朱萍,葛芳芳,李胜祗,黄峰.磁控溅射沉积V-Al-N 涂层的结构和性能研究[J].表面技术,2012,(4):46-48.
ZHU Ping,GE Fang-fang,LI Sheng-zhi,HUANG Feng.Structure and Properties of Magnetron Sputtered V-Al-N Coatings.Surface Technology,2012,(4):46-48.
磁控溅射沉积V-Al-N 涂层的结构和性能研究
Structure and Properties of Magnetron Sputtered V-Al-N Coatings
投稿时间:2012-04-12  修订日期:2012-08-20
DOI:
中文关键词:  反应磁控溅射  V-Al-N 涂层  微结构  摩擦磨损
英文关键词:reactive magnetron sputtering  V-Al-N coating  microstructure  friction and wear
基金项目:
作者单位
朱萍 安徽工业大学,马鞍山243002 
葛芳芳 中国科学院宁波材料技术与工程研究所,宁波315201 
李胜祗 安徽工业大学,马鞍山243002 
黄峰 中国科学院宁波材料技术与工程研究所,宁波315201 
AuthorInstitution
ZHU Ping Anhui University of Technology, Maanshan 243002, China 
GE Fang-fang Anhui University of Technology, Maanshan 243002, China 
LI Sheng-zhi Anhui University of Technology, Maanshan 243002, China 
HUANG Feng Anhui University of Technology, Maanshan 243002, China 
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中文摘要:
      通过反应磁控溅射法制备了V1-xAlxN(0≤x≤0.67)涂层,研究了Al含量对涂层微观结构、力学性能及摩擦磨损性能的影响。结果表明:在0≤x≤0.51范围内,随Al含量的增加,V1-xAlxN 涂层的微观结构不断变得致密,硬度不断提高,其中结构最为致密的V0.49Al0.51N 涂层的硬度较VN 提高了近3倍;在较宽的成分区间内,V1-xAlxN 涂层结构均比较致密,硬度大于30GPa,最高硬度达到41GPa;随着硬度的改善,V1-xAlxN 涂层的摩擦磨损性能较VN 涂层也有不同程度的提高。
英文摘要:
      V1-xAlxN(0≤x≤0.67)coatings were prepared by reactive magnetron co-sputtering. The effect of Al content on the phase, microstructure, mechanical properties and tribological behavior was studied. The result show that while a columnar structure is maitained in the V1-xAlxN(0≤x≤0.51)coatings, they are progressively densified with AlN addition. Simultaneously, the hardness is nearly quadrupled for the V0.49Al0.51N coating showing a very dense, non-columnar microstructure as compared with VN; Hard(>30GPa)coatings can be found over a moderate range of composition and the microstructures, and the highest value is 41 GPa; Concomitant with the hardness improvement, the V1-xAlxNcoatings exhibites superior wear resistance to that of the VN coating.
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