency twin-targets magnetron sputtering technology. The thickness, chromaticity, and surface morphology of ZrN / Zr films were characterized. And the influences of nitrogen flow on deposition rate and chromaticity of ZrN / Zr films were studied. The results show that the deposition rate decreases first with the increase of nitrogen flow, then increases. Nitrogen flow between 2 . 5 X 10-10and 3 . 5 X 10-10m3/ s, the influence of nitrogen flow on deposition rate is very small . With the increase of nitrogen flow, the color of the film changes regularly. In the range of 2 . 5 X10-10~ 3 . 5 X10-10m3/ s, the gold ZrN films are bright and density. |
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