潘永强,王飞飞,杭凌侠,弥谦.四栅网式离子能量分析仪栅网特性研究[J].表面技术,2013,42(2):34-36,83.
PAN Yong-qiang,WANG Fei-fei,HANG Ling-xia,MI Qian.Study on Grid Characteristic of Four-gridded Ion Energy Analyzer[J].Surface Technology,2013,42(2):34-36,83 |
| 四栅网式离子能量分析仪栅网特性研究 |
| Study on Grid Characteristic of Four-gridded Ion Energy Analyzer |
| 投稿时间：2012-11-20 修订日期：2012-12-30 |
| DOI： |
| 中文关键词: 离子能量 栅网式能量分析仪 Simion 模拟 四栅网 |
| 英文关键词:ion energy gridded ion energy analyzer Simion simulation four-grid |
| 基金项目:陕西省教育厅重点实验室科研计划项目(12JS047) ;国防基础科研计划资助( A0920110016) |
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| Author | Institution |
| PAN Yong-qiang | Shaanxi Province Thin Film Technology and Optical Test Open Key Laboratory,Xi'an Technological University, Xi'an 710032 , China |
| WANG Fei-fei | Shaanxi Province Thin Film Technology and Optical Test Open Key Laboratory,Xi'an Technological University, Xi'an 710032 , China |
| HANG Ling-xia | Shaanxi Province Thin Film Technology and Optical Test Open Key Laboratory,Xi'an Technological University, Xi'an 710032 , China |
| MI Qian | Shaanxi Province Thin Film Technology and Optical Test Open Key Laboratory,Xi'an Technological University, Xi'an 710032 , China |
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| 中文摘要: |
| 为了研究等离子体中离子能量的分布规律,基于栅网式离子能量测试原理,采用离子光学模拟软件 Simion7 . 0 ,对四栅网离子能量分析仪中网格大小和网格间距对离子能量测量结果的影响进行了理论分析。分析结果表明,当离子能量为 800 eV 左右时,网格尺寸的大小会影响离子能量的测量精度,网格间距的大小对离子能量的测量结果几乎不产生影响。 该研究结果对栅网式离子能量测试装置的设计及网格参数的优化具有重要的理论和实践指导意义。 |
| 英文摘要: |
| In order to study the ion energy distribution regulation in plasma, the ion energy test principle of grid ion energy analyzer were introduced. The mesh size and the grid spacing of four-grid ion analyzer were respectively simulated by ion optical simulation software Simion7 . 0 . Theoretical analysis results show that when the ion enery is about 800 eV, the mesh size will affect ion energy measurement precision, grid spacing almost do not affect ion energy measurement results. This research results is of important theoretical and practical significance on grid type ion energy testing device design and grid optimization of parameters. |
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